JPH028138U - - Google Patents
Info
- Publication number
- JPH028138U JPH028138U JP8726088U JP8726088U JPH028138U JP H028138 U JPH028138 U JP H028138U JP 8726088 U JP8726088 U JP 8726088U JP 8726088 U JP8726088 U JP 8726088U JP H028138 U JPH028138 U JP H028138U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- heater section
- wafer
- radiation
- lines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Resistance Heating (AREA)
Description
第１図ａは、本考案にかかるウエハ加熱ヒータ
の側面図、第１図ｂは本考案にかかるウエハ加熱
ヒータの平面図、第２図ａは、従来のウエハ加熱
ヒータの側面図、第２図ｂは従来のウエハ加熱ヒ
ータの平面図、第３図は本考案にもとずく２系列
ヒータの受光量分布曲線の説明図、第４図は２系
列ヒータのモデルの説明図である。
１……内ヒータ部分、２……外ヒータ部分、３
……ヒータ固定円板、４……ウエハ。
FIG. 1a is a side view of a wafer heater according to the present invention, FIG. 1b is a plan view of a wafer heater according to the present invention, and FIG. 2a is a side view of a conventional wafer heater. Fig. b is a plan view of a conventional wafer heater, Fig. 3 is an explanatory diagram of a received light amount distribution curve of a two-series heater based on the present invention, and Fig. 4 is an explanatory diagram of a model of the two-series heater. 1...Inner heater part, 2...Outer heater part, 3
...Heater fixing disk, 4...Wafer.
Claims (1)
備されたウエハ加熱ヒータにおいて、幅射を行な
うヒータ部分を２系列に分け、内ヒータ部分と外
ヒータ部分の構成としたことを特徴とするウエハ
加熱ヒータ。 A wafer heater installed in a semiconductor manufacturing equipment having a wafer heating function, characterized in that a heater section that performs radiation radiation is divided into two lines, and is configured as an inner heater section and an outer heater section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8726088U JPH028138U (en) | 1988-06-29 | 1988-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8726088U JPH028138U (en) | 1988-06-29 | 1988-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH028138U true JPH028138U (en) | 1990-01-19 |
Family
ID=31311878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8726088U Pending JPH028138U (en) | 1988-06-29 | 1988-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH028138U (en) |
-
1988
- 1988-06-29 JP JP8726088U patent/JPH028138U/ja active Pending