JPH0322061U - - Google Patents
Info
- Publication number
- JPH0322061U JPH0322061U JP8030889U JP8030889U JPH0322061U JP H0322061 U JPH0322061 U JP H0322061U JP 8030889 U JP8030889 U JP 8030889U JP 8030889 U JP8030889 U JP 8030889U JP H0322061 U JPH0322061 U JP H0322061U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- thin film
- lamps
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は本考案装置の要部構成を示した模式断
面図、第２図は太陽電池の構成を示した模式断面
図、第３図は従来の蒸着装置の要部構成を示した
模式断面図である。
１……基板、３……低抵抗ＣｕＩｎＳｅ２薄膜
、４……高抵抗ＣｕＩｎＳｅ２薄膜、９……真空
容器、１０……Ｃｕ蒸発源容器、１１……Ｉｎ蒸
発源容器、１２……Ｓｅ蒸発源容器、１３……シ
ヤツター、１４……加熱ランプ、１５……Ｓｅ用
膜厚モニター、１６ａ……Ｃｕ用膜厚モニター、
１６ｂ……Ｉｎ用膜厚モニター、１７……基板ホ
ルダー、１８……回転軸。
Figure 1 is a schematic cross-sectional view showing the configuration of the essential parts of the device of the present invention, Figure 2 is a schematic cross-sectional view showing the configuration of a solar cell, and Figure 3 is a schematic cross-sectional view showing the configuration of the main parts of a conventional vapor deposition apparatus. It is a diagram. 1... Substrate, 3... Low resistance CuInSe 2 thin film, 4... High resistance CuInSe 2 thin film, 9... Vacuum container, 10... Cu evaporation source container, 11... In evaporation source container, 12... Se evaporation source container, 13... shutter, 14... heat lamp, 15... film thickness monitor for Se, 16a... film thickness monitor for Cu,
16b...In film thickness monitor, 17...substrate holder, 18...rotation shaft.
Claims (1)
前記基板を加熱する複数個のランプ、多元系化合
物薄膜の各成分元素を収容しこれら元素を別々に
蒸発させる複数個の蒸発源容器、前記蒸発元素の
通過時に開口するシヤツターを備え、前記基板上
に前記多元系化合物薄膜を蒸着する装置であつて
、前記基板ホルダーとして床面と平行に中心を通
る回転軸に取り付け外側面に前記基板を保持する
中空の多角柱状体を用い、この基板ホルダーの内
面近傍に前記複数個のランプを配置したことを特
徴とする多元系化合物薄膜の蒸着装置。 a substrate holder that holds the substrate in a vacuum container;
A plurality of lamps for heating the substrate, a plurality of evaporation source containers for accommodating each component element of the multi-component thin film and evaporating these elements separately, and a shutter that opens when the evaporation element passes, In this apparatus, the substrate holder is a hollow polygonal columnar body that is attached to a rotating shaft passing through the center parallel to the floor surface and holds the substrate on the outer surface of the substrate holder. A vapor deposition apparatus for a multi-component thin film, characterized in that the plurality of lamps are arranged near an inner surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8030889U JPH0322061U (en) | 1989-07-07 | 1989-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8030889U JPH0322061U (en) | 1989-07-07 | 1989-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0322061U true JPH0322061U (en) | 1991-03-06 |
Family
ID=31625250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8030889U Pending JPH0322061U (en) | 1989-07-07 | 1989-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322061U (en) |
-
1989
- 1989-07-07 JP JP8030889U patent/JPH0322061U/ja active Pending
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