JPH02730U - - Google Patents
Info
- Publication number
- JPH02730U JPH02730U JP7895188U JP7895188U JPH02730U JP H02730 U JPH02730 U JP H02730U JP 7895188 U JP7895188 U JP 7895188U JP 7895188 U JP7895188 U JP 7895188U JP H02730 U JPH02730 U JP H02730U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- wafer
- tweezers
- pipe
- wafer tweezers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
Description
第１図及び第２図は本考案の一実施例の側面図
及び上面図、第３図は吸着部が半導体ウエハーを
吸着したところの図、第４図はウエハーピンセツ
トが半導体ウエハーをはさんだところの図、第５
図及び第６図は従来技術のウエハーピンセツトの
上面図及び側面図である。
１……本考案のウエハーピンセツト本体、２…
…吸着部、３……真空ポンプ、４……可動型パイ
プ接続部、５……真空ポンプのスイツチ、６……
真空ポンプへの配線、７……パイプ、８……半導
体ウエハー、９……プローバーのステージ、１０
……従来タイプのウエハーピンセツト、１１……
フオーク状の上部、１２……下部、１３……にぎ
り部分、１４……クランク状に折り曲げられた部
分。
Figures 1 and 2 are a side view and a top view of an embodiment of the present invention, Figure 3 is a diagram showing the semiconductor wafer being sucked by the suction unit, and Figure 4 is a diagram showing the semiconductor wafer being held between the wafer tweezers. Tokoro no Diagram, No. 5
6 and 6 are top and side views of a prior art wafer tweezers. 1... Wafer tweezers main body of the present invention, 2...
...Suction part, 3... Vacuum pump, 4... Movable pipe connection part, 5... Vacuum pump switch, 6...
Wiring to vacuum pump, 7...Pipe, 8...Semiconductor wafer, 9...Prober stage, 10
...Conventional type wafer tweezers, 11...
Fork-shaped upper part, 12... lower part, 13... nigiri part, 14... part bent into a crank shape.
Claims (1)
真空ポンプ及びそれらを接続するパイプを有する
ウエハーピンセツト。 A wafer tweezers that has a suction tool that can change the angle at its tip, a vacuum pump, and a pipe that connects them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7895188U JPH02730U (en) | 1988-06-14 | 1988-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7895188U JPH02730U (en) | 1988-06-14 | 1988-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02730U true JPH02730U (en) | 1990-01-05 |
Family
ID=31303839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7895188U Pending JPH02730U (en) | 1988-06-14 | 1988-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02730U (en) |
-
1988
- 1988-06-14 JP JP7895188U patent/JPH02730U/ja active Pending