JPH0353834U - - Google Patents
Info
- Publication number
- JPH0353834U JPH0353834U JP11554089U JP11554089U JPH0353834U JP H0353834 U JPH0353834 U JP H0353834U JP 11554089 U JP11554089 U JP 11554089U JP 11554089 U JP11554089 U JP 11554089U JP H0353834 U JPH0353834 U JP H0353834U
- Authority
- JP
- Japan
- Prior art keywords
- stage plate
- view
- showing
- heater
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 description 1
Description
第１図はこの考案の一実施例による気相成長装
置を示す概略断面図、第２図はこの考案の他の実
施例を示す概略断面図、第３図は従来の気相装置
を示す概略断面図、第４図はヒータの構造を示す
平面図、第５図は種々のステージ板材質の性質を
示す一覧表である。
１……半導体ウエハ、２……ヒータ板、４……
ガスヘツド、５……排気孔、７……モリブデン製
ステージ板である。なお図中同一符号は同一又は
相当部分を示す。
FIG. 1 is a schematic sectional view showing a vapor phase growth apparatus according to one embodiment of this invention, FIG. 2 is a schematic sectional view showing another embodiment of this invention, and FIG. 3 is a schematic sectional view showing a conventional vapor phase growth apparatus. 4 is a sectional view, FIG. 4 is a plan view showing the structure of the heater, and FIG. 5 is a list showing the properties of various stage plate materials. 1... Semiconductor wafer, 2... Heater plate, 4...
Gas head, 5...exhaust hole, 7...molybdenum stage plate. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
設けた気相成長装置において、 ステージ板をモリブデン製としたことを特徴と
する気相成長装置。[Scope of Claim for Utility Model Registration] A vapor phase growth apparatus in which a stage plate is provided between a heater and a semiconductor wafer, characterized in that the stage plate is made of molybdenum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11554089U JPH0353834U (en) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11554089U JPH0353834U (en) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353834U true JPH0353834U (en) | 1991-05-24 |
Family
ID=31663867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11554089U Pending JPH0353834U (en) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353834U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007305579A (en) * | 2006-05-08 | 2007-11-22 | Wet Automotive Syst Ag | Flat heating body |
-
1989
- 1989-09-29 JP JP11554089U patent/JPH0353834U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007305579A (en) * | 2006-05-08 | 2007-11-22 | Wet Automotive Syst Ag | Flat heating body |