JPH02730U - - Google Patents
Info
- Publication number
- JPH02730U JPH02730U JP1988078951U JP7895188U JPH02730U JP H02730 U JPH02730 U JP H02730U JP 1988078951 U JP1988078951 U JP 1988078951U JP 7895188 U JP7895188 U JP 7895188U JP H02730 U JPH02730 U JP H02730U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- wafer
- tweezers
- pipe
- wafer tweezers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988078951U JPH02730U (cs) | 1988-06-14 | 1988-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988078951U JPH02730U (cs) | 1988-06-14 | 1988-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02730U true JPH02730U (cs) | 1990-01-05 |
Family
ID=31303839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988078951U Pending JPH02730U (cs) | 1988-06-14 | 1988-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02730U (cs) |
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1988
- 1988-06-14 JP JP1988078951U patent/JPH02730U/ja active Pending