JPH0282029U - - Google Patents
Info
- Publication number
- JPH0282029U JPH0282029U JP1988162531U JP16253188U JPH0282029U JP H0282029 U JPH0282029 U JP H0282029U JP 1988162531 U JP1988162531 U JP 1988162531U JP 16253188 U JP16253188 U JP 16253188U JP H0282029 U JPH0282029 U JP H0282029U
- Authority
- JP
- Japan
- Prior art keywords
- rotating
- rotating disk
- storage table
- passive portion
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案の一実施例を示す水平回転式保
持台の断面図、第２図は他の実施例を示す水平回
転式保持台の断面図、第３図は従来の水平回転式
保持台を備えた気相成長装置の一例を示す断面図
である。
３０……水平回転式保持台、３１……回転円板
、３２……収納台、３３……介在金属、Ｐ……基
板。
Fig. 1 is a sectional view of a horizontal rotary holder showing one embodiment of the present invention, Fig. 2 is a sectional view of a horizontal rotating holder showing another embodiment, and Fig. 3 is a conventional horizontal rotary holder. FIG. 2 is a cross-sectional view showing an example of a vapor phase growth apparatus equipped with a stand. 30...Horizontal rotary holding stand, 31...Rotating disk, 32...Storage stand, 33...Intervening metal, P...Substrate.
Claims (1)
回転円板と、該回転円板を収納する収納台と、該
回転円板の回転受動部に回転力を伝達する手段と
を設けてなる水平回転式保持台を備えた気相成長
装置において、前記回転円板と収納台との間に気
相成長温度で低蒸気圧の液体となる介在金属を充
填したことを特徴とする気相成長装置。 A rotating disk having a substrate mounting portion on the top surface and a rotating passive portion on the bottom surface, a storage table for storing the rotating disk, and means for transmitting rotational force to the rotating passive portion of the rotating disk. A vapor phase growth apparatus equipped with a horizontal rotating holding table, characterized in that an intervening metal that becomes a liquid with a low vapor pressure at a vapor growth temperature is filled between the rotating disk and the storage table. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988162531U JPH0282029U (en) | 1988-12-14 | 1988-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988162531U JPH0282029U (en) | 1988-12-14 | 1988-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282029U true JPH0282029U (en) | 1990-06-25 |
Family
ID=31446441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988162531U Pending JPH0282029U (en) | 1988-12-14 | 1988-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282029U (en) |
-
1988
- 1988-12-14 JP JP1988162531U patent/JPH0282029U/ja active Pending
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