JPH0214005U - - Google Patents
Info
- Publication number
- JPH0214005U JPH0214005U JP9174488U JP9174488U JPH0214005U JP H0214005 U JPH0214005 U JP H0214005U JP 9174488 U JP9174488 U JP 9174488U JP 9174488 U JP9174488 U JP 9174488U JP H0214005 U JPH0214005 U JP H0214005U
- Authority
- JP
- Japan
- Prior art keywords
- optical axis
- measured
- incident
- polarized light
- photodetecting element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 238000009499 grossing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案実施例装置の原理構成図、第２
図は本考案実施例装置で使用するＰ偏光の特性図
、第３図は本考案実施例装置において測定結果か
ら平滑度を導く方法を説明する説明図、第４図は
Ｂｅｋｋ法による測定結果と本考案実施例装置の
測定結果との相関を示す特性図、第５図はＢｅｋ
ｋ法の原理図、第６図は従来装置の原理構成図あ
る。
７：光源、８：コリメートレンズ、９：偏光子
、１０：集光レンズ、１１：光検出素子、Ｓ：シ
ート状被測定体、Ｈ：検出ヘツド、Ａ１：入射光
軸、Ａ２：反射光軸、Ｒ１：正反射成分、Ｒ２：
拡散反射成分。
Fig. 1 is a diagram of the principle configuration of the device according to the present invention;
The figure is a characteristic diagram of P-polarized light used in the device according to the embodiment of the present invention, Fig. 3 is an explanatory diagram illustrating the method of deriving smoothness from the measurement results in the device according to the embodiment of the present invention, and Fig. 4 is a diagram showing the measurement results by the Bekk method. A characteristic diagram showing the correlation with the measurement results of the device according to the present invention, FIG.
FIG. 6, which is a diagram of the principle of the k-method, is a diagram of the principle configuration of a conventional device. 7: Light source, 8: Collimating lens, 9: Polarizer, 10: Condensing lens, 11: Photodetection element, S: Sheet-shaped object to be measured, H: Detection head, A 1 : Incident optical axis, A 2 : Reflection Optical axis, R 1 : Regular reflection component, R 2 :
Diffuse reflection component.
Claims (1)
測定体にＰ偏光を入射させる手段と、前記Ｐ偏光
の入射光軸並びに法線を含む面内を通る反射光軸
上に設けられた集光レンズと、この集光レンズの
焦点位置に測定面が前記反射光軸と垂直になるよ
うに配置された光検出素子とを具備し、前記光検
出素子により前記被測定表面で反射された正反射
成分と前記被測定体内部で反射された拡散反射成
分とを受光し、測定面に形成されたピークを持つ
たコーン状の光の広がりから前記被測定体の平滑
度を求めるようにした非接触式平滑度計。 means for making P-polarized light incident on a sheet-like measured object at an incident angle deviated from the Brieuster angle; and a condenser lens provided on a reflection optical axis passing within a plane that includes the incident optical axis and normal line of the P-polarized light. , and a photodetecting element disposed at the focal position of the condensing lens so that the measurement surface is perpendicular to the reflection optical axis, and the specular reflection component reflected by the surface to be measured by the photodetecting element and The non-contact smoothing method receives the diffuse reflection component reflected inside the object to be measured, and calculates the smoothness of the object from the spread of cone-shaped light with a peak formed on the measurement surface. meter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9174488U JPH0214005U (en) | 1988-07-11 | 1988-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9174488U JPH0214005U (en) | 1988-07-11 | 1988-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214005U true JPH0214005U (en) | 1990-01-29 |
Family
ID=31316210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9174488U Pending JPH0214005U (en) | 1988-07-11 | 1988-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214005U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4823312U (en) * | 1971-07-26 | 1973-03-16 |
-
1988
- 1988-07-11 JP JP9174488U patent/JPH0214005U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4823312U (en) * | 1971-07-26 | 1973-03-16 |
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