JPH0268436U - - Google Patents
Info
- Publication number
- JPH0268436U JPH0268436U JP14916888U JP14916888U JPH0268436U JP H0268436 U JPH0268436 U JP H0268436U JP 14916888 U JP14916888 U JP 14916888U JP 14916888 U JP14916888 U JP 14916888U JP H0268436 U JPH0268436 U JP H0268436U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- glass plate
- transport mechanism
- supplies
- supplying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 230000007723 transport mechanism Effects 0.000 claims 3
- 238000002788 crimping Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Description
第１図Ａ，Ｂは本考案の第１の実施例を示す図
で、同図Ａは平面図、同図Ｂは正面図、第２図は
本考案の第２の実施例を示す図で、同図Ａは平面
図、同図Ｂは正面図である。
１……ベース盤、２……ガラス板ロードカセツ
ト、３……半導体基板ロードカセツト、４……ガ
ラス板アンロードカセツト、５……冷却ステージ
、６……ガラス板搬送ロボツト、６ａ……搬送ロ
ボツト、７……真空チヤンバ、８……ガラス板加
熱ステージ、９……圧着機構、１０……スタンプ
ヘツド、１１……反転アーム、１２……ガラス板
、１３……半導体基板、１４，１５……フラツパ
バルブ、１６……反転機構、１７……半導体基板
センタリングステージ、１８……移送機構、１９
……反転機構付吸着ヘツド。
Figures 1A and 1B are views showing a first embodiment of the present invention; Figure A is a plan view, Figure B is a front view, and Figure 2 is a diagram showing a second embodiment of the invention. , Figure A is a plan view, and Figure B is a front view. 1...Base board, 2...Glass plate loading cassette, 3...Semiconductor substrate loading cassette, 4...Glass plate unloading cassette, 5...Cooling stage, 6...Glass plate transport robot, 6a...Transfer robot , 7... Vacuum chamber, 8... Glass plate heating stage, 9... Pressing mechanism, 10... Stamp head, 11... Reversing arm, 12... Glass plate, 13... Semiconductor substrate, 14, 15... Flutter valve, 16... Reversing mechanism, 17... Semiconductor substrate centering stage, 18... Transfer mechanism, 19
...Suction head with reversing mechanism.
Claims (1)
付けるガラス板とを真空チヤンバ内に設けられた
加熱ステージにそれぞれ供給する搬送機構と、前
記加熱ステージ上に載置された前記ガラス板に前
記半導体基板を押圧して貼り付ける圧着機構と、
前記半導体基板を貼り付けた前記ガラス板を冷却
ステージを経て収納ステージへ収納する搬送機構
と、前記半導体基板の供給の際半導体基板の研磨
面を吸着保持し反転させて貼付け面を前記ガラス
板面に向けて供給する反転機構とを備えたことを
特徴とする自動ガラス板貼付装置。 A transport mechanism that supplies a semiconductor substrate to be polished and a glass plate to which the semiconductor substrate is attached to a heating stage provided in a vacuum chamber, and a transport mechanism that supplies the semiconductor substrate to the glass plate placed on the heating stage. A crimping mechanism that presses and pastes,
a transport mechanism that stores the glass plate to which the semiconductor substrate is pasted to a storage stage via a cooling stage; and when supplying the semiconductor substrate, sucks and holds the polished surface of the semiconductor substrate and inverts the semiconductor substrate to transfer the pasted surface to the glass plate surface. An automatic glass plate pasting device characterized by being equipped with a reversing mechanism for supplying glass sheets toward the target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14916888U JPH0268436U (en) | 1988-11-15 | 1988-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14916888U JPH0268436U (en) | 1988-11-15 | 1988-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0268436U true JPH0268436U (en) | 1990-05-24 |
Family
ID=31421153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14916888U Pending JPH0268436U (en) | 1988-11-15 | 1988-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0268436U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0496843U (en) * | 1991-01-30 | 1992-08-21 |
-
1988
- 1988-11-15 JP JP14916888U patent/JPH0268436U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0496843U (en) * | 1991-01-30 | 1992-08-21 |
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