JPH0257955U - - Google Patents
Info
- Publication number
- JPH0257955U JPH0257955U JP13623388U JP13623388U JPH0257955U JP H0257955 U JPH0257955 U JP H0257955U JP 13623388 U JP13623388 U JP 13623388U JP 13623388 U JP13623388 U JP 13623388U JP H0257955 U JPH0257955 U JP H0257955U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- drive shaft
- workpiece
- crucible
- ion plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000007733 ion plating Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図および第２図は本考案の一実施例を示す
もので、第１図は本実施例のイオンプレーテイン
グ装置の概略構成を示す正断面図、第２図は第１
図の―線矢視図である。第３図は従来のイオ
ンプレーテイング装置の概略構成を示す図である
。
１……真空容器、２……ルツボ、３……蒸発材
料、４……ワーク支持機構、５……ワーク、６…
…取付板、７……駆動軸、８……ワーク取付具、
１０……モータ（回転駆動源）。
1 and 2 show an embodiment of the present invention. FIG. 1 is a front cross-sectional view showing the schematic configuration of the ion plating apparatus of this embodiment, and
FIG. FIG. 3 is a diagram showing a schematic configuration of a conventional ion plating apparatus. DESCRIPTION OF SYMBOLS 1... Vacuum container, 2... Crucible, 3... Evaporation material, 4... Work support mechanism, 5... Work, 6...
...Mounting plate, 7...Drive shaft, 8...Workpiece fixture,
10...Motor (rotational drive source).
Claims (1)
その蒸気を正イオン化するとともに、ワークに負
の電圧を印加することにより、正イオン化した蒸
気をワークの表面に付着させて薄膜を形成するイ
オンプレーテイング装置において、真空容器内の
底部に蒸発材料を蒸発させるためのルツボを配置
するとともに、その真空容器の上部に、多数のワ
ークを複数の群に分けて支持して前記ルツボの上
方に配置する複数台のワーク支持機構を対向させ
て設け、前記各ワーク支持機構は、それぞれ前記
真空容器の側壁面を貫通してその先端部が真空容
器内に挿入された駆動軸と、その駆動源を回転さ
せるための回転駆動源と、前記駆動軸の先端部周
囲に設けられて、駆動軸が回転したときにその駆
動軸を中心として公転するとともにそれら自身の
軸線を中心としてそれぞれが自転するようにされ
た複数のワーク取付具とから構成されてなること
を特徴とするイオンプレーテイング装置。 An ion plating device that evaporates the evaporation material inside a vacuum container and positively ionizes the vapor, and also applies a negative voltage to the workpiece to attach the positively ionized vapor to the surface of the workpiece to form a thin film. A crucible for evaporating the evaporation material is arranged at the bottom of the vacuum container, and a plurality of units support a large number of workpieces divided into a plurality of groups at the top of the vacuum container and are arranged above the crucible. work support mechanisms are provided facing each other, and each of the work support mechanisms has a drive shaft whose tip end is inserted into the vacuum container by penetrating the side wall surface of the vacuum container, and a drive source thereof for rotating the drive shaft. a rotational drive source, and a plurality of rotational drive sources provided around the tip of the drive shaft so that when the drive shaft rotates, each of them revolves around the drive shaft and rotates around its own axis. An ion plating device comprising: a workpiece fixture;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13623388U JPH0257955U (en) | 1988-10-19 | 1988-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13623388U JPH0257955U (en) | 1988-10-19 | 1988-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0257955U true JPH0257955U (en) | 1990-04-26 |
Family
ID=31396550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13623388U Pending JPH0257955U (en) | 1988-10-19 | 1988-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0257955U (en) |
-
1988
- 1988-10-19 JP JP13623388U patent/JPH0257955U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0357955U (en) | ||
| JPH0263534U (en) | ||
| JPS6215566U (en) | ||
| JPH05339711A (en) | Vacuum vapor deposition device | |
| JPH0231054U (en) | ||
| JPS6221065U (en) | ||
| JPS629323Y2 (en) | ||
| JPH0158661U (en) | ||
| JPS62116435U (en) | ||
| JPS6183031U (en) | ||
| JPH0322061U (en) | ||
| JPS62110265U (en) | ||
| JPS6475677A (en) | Film forming device | |
| JPH0198161U (en) | ||
| JPH0194452U (en) | ||
| JPH0487154U (en) | ||
| JPH0165824U (en) | ||
| JPS6296670A (en) | Vacuum vapor deposition apparatus | |
| JPS6453750U (en) | ||
| JPS6293364U (en) | ||
| JPS6270430U (en) | ||
| KR970063452A (en) | Sputtering device | |
| JPS61133556U (en) | ||
| JPS60117856U (en) | sputtering equipment | |
| JPS61120757U (en) |