JPH0340748U - - Google Patents
Info
- Publication number
- JPH0340748U JPH0340748U JP10248289U JP10248289U JPH0340748U JP H0340748 U JPH0340748 U JP H0340748U JP 10248289 U JP10248289 U JP 10248289U JP 10248289 U JP10248289 U JP 10248289U JP H0340748 U JPH0340748 U JP H0340748U
- Authority
- JP
- Japan
- Prior art keywords
- skimmer
- high frequency
- mass spectrometer
- frequency induction
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006698 induction Effects 0.000 claims description 4
- 238000009616 inductively coupled plasma Methods 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案実施例の要部構成断面図、第２
図は高周波誘導結合プラズマ質量分析計の全体的
な構成説明図、第３図は従来例の要部構成断面図
である。
１……プラズマトーチ、２……流量制御部、３
……アルゴンガス供給源、４……試料セル、６…
…高周波誘導コイル、７……高周波誘導結合プラ
ズマ、８……ノズル、９，２１……スキマー、１
６……マスフイルタ、１７……リアチヤンバー、
２０……信号処理部、２２……共用ボデイ、２３
……引出し電極、２４……絶縁物、２５ａ〜２５
ｃ……黒色のクロームメツキ、２６……センター
チヤンバー筺体、２７……空隙部、２８……間隙
。
Figure 1 is a cross-sectional view of the main parts of the embodiment of the present invention;
The figure is an explanatory diagram of the overall configuration of a high-frequency inductively coupled plasma mass spectrometer, and FIG. 3 is a sectional view of the main part configuration of a conventional example. 1... Plasma torch, 2... Flow rate control section, 3
...Argon gas supply source, 4...Sample cell, 6...
... High frequency induction coil, 7 ... High frequency inductively coupled plasma, 8 ... Nozzle, 9, 21 ... Skimmer, 1
6...Mass filter, 17...Rear chamber,
20... Signal processing unit, 22... Shared body, 23
...Extraction electrode, 24...Insulator, 25a-25
c...Black chrome plating, 26...Center chamber housing, 27...Gap, 28...Gap.
Claims (1)
高周波磁界を形成して高周波誘導結合プラズマを
生じさせ、該プラズマを用いて試料を励起してイ
オンを生じさせ、該イオンをノズルとスキマーか
らなるインターフエイスを介して質量分析計に導
いて検出することにより、前記試料中の被測定元
素を分析する高周波誘導プラズマ質量分析装置に
おいて、 円錘形の導入部を有する引出し電極が前記スキ
マーの内側に固定されると共に該引出し電極のつ
ば部と共用ボデイの間に間隙流路を形成し、前記
スキマーの中心を外れた気体流が該間隙流路を通
つてセンターチヤンバー筺体内に導かれるように
構成したことを特徴とする高周波誘導プラズマ質
量分析装置。[Claim for Utility Model Registration] High frequency energy is supplied to a high frequency induction coil to form a high frequency magnetic field to generate high frequency inductively coupled plasma, the plasma is used to excite the sample to generate ions, and the ions are sent to the nozzle. In a high-frequency induction plasma mass spectrometer that analyzes an element to be measured in the sample by guiding it to a mass spectrometer and detecting it through an interface consisting of a skimmer and a skimmer, It is fixed inside the skimmer and forms a gap passage between the collar of the extraction electrode and the common body, and the gas flow off the center of the skimmer passes through the gap passage and enters the center chamber housing. A high-frequency induction plasma mass spectrometer characterized in that it is configured to be guided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10248289U JPH0340748U (en) | 1989-08-31 | 1989-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10248289U JPH0340748U (en) | 1989-08-31 | 1989-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0340748U true JPH0340748U (en) | 1991-04-18 |
Family
ID=31651377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10248289U Pending JPH0340748U (en) | 1989-08-31 | 1989-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0340748U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005519450A (en) * | 2002-03-08 | 2005-06-30 | ヴァリアン オーストラリア ピーティーワイ．エルティーディー． | Plasma mass spectrometer |
| JP2015502022A (en) * | 2011-12-12 | 2015-01-19 | サーモ フィッシャー サイエンティフィック （ブレーメン） ゲーエムベーハー | Vacuum interface method and vacuum interface device for mass spectrometer |
| KR101651542B1 (en) * | 2016-06-29 | 2016-08-26 | 이성환 | Manufacture method of decoration string using silk |
| JP2023512537A (en) * | 2020-02-04 | 2023-03-27 | パーキンエルマー・ヘルス・サイエンシーズ・カナダ・インコーポレイテッド | Ionic interfaces and systems and methods of using them |
-
1989
- 1989-08-31 JP JP10248289U patent/JPH0340748U/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005519450A (en) * | 2002-03-08 | 2005-06-30 | ヴァリアン オーストラリア ピーティーワイ．エルティーディー． | Plasma mass spectrometer |
| JP2015502022A (en) * | 2011-12-12 | 2015-01-19 | サーモ フィッシャー サイエンティフィック （ブレーメン） ゲーエムベーハー | Vacuum interface method and vacuum interface device for mass spectrometer |
| US9741549B2 (en) | 2011-12-12 | 2017-08-22 | Thermo Fisher Scientific (Bremen) Gmbh | Mass spectrometer vacuum interface method and apparatus |
| US10283338B2 (en) | 2011-12-12 | 2019-05-07 | Thermo Fisher Scientific (Bremen) Gmbh | Mass spectrometer vacuum interface method and apparatus |
| US10475632B2 (en) | 2011-12-12 | 2019-11-12 | Thermo Fisher Scientific (Bremen) Gmbh | Mass spectrometer vacuum interface method and apparatus |
| US10991561B2 (en) | 2011-12-12 | 2021-04-27 | Thermo Fisher Scientific (Bremen) Gmbh | Mass spectrometer vacuum interface method and apparatus |
| KR101651542B1 (en) * | 2016-06-29 | 2016-08-26 | 이성환 | Manufacture method of decoration string using silk |
| JP2023512537A (en) * | 2020-02-04 | 2023-03-27 | パーキンエルマー・ヘルス・サイエンシーズ・カナダ・インコーポレイテッド | Ionic interfaces and systems and methods of using them |
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