JPH0282028U - - Google Patents
Info
- Publication number
- JPH0282028U JPH0282028U JP1988162530U JP16253088U JPH0282028U JP H0282028 U JPH0282028 U JP H0282028U JP 1988162530 U JP1988162530 U JP 1988162530U JP 16253088 U JP16253088 U JP 16253088U JP H0282028 U JPH0282028 U JP H0282028U
- Authority
- JP
- Japan
- Prior art keywords
- base
- storage portion
- induction heating
- frequency induction
- heating type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案の一実施例を示す保持台の断面
図、第２図は他の実施例を示す保持台の断面図、
第３図はさらに別の実施例を示す保持台の断面図
、第４図は従来の気相成長装置の一例を示す断面
図である。
１０……保持台、１１……基台、１２，１２Ａ
……貯留部、１３……介在金属、Ｐ……基板。
FIG. 1 is a cross-sectional view of a holding stand showing one embodiment of the present invention, FIG. 2 is a cross-sectional view of a holding stand showing another embodiment,
FIG. 3 is a sectional view of a holding table showing yet another embodiment, and FIG. 4 is a sectional view showing an example of a conventional vapor phase growth apparatus. 10... Holding stand, 11... Base, 12, 12A
...Reservoir, 13...Intervening metal, P...Substrate.
Claims (1)
保持台を備えた気相成長装置において、前記高周
波誘導加熱式保持台は、基台と、該基台の上面に
基板により大径で、かつ適宜深さに形成された凹
部状の貯留部と、該貯留部に貯留される前記基板
より高比重で、かつ気相成長温度で液体となる介
在金属とで構成することを特徴とする気相成長装
置。 In a vapor phase growth apparatus equipped with a high-frequency induction heating type holder that serves both to hold and heat the substrate, the high-frequency induction heating type holder includes a base, and a large diameter plate on the upper surface of the base, and as appropriate. Vapor phase growth characterized by comprising a concave-shaped storage portion formed at a depth, and an intervening metal that has a higher specific gravity than the substrate stored in the storage portion and becomes liquid at the vapor growth temperature. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988162530U JPH0282028U (en) | 1988-12-14 | 1988-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988162530U JPH0282028U (en) | 1988-12-14 | 1988-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282028U true JPH0282028U (en) | 1990-06-25 |
Family
ID=31446439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988162530U Pending JPH0282028U (en) | 1988-12-14 | 1988-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282028U (en) |
-
1988
- 1988-12-14 JP JP1988162530U patent/JPH0282028U/ja active Pending
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