JPH0286152U - - Google Patents

Info

Publication number
JPH0286152U
JPH0286152U JP16553788U JP16553788U JPH0286152U JP H0286152 U JPH0286152 U JP H0286152U JP 16553788 U JP16553788 U JP 16553788U JP 16553788 U JP16553788 U JP 16553788U JP H0286152 U JPH0286152 U JP H0286152U
Authority
JP
Japan
Prior art keywords
pressure sensor
diaphragm
semiconductor substrate
semiconductor
semiconductor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16553788U
Other languages
English (en)
Other versions
JPH073647Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16553788U priority Critical patent/JPH073647Y2/ja
Publication of JPH0286152U publication Critical patent/JPH0286152U/ja
Application granted granted Critical
Publication of JPH073647Y2 publication Critical patent/JPH073647Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す平面図、第２
図及び第３図は夫々同ダイヤフラムの長さ方向及
び幅方向の縦断側面図であり、第４図は従来例を
示す第１図相当図である。 図面中、１１は半導体基板、１２はダイヤフラ
ム、１３は溝部、１５は抵抗部を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 面方位を１１０面とする矩形状の半導体基板に
    長尺状をなす薄肉のダイヤフラムが形成されてな
    る半導体圧力センサにおいて、前記ダイヤフラム
    は前記半導体基板に対してその幅方向が軸方位＜
    １１１＞方向に沿い且つ長さ方向が対角線上に沿
    つて配置されていることを特徴とする半導体圧力
    センサ。
JP16553788U 1988-12-21 1988-12-21 半導体圧力センサ Expired - Lifetime JPH073647Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16553788U JPH073647Y2 (ja) 1988-12-21 1988-12-21 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16553788U JPH073647Y2 (ja) 1988-12-21 1988-12-21 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPH0286152U true JPH0286152U (ja) 1990-07-09
JPH073647Y2 JPH073647Y2 (ja) 1995-01-30

Family

ID=31452113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16553788U Expired - Lifetime JPH073647Y2 (ja) 1988-12-21 1988-12-21 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPH073647Y2 (ja)

Also Published As

Publication number Publication date
JPH073647Y2 (ja) 1995-01-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term