JPH0258334U - - Google Patents

Info

Publication number
JPH0258334U
JPH0258334U JP13647388U JP13647388U JPH0258334U JP H0258334 U JPH0258334 U JP H0258334U JP 13647388 U JP13647388 U JP 13647388U JP 13647388 U JP13647388 U JP 13647388U JP H0258334 U JPH0258334 U JP H0258334U
Authority
JP
Japan
Prior art keywords
wafers
lever
ring
loading
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13647388U
Other languages
English (en)
Other versions
JPH0625010Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13647388U priority Critical patent/JPH0625010Y2/ja
Publication of JPH0258334U publication Critical patent/JPH0258334U/ja
Application granted granted Critical
Publication of JPH0625010Y2 publication Critical patent/JPH0625010Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Discharge Of Articles From Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本考案が使用される状態の説明図、第
２図は本考案の構成を示す断面図、第３図は部分
的側面図。 １……ウエハテーブル、２……搬送機構、３…
…ウエハ、４……支持ピン、５……中心軸、７…
…テーブル上下駆動用モータ、１０……レバー、
１１……垂直ロツド、１２……リング。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハを所定の精度送り可能な載物用テーブル
    に搬入出する装置において、テーブルの上昇、下
    降の駆動用モータの偏心カムの軸８に設けられた
    レバー１０と、このレバーによつて上下動する垂
    直ロツド１１と、このロツドに取付けられたリン
    グ１２とリング上面に下端を位置し、かつテーブ
    ルを貫通する複数本のウエハを支えるピン４とか
    ら構成されるウエハ受渡し機構。
JP13647388U 1988-10-19 1988-10-19 ウエハの受渡し機構 Expired - Fee Related JPH0625010Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13647388U JPH0625010Y2 (ja) 1988-10-19 1988-10-19 ウエハの受渡し機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13647388U JPH0625010Y2 (ja) 1988-10-19 1988-10-19 ウエハの受渡し機構

Publications (2)

Publication Number Publication Date
JPH0258334U true JPH0258334U (ja) 1990-04-26
JPH0625010Y2 JPH0625010Y2 (ja) 1994-06-29

Family

ID=31397018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13647388U Expired - Fee Related JPH0625010Y2 (ja) 1988-10-19 1988-10-19 ウエハの受渡し機構

Country Status (1)

Country Link
JP (1) JPH0625010Y2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002164423A (ja) * 2000-11-28 2002-06-07 Tokyo Seimitsu Co Ltd ウェーハリフト装置を備えたウェーハ保持装置
JP2007158005A (ja) * 2005-12-05 2007-06-21 Tokyo Electron Ltd 基板搬送装置及び基板処理装置
WO2017094462A1 (ja) * 2015-12-03 2017-06-08 日本電気硝子株式会社 板ガラスの製造方法及び製造装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002164423A (ja) * 2000-11-28 2002-06-07 Tokyo Seimitsu Co Ltd ウェーハリフト装置を備えたウェーハ保持装置
JP2007158005A (ja) * 2005-12-05 2007-06-21 Tokyo Electron Ltd 基板搬送装置及び基板処理装置
WO2017094462A1 (ja) * 2015-12-03 2017-06-08 日本電気硝子株式会社 板ガラスの製造方法及び製造装置
CN108025415A (zh) * 2015-12-03 2018-05-11 日本电气硝子株式会社 板状玻璃的制造方法以及制造装置
TWI683774B (zh) * 2015-12-03 2020-02-01 日商日本電氣硝子股份有限公司 平板玻璃的製造方法及製造裝置
CN108025415B (zh) * 2015-12-03 2020-03-17 日本电气硝子株式会社 板状玻璃的制造方法以及制造装置

Also Published As

Publication number Publication date
JPH0625010Y2 (ja) 1994-06-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees