JPS6228200U - - Google Patents
Info
- Publication number
- JPS6228200U JPS6228200U JP12065185U JP12065185U JPS6228200U JP S6228200 U JPS6228200 U JP S6228200U JP 12065185 U JP12065185 U JP 12065185U JP 12065185 U JP12065185 U JP 12065185U JP S6228200 U JPS6228200 U JP S6228200U
- Authority
- JP
- Japan
- Prior art keywords
- scanning tube
- electron beam
- vacuum
- ion pump
- tube body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 108010083687 Ion Pumps Proteins 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
図面は本考案に係る電子線走査管の概略図であ
る。
１０……電子線走査管、１２……走査管本体、
１４……分岐管、１６……スパツタイオンポンプ
、１８……真空荒引きポート、２４……照射窓。
The drawing is a schematic diagram of an electron beam scanning tube according to the present invention. 10...Electron beam scanning tube, 12...Scanning tube main body,
14... Branch pipe, 16... Sputter ion pump, 18... Vacuum roughing port, 24... Irradiation window.
Claims (1)
り前記走査管本体に分岐接続されたスパツタイオ
ンポンプと前記分岐接続部に設けられた真空荒引
きポートとを有する電子線走査管において、前記
分岐接続部で前記真空荒引きポートと前記スパツ
タイオンポンプとの間に設けられた真空バルブを
有することを特徴とする電子線走査管。 The electron beam scanning tube includes a scanning tube body through which an accelerated electron beam passes, and has a sputtering ion pump branch-connected to the scanning tube body, and a vacuum roughing port provided at the branch connection. An electron beam scanning tube comprising a vacuum valve provided between the vacuum roughing port and the sputter ion pump at a connecting portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12065185U JPS6228200U (en) | 1985-08-06 | 1985-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12065185U JPS6228200U (en) | 1985-08-06 | 1985-08-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228200U true JPS6228200U (en) | 1987-02-20 |
Family
ID=31009168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12065185U Pending JPS6228200U (en) | 1985-08-06 | 1985-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228200U (en) |
-
1985
- 1985-08-06 JP JP12065185U patent/JPS6228200U/ja active Pending