JPH025207A - Magnetic head core material and production thereof - Google Patents

Abstract

PURPOSE:To improve corrosion resistance and wear resistance by incorporating specific additives into an Fe-Al-Si alloy having a high magnetic permeability and high saturation magnetic flux density and the relatively good corrosion resistance and wear resistance. CONSTITUTION:This material is formed to a film shape and has the compsn. which consists essentially of Fe, contains 2-6wt.% Al and 7-13wt.% Si and contains the additives consisting of at least one kind of elements in the groups of Ti, Zr and Hf of group IVa elements, V, Nb, and Ta of group Va elements, Mo and W of group VIa elements, Mn, Tc, Re of group VIIa elements, and Ru, Rh, Pd, Os, Ir, and Pt of platinum group elements. The corrosion resistance and wear resistance are further improved in this way.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a magnetic head core material used in a magnetic head that requires corrosion resistance and wear resistance, such as a video tape recorder (hereinafter referred to as VTR), and a method for manufacturing the same. It is something.

[Conventional technology]

In recent years, as the amount of information in the field of magnetic recording has diversified, there has been an increasing demand for increased recording density. Therefore, there is a need for a magnetic head core material that has high i3 magnetic flux density, high saturation magnetic flux density, and excellent corrosion resistance and wear resistance. In response to these demands, since ferrite has a limit in saturation magnetic flux density, Fe-based crystalline materials or Co-based amorphous materials are suitable as magnetic head core materials.

Furthermore, among the above-mentioned Fe-based crystalline material and Co-based amorphous material, the Fe-based crystalline material has a higher saturation magnetic flux density and is thermally stable than the Co-based amorphous material. In particular, Fs-Al
-Si-based alloy contains 9.5% by weight of Si (hereinafter referred to as wt%), At! In the sendust composition centered on 5.5 wt% and the balance Fe, high magnetic permeability, high saturation magnetic flux density,
It is known to be a material with high hardness.

[Problem to be solved by the invention]

However, as mentioned above, Fe-Al-3 having high hardness
Even when a magnetic head is manufactured using a thin film of a t-based alloy as a magnetic head core material, this magnetic head is used as a magnetic head for a high-quality VTR that has a high relative speed with a magnetic tape, and the VTR has abrasive properties. There may be problems with abrasion resistance when high magnetic tapes are used, and with corrosion resistance when used, for example, in humid summer months. From this point of view, there is a need for a magnetic head core material with excellent wear resistance and corrosion resistance, as well as an appropriate manufacturing method for manufacturing such a magnetic head core material.

[Means for Solving the Problems] In order to solve the above problems, the magnetic head core material according to the invention as claimed in claim 1 is formed in a film shape, and is composed of mainly Fe, 2 to 6% by weight of Al, and 2 to 6% by weight of Al. 7-13% by weight of Si
Contains Na group elements Tis Zrs Hf, Va
Group elements V, Nb, Ta, Via group elements Mo, W, V
Group IIa elements Mn, Tc5Re, platinum group elements Ru,
The composition includes an additive consisting of at least one element in the group Rh, Pd, Os, Ir, and Pt.

In order to solve the above-mentioned problem, the method for manufacturing a magnetic head core material according to the invention of claim 2 includes:
An evaporation source material consisting of F e SA 1 and Si and an additive are irradiated with an electron beam emitted from an electron gun to deposit each material on the surface of the substrate, thereby forming a Fe-Al-3T-additive alloy film on the substrate. In the method for manufacturing a magnetic head core material, the evaporation source material and the additive are irradiated with electron beams using separate electron guns.

[For production]

According to the structure of the invention of claim 1, the present magnetic head core material is made of Fe-Al-3, which has high magnetic permeability and high saturation magnetic flux density, and has relatively good corrosion resistance and wear resistance.
In the t-based alloy, Ti, Zr, HE, which are IVa group elements, V s N b % Ta, which are Va group elements, and Mo, which are group A elements.
, W, VIIa group elements M n s Tc5Res Platinum group elements Ru, Rh, Pd, 0sIr and Pt, as it contains an additive consisting of at least one element in the group, so it has good corrosion resistance and wear resistance. performance is further improved. Therefore, a magnetic head using the present magnetic head core material can have both high magnetic permeability and high saturation magnetic flux density, as well as high corrosion resistance and wear resistance.

According to the structure of the invention of claim 2, for example, two electron guns are used, and one electron gun evaporates the evaporation source material consisting of Fe, Al, and Si onto the substrate, and at the same time, the other electron gun evaporates the evaporation source material on the substrate. Additives are deposited onto the substrate using an electron gun. In this way, by evaporating the evaporation source material and the additive onto the substrate using separate electron guns, manufacturing costs can be reduced and the additive can be uniformly distributed in the produced alloy film. .

That is, at least two electron guns are required for vapor deposition of the evaporation source material and the additive, which makes the manufacturing equipment inexpensive and reduces manufacturing costs. In addition, since the additive is vapor-deposited using an independent electron gun, the output of the electron gun is set according to the additive's unique vapor deposition conditions, such as the additive's melting point, vapor pressure, and film-forming rate, to control the vapor deposition state. Regulation? 1
1, and the additive can be uniformly distributed in the produced alloy film. Further, according to the electron beam evaporation method such as the present manufacturing method, the film formation rate is high and the amount of bunch processing can be increased, so that productivity can be improved.

On the other hand, to manufacture magnetic heads, for example, Fe-based crystal ribbons or Co
There is a method of using an amorphous ribbon as a magnetic head core material. In this method, the magnetic head core material is sandwiched between non-magnetic substrates and bonded with resin, but this resin bonding method makes it difficult to control the adhesive layer. Furthermore, when the track width is formed by cutting from a bulk ribbon, controlling the track width becomes more difficult as the track becomes narrower.

Also, considering the frequency dependence of magnetic permeability of alloy materials,
In order to obtain high magnetic permeability in high frequency bands, a magnetic head core material is required in which soft magnetic material with a thickness of several thousand angstroms to several microns and non-magnetic material with a thickness of several thousand angstroms are alternately laminated in consideration of overcurrent loss. be done. However, it is difficult to produce this laminated core material from a bulk material in terms of controlling the thickness of the soft magnetic material and the bonding method between the magnetic layer and the nonmagnetic layer.

Therefore, conventionally, a magnetic head manufacturing method has been adopted in which an alloy-based soft magnetic thin film is formed on the surface of a nonmagnetic substrate by making full use of thin film manufacturing techniques such as vacuum evaporation and sputtering. Between the sputtering method and the vacuum evaporation method, the vacuum evaporation method allows for a larger batch throughput than the sputtering method, and is superior in mass productivity. However, Fe, AI! When using an alloy ingot prepared by melting , Si and additives in a high-frequency melting furnace or the like as an evaporation source, many of the above additives have a high melting point, and Fe −, A I2 , S t
Since the melting point and vapor pressure are significantly different from those of the alloy film, it is difficult to control the composition of the alloy film to an optimal state that provides good magnetic properties. Another possibility is to use each material as an independent evaporation source and evaporate them individually and simultaneously deposit them, but if this is done using the electron beam atrophy method or ion blating method, the electron gun will at least Four electron guns are required, and a control device is required for each electron gun. Further, according to the resistance heating method, there are problems such as contamination of the crucible material, which reduces the purity of the film and deteriorates the magnetic properties of the film, and makes it difficult to produce a thick film.

In view of the above points, this manufacturing method is suitable for manufacturing magnetic head core materials.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.

The magnetic head core material according to the present invention is formed into a film shape,
Mainly Fe, /l 2-6% by weight and Si 7-6% by weight
Contains 13% by weight and T is Z of IVa group element
r % Hf 1V Group a elements V, Nb.

Ta, Via group element Mo, W, VIIa group element Mn
, Tc, Re, Rus Rh5Pd of platinum group elements.

It has a composition containing an additive consisting of at least one element from the group O3, Ir and Pt.

As shown in FIG. 1, the electron beam evaporation apparatus for manufacturing the magnetic head core material described above consists of a vacuum belljar 1, which is a vacuum container, and a vapor deposition film is formed on the upper part of the vacuum belljar 1, which is made of crystallized glass or ceramics. Multiple boards 2・
... are arranged in parallel in an arc shape with the vapor deposition surface facing downward. A heater 3 for heating the substrates 2 to a vapor deposition temperature is disposed above the substrates 2 along the substrates 2.

In the lower part of the vacuum belljar 1, electron beam generating filaments 4 and 5 serving as electron guns are arranged in symmetrical positions on the left and right, and electron beams 4a and 5a are generated from each electron beam generating filament 4 and 5. At the irradiation position, that is, between the two electron beam generating filaments 4 and 5, crucibles 6 and 7 corresponding to each filament 4 and 5 are placed in a symmetrical position. F
An evaporation source material 8 consisting of 13% Al and Si is arranged, and an additive 9 as an evaporation source material is arranged in the other crucible 7. The evaporation source material 8 is, for example, F e s
The above additive 9, which is made of an alloy ingot produced by melting A 1 and Si in a high frequency melting furnace or the like, contains Ti, Zr, Hf of IVa group elements, and V % N b -T a of Va group elements. 1VI Group a element Mo,
Contains at least one element in the group consisting of W, VIIa group elements Mns Tc, Re, platinum group elements Rus Rh, Pd, Os, Ir and Pt.

In addition, the heater 3 and the crucible 6 in the vacuum bell jar 1 are
A shutter 10 which can be opened and closed and which restricts the vapors of the evaporation source material 8 and additive 9 from reaching the substrate 2 .

In the above configuration, when the electron beam evaporation apparatus operates, electron beams 4a and 5a are generated from the electron beam generation filaments 4 and 5, and these electron beams 4a and 5a are transmitted to the evaporation source material 8 disposed in the crucibles 6 and 7. and additive 9 are irradiated. At this time, the shutter 10 is open.

Note that the electron beam power in the electron beam generating filament 4, that is, the evaporation power of Fe, Al, and Si is 10
The vapor deposition power of the additive 9 is set to an appropriate value in consideration of the melting point, vapor pressure, and film formation rate of the additive 9 used.

When irradiated with the electron beams 4a and 5a, the evaporation source material 8 and the additive 9 turn into vapor. This vapor becomes a vapor flow, passes through the shutter 10, reaches the substrate 2...
adheres to the surface of As a result, a Fe-AN-3t-X alloy film (X is additive 9) is formed on the surface of the substrate 2 .

In this example, the thickness of the Fe-AJ-Si-X alloy film was 5 μm, and the content of additive 9 in the alloy film was 1 wt%.

When the composition distribution in the film thickness direction of the Fe-AJ-Si-X alloy film formed as described above was investigated, the results shown in FIG. 2 were obtained. The compositional analysis of the alloy film described above was performed by energy dispersive analysis using a scanning electron microscope in the cross section of the film from the substrate 2@ toward the film surface. F at this time
The overall composition of the e-Al-3t-X alloy film is Si8.3
wt%, Al4wt%, X1wt%, and the balance was Fe.

From the results in the same figure, the composition distribution in the film thickness direction of each material is
1-9wt%, Si6-l 9wt%, additive 9
is evenly distributed. Judging from this value, the composition distribution of each material in the film thickness direction is AJ1~l 9wt%, Si6
It is preferable that the amount is about 12 wt%, and that the additive 9 is uniformly dispersed.

Furthermore, as described above, the reason why the composition distribution of the additive 9 is uniform is that the additive 9 is deposited by an independent electron gun, that is, the filament 5 for generating an electron beam. As will be described later, due to the function of the additive 9 that is uniformly distributed, the corrosion resistance and wear resistance are improved to the same extent in the film thickness direction and at any arbitrary location on the film surface, and the unevenness of corrosion and wear within the film is reduced. It is designed not to occur.

Next, a wear resistance test was conducted on the above Fe-Al-Si-X alloy film. The results are shown in Table 1. In this test, the wear amount of the Fe-AJ-3t-X alloy film and the Fe-Al-Si alloy film containing no additive 9 was compared relative to each other. During the test, as shown in Figure 3,
The aforementioned Si8, 3 W t 9/6, Ali! 4wt%
, X1wt% and the balance Fe-
An Ant-Si-X alloy film 12 was formed, and a dummy head 13 was manufactured. Additive 9 is Ru, a platinum group element.
, Rh, Pd and Pt were used individually. And F
A metal tape was brought into sliding contact with the surface of the e-Al-3t-X alloy film 12, and the wear amount of the Fe-IVI-3t-X alloy film 12 was measured. Furthermore, in the same manner, a dummy head having a Fe-Al-5i alloy film having a composition not containing 1 wt % was produced, and the amount of wear was measured.

From the results in Table 1, it is clear that Fe-Al- without additive 9
While the relative wear amount of the 5i alloy film is 1, the relative wear amount of the Fe-AA-Si-X alloy film containing additive 9 is 0.8 or 0.7. . Therefore, the wear resistance of the Fa-Al-Si-X alloy film containing Additive 9 is improved.

In the above example, the platinum group element Ru is used as the additive 9.
The case where Rhs Pd%Pt is used alone is shown, but when multiple types of the above elements are used simultaneously, or when Ti of the IVa group element, Zrs Hf, V of the Va group element
, Nbs Ta, MO1W of Vla group elements, Mnx of VIIa group elements, Tc, and Re can be used alone or in combination of a plurality of types, and the wear resistance can be similarly improved.

Next, the results of a corrosion resistance test performed on the Fe-A (1-Si-X alloy film) are shown below.
e-Al-5t-X alloy film and F containing no additive 9
e-Aj! -Si-based alloy film and 5% NaC at room temperature.
j! It was immersed in an aqueous solution for 24 hours and the state of corrosion was examined.

As a result, the Fe-Al-5i alloy film not containing Additive 9 suffered dotted corrosion in a part of its cross section. In contrast, the Fe-Al-Si-X alloy film did not suffer from corrosion. Furthermore, no corrosion of the surface portion occurred in any of the alloy films. From this result, Fe containing additive 9
It was found that -Al-Si-X alloy has improved corrosion resistance.

Next, the coercive force of the Fe-Al1-Si-X alloy film was investigated. In this test, as a Fe-Affi-3t-X alloy, the platinum group elements Ru, Rh, which are additives 9,
Those containing 1 wt% of Pd and Pt individually, and 2w
Coercive force of each was measured. The results are shown in Table 2. The coercive force of the Fe-Al-5i alloy film that does not contain additive 9 is 0.70.
It was e.

As is clear from the results in Table 2, Fe-Al-Si-
When the X-based alloy film contains 1 wt% of additive 9, its coercive force hardly increases compared to the coercive force of 0.70 e of the Fe-Al-Si-based alloy film that does not contain additive 9. On the other hand, when 2 wt % of additive 'm9 is contained, the coercive force increases significantly. Regarding this, Tis, an rl/a group element, is used as the additive 9.
Similar results have been obtained when Zr, Hf, Va group elements V, Nb5Ta, Via group elements Mo, W, and VIIa group elements Mn, Tc, and Re are used. Therefore,
Considering the magnetic properties, it is preferable that the content of the additive 9 be 1 wL%. However, even if the content of the additive 9 is 1 wt% or more, it still has sufficient magnetic properties as a magnetic head core material.

In this example, the additive 9 is evaporated by an electron beam evaporation method using an electron beam thinning device, but the method is not limited to this, and it may be performed by a resistance heating method or a high frequency heating method. . Further, although the configuration is such that electron beam generating filaments 4 and 5 are provided individually corresponding to the evaporation source material 8 and the additive 9, the electron beam generating filaments 4 and 5 are set as one piece. The electron beam generated from one filament is transferred to the evaporation source material 8.
It is also possible to adopt a method in which the irradiation and the additive 9 are alternately irradiated at minute time intervals.

On the other hand, as mentioned above, manufacturing of magnetic head core materials requires
Two filaments 4 for generating electron beams as an electron gun
・Use one filament 4 for electron beam generation.
The evaporation source material 8 made of Fe, Al, and Sl is irradiated by the evaporation source material 8, and the additive 9 is irradiated by the other electron beam generating filament 5 to form Fe, Al, and Si on the substrate 2.
An electron beam evaporation method is suitable, in which the additive 9 is vapor-deposited to form a Fe-Al-5i-X alloy film. According to this vapor deposition method, two electron beam generating filaments 4
・Since the vapor deposition can be performed by step 5, it is possible to reduce the manufacturing cost, and the vapor deposition state of the additive 9 can be controlled separately to uniformly distribute the additive 9 in the formed alloy film. I can do it. Further, since the film formation rate is fast and a large amount of batch processing can be performed, productivity can be increased.

〔Effect of the invention〕

As described above, the magnetic heald core material according to the invention of claim 1 is formed in a film shape, and is mainly composed of Fe and 2 Al.
~6% by weight and 7-13% by weight of Si, and I
VaVa group element i, Zr, Hf, Va group element V, Nb
5Ta, MO of Via group elements, W%M of VIIa group elements
n,, Tc, Re, Rus Rh5Pds of platinum group elements
At least one in the group Oss I r and Pt
It has a composition that includes additives consisting of various types of elements.

Therefore, wear resistance and corrosion resistance are improved, and
It can have good soft magnetic properties.

Therefore, the present magnetic head core material is used for magnetic heads for digital audio and high-quality VTRs, etc., that is, for magnetic tapes with high abrasiveness, and for magnetic heads in devices where the relative speed between the magnetic tape and the magnetic head is high. It is suitable as a material for Further, even when used under high humidity, it has good corrosion resistance, so it has the effect of being able to provide high reliability.

As described above, in the method for manufacturing a magnetic head core material according to the second aspect of the invention, Fe, Aj! An evaporation source material consisting of Si and Si is irradiated with an electron beam emitted by an electron gun to deposit each material on the surface of the substrate, and a Fe-Al-Si -additive alloy film is formed on the substrate. In the method for manufacturing the head core material, the evaporation source material and the additive are irradiated with electron beams using separate electron guns.

Therefore, the deposition of the evaporation source material and the additive requires only a few electron guns (two electron guns), which makes the manufacturing apparatus inexpensive and can reduce the manufacturing cost.

In addition, since the additive is deposited using an independent electron gun, it is possible to set the output of the electron gun according to the deposition conditions specific to the additive and control the deposition state. This provides effects such as being able to uniformly distribute additives.

[Brief explanation of the drawing]

1 to 3 show an embodiment of the present invention, in which FIG. 1 is a schematic explanatory diagram showing the configuration of an electron beam evaporation apparatus, and FIG. 2 is a Fe-Al-Si-X system. Graph showing the composition distribution in the film thickness direction of an alloy film. FIG. 3 is a perspective view showing a dummy head for measuring wear resistance. 1 is a vacuum bell jar (vacuum container), 2 is a substrate, 3 is a heater, 4 and 5 are electron beam generating filaments (electron gun),
6 and 7 are crucibles, 8 is an evaporation source material, 9 is an additive, 10 is a shutter, 11 is a substrate, 12 is a Fe-Al-3t-X alloy film, and 13 is a dummy head. Figure 1 Patent Applicant: Sharp Showajin Co., Ltd.;

Claims (1)

[Scope of Claims] 1. Formed in the form of a film, containing mainly Fe, 2 to 6% by weight of Al, and 7 to 13% by weight of Si, and containing Ti, Zr, Hf, and Va group elements of IVa group elements. V, Nb, Ta,
Group VIa elements Mo, W, Group VIIa elements Mn, Tc, R
e. A magnetic head core material having a composition containing an additive consisting of at least one element in the group of platinum group elements Ru, Rh, Pd, Os, Ir and Pt. 2. In a vacuum container, the evaporation source materials and additives made of Fe, Al, and Si are irradiated with an electron beam emitted from an electron gun to deposit each material on the surface of the substrate to form Fe-Al-Si.
- A method for manufacturing a magnetic head core material in which an additive-based alloy film is formed on a substrate, wherein the evaporation source material and the additive are irradiated with electron beams using separate electron guns. manufacturing method.