JPH0276834U - - Google Patents
Info
- Publication number
- JPH0276834U JPH0276834U JP15636088U JP15636088U JPH0276834U JP H0276834 U JPH0276834 U JP H0276834U JP 15636088 U JP15636088 U JP 15636088U JP 15636088 U JP15636088 U JP 15636088U JP H0276834 U JPH0276834 U JP H0276834U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- tube
- wheels
- extending outward
- part extending
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案の１実施例の構成を示す構成図
、第２図は第１図に示す拡散炉用ボートをチユー
ブの中に挿入する前の状態を示す説明図、第３図
は第１図に示す拡散炉用ボートをチユーブの中に
挿入した状態を示す説明図である。
１０……ボート部、１２……外枠、２２，２４
……短辺、３２，４２……支持棒、３４……保持
棒、３６，３８……車輪、４０……第１支持部、
４４……係止棒、４６……第２支持部、４８……
アーム、５２……チユーブ。
FIG. 1 is a configuration diagram showing the configuration of one embodiment of the present invention, FIG. 2 is an explanatory diagram showing the state before the diffusion furnace boat shown in FIG. 1 is inserted into the tube, and FIG. FIG. 2 is an explanatory diagram showing a state in which the diffusion furnace boat shown in FIG. 1 is inserted into a tube. 10...Boat part, 12...Outer frame, 22, 24
... Short side, 32, 42 ... Support rod, 34 ... Holding rod, 36, 38 ... Wheel, 40 ... First support part,
44... Locking rod, 46... Second support part, 48...
Arm, 52...Tube.
Claims (1)
一端から外側に延長されて他端に一対の車輪を持
つ第１支持部と、前記ボート部の長手方向に移動
するボートローダの一端に前記ボート部の他端か
ら外側に延長されて固定された第２支持部とを有
し、前記車輪によりチユーブの内壁に接して前記
チユーブに出し入れすることのできる拡散炉用ボ
ート。 a boat part for fixing the wafer; a first support part extending outward from one end of the boat part and having a pair of wheels at the other end; A boat for a diffusion furnace, the boat having a second supporting part extending outward from the other end and being fixed thereto, and capable of being moved in and out of the tube by the wheels in contact with the inner wall of the tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15636088U JPH0276834U (en) | 1988-11-30 | 1988-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15636088U JPH0276834U (en) | 1988-11-30 | 1988-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0276834U true JPH0276834U (en) | 1990-06-13 |
Family
ID=31434830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15636088U Pending JPH0276834U (en) | 1988-11-30 | 1988-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0276834U (en) |
-
1988
- 1988-11-30 JP JP15636088U patent/JPH0276834U/ja active Pending