JPH0270954U - - Google Patents
Info
- Publication number
- JPH0270954U JPH0270954U JP15100488U JP15100488U JPH0270954U JP H0270954 U JPH0270954 U JP H0270954U JP 15100488 U JP15100488 U JP 15100488U JP 15100488 U JP15100488 U JP 15100488U JP H0270954 U JPH0270954 U JP H0270954U
- Authority
- JP
- Japan
- Prior art keywords
- angle
- transfer arm
- arm
- rotates
- cam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Machine Tool Positioning Apparatuses (AREA)
- Automatic Assembly (AREA)
Description
第１図は、本考案による位置出し機構をもつ搬
送アームの実施例を示す斜視図である。第２図は
、本考案による前記位置出し機構をもつ搬送アー
ムが使用される半導体ウエーハの１８０°移送装
置の平面配置図である。
１……回転搬送アーム、２ａ，２ｂ……半導体
ウエーハ吸引溝、３ａ，３ｂ……カム従動ローラ
、５……エアシリンダ、７……溝カム筒、９……
偏心カム、１０……パルスモータ、１１……アー
ム駆動軸、１３……シリンダ軸、１４……カム軸
、１５……カムピン。
FIG. 1 is a perspective view showing an embodiment of a transport arm having a positioning mechanism according to the present invention. FIG. 2 is a plan layout diagram of a 180° semiconductor wafer transfer apparatus using a transfer arm having the positioning mechanism according to the present invention. DESCRIPTION OF SYMBOLS 1... Rotating transfer arm, 2a, 2b... Semiconductor wafer suction groove, 3a, 3b... Cam driven roller, 5... Air cylinder, 7... Groove cam tube, 9...
Eccentric cam, 10...Pulse motor, 11...Arm drive shaft, 13...Cylinder shaft, 14...Cam shaft, 15...Cam pin.
Claims (1)
度回転搬送する搬送アームにおいて、部品等の保
持部とカム従動部が設けられている回転搬送アー
ムと、前記回転搬送アームを一定の角度よりもわ
ずかに大きく回転駆動するモータと、前記わずか
に大きな角度駆動された前記搬送アームを所定の
位置まで押し戻して退避する偏心カムから構成し
たことを特徴とする位置出し機構をもつ搬送アー
ム。 In a transfer arm that rotates and transfers a part whose one side is flat from an initial position at a certain angle, the rotary transfer arm is provided with a holding part for parts, etc. and a cam driven part, and the rotary transfer arm is rotated at a angle slightly less than a certain angle. 1. A transport arm having a positioning mechanism, comprising: a motor that rotates at a large angle; and an eccentric cam that pushes the transport arm, which has been driven at a slightly large angle, back to a predetermined position and retreats.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15100488U JPH0533247Y2 (en) | 1988-11-18 | 1988-11-18 | |
| US07/421,351 US5052884A (en) | 1988-10-25 | 1989-10-13 | Transferring device for semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15100488U JPH0533247Y2 (en) | 1988-11-18 | 1988-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0270954U true JPH0270954U (en) | 1990-05-30 |
| JPH0533247Y2 JPH0533247Y2 (en) | 1993-08-24 |
Family
ID=31424660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15100488U Expired - Lifetime JPH0533247Y2 (en) | 1988-10-25 | 1988-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533247Y2 (en) |
-
1988
- 1988-11-18 JP JP15100488U patent/JPH0533247Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0533247Y2 (en) | 1993-08-24 |