JPH0267211U - - Google Patents
Info
- Publication number
- JPH0267211U JPH0267211U JP14619188U JP14619188U JPH0267211U JP H0267211 U JPH0267211 U JP H0267211U JP 14619188 U JP14619188 U JP 14619188U JP 14619188 U JP14619188 U JP 14619188U JP H0267211 U JPH0267211 U JP H0267211U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- parallel plane
- plane plate
- speckle pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003746 surface roughness Effects 0.000 claims description 4
- 230000001427 coherent effect Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010008 shearing Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案表面粗さ測定装置の一実施例を
示す模式図、第２図は同上装置による測定結果を
従来装置と比べて示す線図である。第３図は従来
の表面粗さ測定装置を示す模式図、第４図は同上
装置によるスペツクルコントラストＣと表面粗さ
との定性的関係を示す線図である。
１……発光源、２……コヒーレント光ビーム、
３……逆望遠鏡型光学系、４……照射光ビーム、
５……集光レンズ、６……被測定物、７，７′…
…反射光、８……明暗信号検出器、９……演算処
理器、１０……平行平面板。
FIG. 1 is a schematic diagram showing an embodiment of the surface roughness measuring device of the present invention, and FIG. 2 is a diagram showing measurement results by the same device in comparison with a conventional device. FIG. 3 is a schematic diagram showing a conventional surface roughness measuring device, and FIG. 4 is a diagram showing a qualitative relationship between speckle contrast C and surface roughness using the same device. 1... Light emitting source, 2... Coherent light beam,
3... Inverted telescope type optical system, 4... Irradiation light beam,
5... Condensing lens, 6... Measured object, 7, 7'...
...Reflected light, 8... Bright/dark signal detector, 9... Arithmetic processor, 10... Parallel plane plate.
Claims (1)
から出力されたコヒーレント光を被測定表面に集
光照射し集光レンズの焦点近傍にフラウンホーフ
ア回折像を作る光学系と、上記コヒーレント光に
よつて照射された上記被測定表面からの反射光を
シヤリング干渉させる平行平面板と、同平行平面
板によりシヤリング干渉された反射光に生ずるス
ペツクルパターンの明暗信号を検出する明暗信号
検出器と、同明暗信号検出器の測定値からスペツ
クルパターンのコントラストを算出する演算処理
器とを具えたことを特徴とする表面粗さ測定装置
。 a light emitting source that outputs coherent light; an optical system that collects and irradiates the surface to be measured with the coherent light output from the light source and creates a Fraunhofer diffraction image near the focal point of the condensing lens; a parallel plane plate that causes shearing interference with the reflected light from the surface to be measured, a brightness signal detector that detects brightness and darkness signals of a speckle pattern generated in the reflected light that has been subjected to shearing interference by the parallel plane plate; 1. A surface roughness measuring device comprising: an arithmetic processor that calculates the contrast of a speckle pattern from a measured value of a detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14619188U JPH0267211U (en) | 1988-11-09 | 1988-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14619188U JPH0267211U (en) | 1988-11-09 | 1988-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0267211U true JPH0267211U (en) | 1990-05-22 |
Family
ID=31415451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14619188U Pending JPH0267211U (en) | 1988-11-09 | 1988-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0267211U (en) |
-
1988
- 1988-11-09 JP JP14619188U patent/JPH0267211U/ja active Pending
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