JPH025873U - - Google Patents

Info

Publication number
JPH025873U
JPH025873U JP8427888U JP8427888U JPH025873U JP H025873 U JPH025873 U JP H025873U JP 8427888 U JP8427888 U JP 8427888U JP 8427888 U JP8427888 U JP 8427888U JP H025873 U JPH025873 U JP H025873U
Authority
JP
Japan
Prior art keywords
cooling medium
attached
disk
cooling
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8427888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0728692Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988084278U priority Critical patent/JPH0728692Y2/ja
Publication of JPH025873U publication Critical patent/JPH025873U/ja
Application granted granted Critical
Publication of JPH0728692Y2 publication Critical patent/JPH0728692Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988084278U 1988-06-25 1988-06-25 ウエハディスク Expired - Lifetime JPH0728692Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988084278U JPH0728692Y2 (ja) 1988-06-25 1988-06-25 ウエハディスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988084278U JPH0728692Y2 (ja) 1988-06-25 1988-06-25 ウエハディスク

Publications (2)

Publication Number Publication Date
JPH025873U true JPH025873U (cs) 1990-01-16
JPH0728692Y2 JPH0728692Y2 (ja) 1995-06-28

Family

ID=31308974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988084278U Expired - Lifetime JPH0728692Y2 (ja) 1988-06-25 1988-06-25 ウエハディスク

Country Status (1)

Country Link
JP (1) JPH0728692Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4919518U (cs) * 1972-05-18 1974-02-19
JP2009266391A (ja) * 2008-04-22 2009-11-12 Sumco Corp 酸素イオン注入装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61116746A (ja) * 1984-09-19 1986-06-04 アプライド　マテリアルズ　インコ−ポレ−テツド 半導体ウエハをイオンインプランテ−シヨンする装置及び方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61116746A (ja) * 1984-09-19 1986-06-04 アプライド　マテリアルズ　インコ−ポレ−テツド 半導体ウエハをイオンインプランテ−シヨンする装置及び方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4919518U (cs) * 1972-05-18 1974-02-19
JP2009266391A (ja) * 2008-04-22 2009-11-12 Sumco Corp 酸素イオン注入装置

Also Published As

Publication number Publication date
JPH0728692Y2 (ja) 1995-06-28

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