JPH03109676U - - Google Patents
Info
- Publication number
- JPH03109676U JPH03109676U JP1828990U JP1828990U JPH03109676U JP H03109676 U JPH03109676 U JP H03109676U JP 1828990 U JP1828990 U JP 1828990U JP 1828990 U JP1828990 U JP 1828990U JP H03109676 U JPH03109676 U JP H03109676U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- fin
- back surface
- air flow
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004528 spin coating Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案に係るスピンコーテイング装置
の一実施例を示すもので、正方形の基板に適用し
た場合の基板保持具の正面図、第２図は同保持具
の平面図、第３図は同保持具の底面図、第４図は
同保持具の要部斜視図、第５図は従来のスピンコ
ーテイング装置の断面図である。
２……基板保持具、３……回転軸、５……基板
、１６……フイン、１６Ａ……フイン本体、１６
Ｂ……固定部、１６Ｃ……気流方向変換部、２０
……ガイド溝、Ｙ，Ｙ１……空気流。
Fig. 1 shows an embodiment of the spin coating device according to the present invention. Fig. 2 is a front view of a substrate holder when applied to a square substrate, Fig. 2 is a plan view of the holder, and Fig. 3 is a top view of the holder. FIG. 4 is a bottom view of the holder, FIG. 4 is a perspective view of essential parts of the holder, and FIG. 5 is a sectional view of a conventional spin coating device. 2...Substrate holder, 3...Rotating shaft, 5...Substrate, 16...Fin, 16A...Fin body, 16
B...Fixing part, 16C...Airflow direction conversion part, 20
...Guide groove, Y, Y1 ...Air flow.
Claims (1)
せ、その回転中に処理液を遠心力を利用して前記
基板上に略均一に塗布するスピンコーテイング装
置において、 前記基板の裏面に向かつて外向きの空気流を生
じさせるフインを前記基板保持具の裏面に設ける
と共に、前記基板保持具の裏面外周部に、前記フ
インによつて生じた空気流を前記基板の裏面外周
縁に導くガイド溝を前記フインに対応して設けた
ことを特徴とするスピンコーテイング装置。[Claims for Utility Model Registration] A spin coating device in which a substrate is placed substantially horizontally on a substrate holder and rotated, and during the rotation, a processing liquid is applied substantially uniformly onto the substrate using centrifugal force. , a fin that generates an air flow outward toward the back surface of the substrate is provided on the back surface of the substrate holder, and the air flow generated by the fin is provided on the outer periphery of the back surface of the substrate holder to direct the air flow toward the substrate. A spin coating device characterized in that a guide groove leading to the outer peripheral edge of the back surface of the fin is provided corresponding to the fin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1828990U JP2503999Y2 (en) | 1990-02-27 | 1990-02-27 | Spin coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1828990U JP2503999Y2 (en) | 1990-02-27 | 1990-02-27 | Spin coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03109676U true JPH03109676U (en) | 1991-11-11 |
| JP2503999Y2 JP2503999Y2 (en) | 1996-07-03 |
Family
ID=31521452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1828990U Expired - Lifetime JP2503999Y2 (en) | 1990-02-27 | 1990-02-27 | Spin coating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2503999Y2 (en) |
-
1990
- 1990-02-27 JP JP1828990U patent/JP2503999Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2503999Y2 (en) | 1996-07-03 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |