JPH0262553U - - Google Patents
Info
- Publication number
- JPH0262553U JPH0262553U JP14100288U JP14100288U JPH0262553U JP H0262553 U JPH0262553 U JP H0262553U JP 14100288 U JP14100288 U JP 14100288U JP 14100288 U JP14100288 U JP 14100288U JP H0262553 U JPH0262553 U JP H0262553U
- Authority
- JP
- Japan
- Prior art keywords
- light
- workpiece
- lamp
- processing chamber
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14100288U JPH0262553U (cs) | 1988-10-31 | 1988-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14100288U JPH0262553U (cs) | 1988-10-31 | 1988-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0262553U true JPH0262553U (cs) | 1990-05-10 |
Family
ID=31405682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14100288U Pending JPH0262553U (cs) | 1988-10-31 | 1988-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0262553U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6236666A (ja) * | 1985-08-10 | 1987-02-17 | Fujitsu Ltd | アツシング方法 |
| JPS63271933A (ja) * | 1987-04-28 | 1988-11-09 | Tokyo Electron Ltd | アツシング方法 |
-
1988
- 1988-10-31 JP JP14100288U patent/JPH0262553U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6236666A (ja) * | 1985-08-10 | 1987-02-17 | Fujitsu Ltd | アツシング方法 |
| JPS63271933A (ja) * | 1987-04-28 | 1988-11-09 | Tokyo Electron Ltd | アツシング方法 |
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