JPH0266961U - - Google Patents

Info

Publication number
JPH0266961U
JPH0266961U JP14608288U JP14608288U JPH0266961U JP H0266961 U JPH0266961 U JP H0266961U JP 14608288 U JP14608288 U JP 14608288U JP 14608288 U JP14608288 U JP 14608288U JP H0266961 U JPH0266961 U JP H0266961U
Authority
JP
Japan
Prior art keywords
tip
semiconductor wafer
tweezers
clamp
comes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14608288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14608288U priority Critical patent/JPH0266961U/ja
Publication of JPH0266961U publication Critical patent/JPH0266961U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)

Description

【図面の簡単な説明】
第１図は本考案の第１の実施例のピンセツトの
斜視図、第２図は第１図のピンセツトの先端部の
断面図、第３図は本考案の第２の実施例のピンセ
ツトの先端部の断面図、第４図、第５図、第６図
はいずれも従来のピンセツトの先端部の斜視図で
ある。 １……本体、２……チツプ、３，４，５……先
端部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 第１の先端部と、この第１の先端部に対向した
    第２の先端部とで、半導体ウエハを挾持するピン
    セツトにおいて、前記半導体ウエハの裏面と接触
    する第１の先端部は金属からなり、前記半導体ウ
    エハの表面と接触する第２の先端部は樹脂からな
    ることを特徴とするピンセツト。
JP14608288U 1988-11-08 1988-11-08 Pending JPH0266961U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14608288U JPH0266961U (ja) 1988-11-08 1988-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14608288U JPH0266961U (ja) 1988-11-08 1988-11-08

Publications (1)

Publication Number Publication Date
JPH0266961U true JPH0266961U (ja) 1990-05-21

Family

ID=31415246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14608288U Pending JPH0266961U (ja) 1988-11-08 1988-11-08

Country Status (1)

Country Link
JP (1) JPH0266961U (ja)

Similar Documents

Publication Publication Date Title
JPH0266961U (ja)
JPH0193704U (ja)
JPS62157086U (ja)
JPS6450428U (ja)
JPS6311061U (ja)
JPS61151865U (ja)
JPS6448001U (ja)
JPS62107485U (ja)
JPS63140698U (ja)
JPH0235443U (ja)
JPH0463742U (ja)
JPH0474014U (ja)
JPS6369822U (ja)
JPH0364492U (ja)
JPS6179012U (ja)
JPS6359336U (ja)
JPH01154871U (ja)
JPS63141194U (ja)
JPH01112053U (ja)
JPS62101413U (ja)
JPS624318U (ja)
JPS63120726U (ja)
JPS63110041U (ja)
JPS6333559U (ja)
JPS6426831U (ja)