JPH0289831U - - Google Patents

Info

Publication number
JPH0289831U
JPH0289831U JP17040588U JP17040588U JPH0289831U JP H0289831 U JPH0289831 U JP H0289831U JP 17040588 U JP17040588 U JP 17040588U JP 17040588 U JP17040588 U JP 17040588U JP H0289831 U JPH0289831 U JP H0289831U
Authority
JP
Japan
Prior art keywords
chamber
substrate
heating chamber
cart
bypass passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17040588U
Other languages
English (en)
Other versions
JPH0610680Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17040588U priority Critical patent/JPH0610680Y2/ja
Publication of JPH0289831U publication Critical patent/JPH0289831U/ja
Application granted granted Critical
Publication of JPH0610680Y2 publication Critical patent/JPH0610680Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例による搬送機構を備
えたインライン式成膜装置の構成図、第２図、第
３図及び第４図は本実施例装置における基板の着
脱の状態を説明するための図、第５図は従来装置
を示す図である。 １……加熱室、２……成膜室、３……冷却室、
４……バイパス通路、１０……基板、１１……基
板カート、１４，２４……駆動モータ、５……搬
送ローラ、６……ギヤ機構、３１……搬送用シリ
ンダ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 加熱室と、成膜室と、冷却室とを有し、基板カ
    ートに装着された基板を前記各室を通すことによ
    り、この基板上に連続的に成膜を行う多室型のイ
    ンライン式成膜装置の搬送機構において、前記加
    熱室と冷却室との間に設けられたバイパス通路と
    、前記バイパス通路を通じて前記冷却室から加熱
    室へ基板カートを移動させるための基板カート搬
    送手段とを備えたインライン式成膜装置の搬送機
    構。
JP17040588U 1988-12-28 1988-12-28 インライン式成膜装置の搬送機構 Expired - Lifetime JPH0610680Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17040588U JPH0610680Y2 (ja) 1988-12-28 1988-12-28 インライン式成膜装置の搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17040588U JPH0610680Y2 (ja) 1988-12-28 1988-12-28 インライン式成膜装置の搬送機構

Publications (2)

Publication Number Publication Date
JPH0289831U true JPH0289831U (ja) 1990-07-17
JPH0610680Y2 JPH0610680Y2 (ja) 1994-03-16

Family

ID=31461317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17040588U Expired - Lifetime JPH0610680Y2 (ja) 1988-12-28 1988-12-28 インライン式成膜装置の搬送機構

Country Status (1)

Country Link
JP (1) JPH0610680Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010196116A (ja) * 2009-02-25 2010-09-09 Shimadzu Corp インライン成膜処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010196116A (ja) * 2009-02-25 2010-09-09 Shimadzu Corp インライン成膜処理装置

Also Published As

Publication number Publication date
JPH0610680Y2 (ja) 1994-03-16

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