JPH0253964U - - Google Patents
Info
- Publication number
- JPH0253964U JPH0253964U JP12514488U JP12514488U JPH0253964U JP H0253964 U JPH0253964 U JP H0253964U JP 12514488 U JP12514488 U JP 12514488U JP 12514488 U JP12514488 U JP 12514488U JP H0253964 U JPH0253964 U JP H0253964U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- chamber
- rotary table
- vapor deposition
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 13
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12514488U JPH0253964U (2) | 1988-09-27 | 1988-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12514488U JPH0253964U (2) | 1988-09-27 | 1988-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0253964U true JPH0253964U (2) | 1990-04-18 |
Family
ID=31375489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12514488U Pending JPH0253964U (2) | 1988-09-27 | 1988-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0253964U (2) |
-
1988
- 1988-09-27 JP JP12514488U patent/JPH0253964U/ja active Pending
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