JPH03100351U - - Google Patents
Info
- Publication number
- JPH03100351U JPH03100351U JP767890U JP767890U JPH03100351U JP H03100351 U JPH03100351 U JP H03100351U JP 767890 U JP767890 U JP 767890U JP 767890 U JP767890 U JP 767890U JP H03100351 U JPH03100351 U JP H03100351U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- rotating shaft
- gear
- vacuum chamber
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005284 excitation Effects 0.000 claims 1
- 238000012800 visualization Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図〜第４図は本考案の一実施例を説明する
もので、第１図は試料移動機構の詳細を示す斜視
図、第２図はエキソ電子顕微鏡の試料室内を示す
平面図、第３図はその−線断面図、第４図は
その−線断面図、第５図は従来から知られて
いるエキソ電子顕微鏡の概略構成図である。
１０……走査型電子顕微鏡、１０ａ……電子銃
、１０ｂ……集束レンズ、１０ｃ……偏向コイル
、１０ｄ……対物レンズ、１１……反射鏡、１２
……電子検出器、１３……紫外光照射装置、１４
……ＣＲＴ、１５……走査信号発生回路、１６…
…増幅器、１７……イメージインテンシフアイヤ
、２１……ケース、２１ａ……真空室、２２……
モータ、２２ａ……出力軸、２６……第１のヘリ
カルギア、２７……案内レール、２８……スライ
ダ、３０……軸、３１……第２のヘリカルギア、
３２……絶縁継手、３３……試料保持台、３４…
…プレート、３７……ねじロツド、３８……操作
具、４３……圧子、４５……錘り、５２……傷。
Figures 1 to 4 explain one embodiment of the present invention, in which Figure 1 is a perspective view showing details of the sample moving mechanism, Figure 2 is a plan view showing the inside of the sample chamber of the exo electron microscope, FIG. 3 is a sectional view taken along the - line, FIG. 4 is a sectional view taken along the - line, and FIG. 5 is a schematic configuration diagram of a conventionally known exo electron microscope. 10...Scanning electron microscope, 10a...Electron gun, 10b...Focusing lens, 10c...Deflection coil, 10d...Objective lens, 11...Reflector, 12
...electronic detector, 13...ultraviolet light irradiation device, 14
...CRT, 15...Scanning signal generation circuit, 16...
...Amplifier, 17...Image intensifier, 21...Case, 21a...Vacuum chamber, 22...
Motor, 22a... Output shaft, 26... First helical gear, 27... Guide rail, 28... Slider, 30... Shaft, 31... Second helical gear,
32... Insulating joint, 33... Sample holding stand, 34...
... Plate, 37 ... Screw rod, 38 ... Operation tool, 43 ... Indenter, 45 ... Weight, 52 ... Scratch.
Claims (1)
起用の光を照射する光源と、この光の照射によつ
て試料面から励起されたエキソ電子に基づいて試
料表面を可視化する可視化手段とを備えたエキソ
電子顕微鏡において、前記真空室外方から回転さ
れる回転軸上を摺動する第１のギアと、前記真空
室内で前記試料を水平に保持し水平面内で回転可
能にかつ前記回転軸方向に水平移動可能な試料保
持台と、この試料保持台に連結され垂直方向に延
在する回転軸と、前記第１のギアと噛合して前記
回転軸とともに回転する第２のギアと、前記試料
保持台に保持されている試料表面を押圧しモータ
による試料回転により試料表面に傷をつける圧子
と、前記試料保持台を前記回転軸に沿つて水平方
向に移動させる直線移動機構とを具備することを
特徴とするエキソ電子顕微鏡。 It is equipped with a light source that irradiates the surface of a sample installed in a vacuum chamber with light for excitation of exoelectrons, and a visualization means that visualizes the surface of the sample based on the exoelectrons excited from the sample surface by the irradiation with this light. In an exo electron microscope, a first gear slides on a rotating shaft rotated from outside the vacuum chamber, and a first gear that holds the sample horizontally in the vacuum chamber and is rotatable in a horizontal plane and in the direction of the rotating shaft. a horizontally movable sample holder; a rotating shaft connected to the sample holder and extending in the vertical direction; a second gear that meshes with the first gear and rotates together with the rotating shaft; and the sample holder. The present invention includes an indenter that presses the surface of the sample held on the table and scratches the sample surface by rotation of the sample by a motor, and a linear movement mechanism that moves the sample holding table horizontally along the rotation axis. Features of the exo electron microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990007678U JP2529173Y2 (en) | 1990-01-30 | 1990-01-30 | Exo electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990007678U JP2529173Y2 (en) | 1990-01-30 | 1990-01-30 | Exo electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03100351U true JPH03100351U (en) | 1991-10-21 |
| JP2529173Y2 JP2529173Y2 (en) | 1997-03-19 |
Family
ID=31511333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990007678U Expired - Lifetime JP2529173Y2 (en) | 1990-01-30 | 1990-01-30 | Exo electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2529173Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55159143A (en) * | 1979-05-31 | 1980-12-11 | Agency Of Ind Science & Technol | Metal surface flaw detector |
| JPS60105056U (en) * | 1983-12-22 | 1985-07-17 | 日本電子株式会社 | Sample equipment for scanning electron microscopes, etc. |
-
1990
- 1990-01-30 JP JP1990007678U patent/JP2529173Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55159143A (en) * | 1979-05-31 | 1980-12-11 | Agency Of Ind Science & Technol | Metal surface flaw detector |
| JPS60105056U (en) * | 1983-12-22 | 1985-07-17 | 日本電子株式会社 | Sample equipment for scanning electron microscopes, etc. |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2529173Y2 (en) | 1997-03-19 |
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