JPH0468520U - - Google Patents
Info
- Publication number
- JPH0468520U JPH0468520U JP11152990U JP11152990U JPH0468520U JP H0468520 U JPH0468520 U JP H0468520U JP 11152990 U JP11152990 U JP 11152990U JP 11152990 U JP11152990 U JP 11152990U JP H0468520 U JPH0468520 U JP H0468520U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- groove rods
- quartz
- wafers
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000010453 quartz Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 238000003466 welding Methods 0.000 claims 1
Description
第１図は本考案の一実施例の斜視図、第２図は
従来のボートの斜視図である。
１Ａ〜１Ｃ，１１Ａ〜１１Ｃ……溝棒、２Ａ，
２Ｂ……連結棒、３Ａ，３Ｂ……支持棒、４……
溝、５……太い部分、６……溶接部、１０，１０
Ａ……ボート。
FIG. 1 is a perspective view of an embodiment of the present invention, and FIG. 2 is a perspective view of a conventional boat. 1A~1C, 11A~11C...groove bar, 2A,
2B...Connection rod, 3A, 3B...Support rod, 4...
Groove, 5... Thick part, 6... Welded part, 10, 10
A...Boat.
Claims (1)
た少くとも一対の石英製溝棒と、この溝棒の端部
に溶接された石英製連結棒とを有する半導体ウエ
ーハ用ボートにおいて、前記溝棒は溶接部から離
れるに従つて太く形成されていることを特徴とす
る半導体ウエーハ用ボート。 A semiconductor wafer boat comprising at least a pair of quartz groove rods provided with a plurality of grooves for holding wafers, and a quartz connecting rod welded to the ends of the groove rods, the groove rods comprising: A boat for semiconductor wafers, characterized in that the boat becomes thicker as it gets farther away from a welding part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11152990U JPH0468520U (en) | 1990-10-24 | 1990-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11152990U JPH0468520U (en) | 1990-10-24 | 1990-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0468520U true JPH0468520U (en) | 1992-06-17 |
Family
ID=31858993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11152990U Pending JPH0468520U (en) | 1990-10-24 | 1990-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0468520U (en) |
-
1990
- 1990-10-24 JP JP11152990U patent/JPH0468520U/ja active Pending