JPH0256444U - - Google Patents

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Publication number
JPH0256444U
JPH0256444U JP13529688U JP13529688U JPH0256444U JP H0256444 U JPH0256444 U JP H0256444U JP 13529688 U JP13529688 U JP 13529688U JP 13529688 U JP13529688 U JP 13529688U JP H0256444 U JPH0256444 U JP H0256444U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
sides
lowest point
holding plate
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13529688U
Other languages
English (en)
Other versions
JPH0711470Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988135296U priority Critical patent/JPH0711470Y2/ja
Publication of JPH0256444U publication Critical patent/JPH0256444U/ja
Application granted granted Critical
Publication of JPH0711470Y2 publication Critical patent/JPH0711470Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案になる半導体基板保持具の構成
例を示す図、第２図は従来のウエハ保持具の例を
示す図、第３図は問題点を説明する図、である。
図において、 １は半導体基板（ウエハ）、３は副保持板、３
ａ，６ａは凹部、６は主保持板、７はステイ、８
は半導体基板（ウエハ）保持具、をそれぞれ表わ
している。

Claims (1)

  1. 【実用新案登録請求の範囲】 複数個の円形状半導体基板を立てた状態で平行
    に整列保持する半導体基板保持具であつて、 上記半導体基板１の少なくとも下側半円部分に
    は、該半導体基板１の最下点を中心とする周上両
    側４５度の範囲を除く周上の最下点両側対称位置
    に、該半導体基板１を外周部で保持する凹部６ａ
    を備えた主保持板６を該凹部６ａを対向させて配
    置してなることを特徴とした半導体基板保持具。
JP1988135296U 1988-10-17 1988-10-17 半導体基板保持具 Expired - Lifetime JPH0711470Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988135296U JPH0711470Y2 (ja) 1988-10-17 1988-10-17 半導体基板保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988135296U JPH0711470Y2 (ja) 1988-10-17 1988-10-17 半導体基板保持具

Publications (2)

Publication Number Publication Date
JPH0256444U true JPH0256444U (ja) 1990-04-24
JPH0711470Y2 JPH0711470Y2 (ja) 1995-03-15

Family

ID=31394791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988135296U Expired - Lifetime JPH0711470Y2 (ja) 1988-10-17 1988-10-17 半導体基板保持具

Country Status (1)

Country Link
JP (1) JPH0711470Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193877A (ja) * 1984-03-13 1985-10-02 信越半導体株式会社 輸送用半導体ウエーハケース
JPS6315042U (ja) * 1986-07-16 1988-02-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193877A (ja) * 1984-03-13 1985-10-02 信越半導体株式会社 輸送用半導体ウエーハケース
JPS6315042U (ja) * 1986-07-16 1988-02-01

Also Published As

Publication number Publication date
JPH0711470Y2 (ja) 1995-03-15

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