JPH0270430U - - Google Patents
Info
- Publication number
- JPH0270430U JPH0270430U JP14946588U JP14946588U JPH0270430U JP H0270430 U JPH0270430 U JP H0270430U JP 14946588 U JP14946588 U JP 14946588U JP 14946588 U JP14946588 U JP 14946588U JP H0270430 U JPH0270430 U JP H0270430U
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- utility
- scope
- polysilicon layer
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 238000002513 implantation Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Description
第１図ないし第６図はｂｉ―ＣＭＯＳを製造す
る工程を示す断端面図である。
８……ＣＭＯＳ形成領域、１１……ｂｉ―ｐｏ
ｌａｒトランジスタ形成領域、１７……ｐｏｌｙ
―Ｓｉ層、１８……フオトレジスト層、２５，２
６，２７……増速酸化膜。
1 to 6 are cross-sectional views showing the steps of manufacturing bi-CMOS. 8...CMOS formation area, 11...bi-po
lar transistor formation region, 17...poly
-Si layer, 18...Photoresist layer, 25,2
6, 27...speed-enhancing oxide film.
Claims (1)
化膜からなる不純物注入用マスク。 An impurity implantation mask consisting of an accelerated oxide film selectively formed on a polysilicon layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14946588U JPH0270430U (en) | 1988-11-16 | 1988-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14946588U JPH0270430U (en) | 1988-11-16 | 1988-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0270430U true JPH0270430U (en) | 1990-05-29 |
Family
ID=31421716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14946588U Pending JPH0270430U (en) | 1988-11-16 | 1988-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0270430U (en) |
-
1988
- 1988-11-16 JP JP14946588U patent/JPH0270430U/ja active Pending