JPH0448622U

JPH0448622U -

Info

Publication number: JPH0448622U
Application number: JP10538490U
Authority: JP
Priority date: 1990-06-26
Filing date: 1990-10-05
Publication date: 1992-04-24
Anticipated expiration: 2005-10-05
Also published as: JP2507468Y2

Description

[Brief explanation of the drawing]

第１図は請求項１に係る実施例装置の縦断正面
図、第２図はその変形実施例を示す要部縦断正面
図、第３図〜第５図は請求項２に係る実施例装置
を示し、第３図はその横断平面図、第４図はその
縦断正面図、第５図はその装置のチヤンバーを破
断して示す斜視図、第６図は従来例を示す縦断正
面図である。１……遠心式チヤンバー、２……チヤンバー周
壁、２Ａ……疎水性部材、３……吸気口、４，４
ａ……排気口、５……ロータ、７……回転駆動手
段、９……強制排気ブロア、１０……クランプ装
置、Ｗ……基板。 FIG. 1 is a longitudinal sectional front view of the embodiment device according to claim 1, FIG. 2 is a longitudinal sectional front view of the main part showing a modified embodiment thereof, and FIGS. 3 to 5 are the embodiment device according to claim 2. 3 is a cross-sectional plan view thereof, FIG. 4 is a longitudinal sectional front view thereof, FIG. 5 is a perspective view showing a broken chamber of the device, and FIG. 6 is a vertical sectional front view showing a conventional example. 1...Centrifugal chamber, 2...Chamber peripheral wall, 2A...Hydrophobic member, 3...Intake port, 4,4
a...exhaust port, 5...rotor, 7...rotation drive means, 9...forced exhaust blower, 10...clamp device, W...substrate.

Claims

[Scope of Claim for Utility Model Registration] 1. A double-bearing horizontal shaft type rotor is rotatably provided in a centrifugal chamber, and a substrate to be processed housed in the rotor is held by a clamping device attached to the rotor,
In a horizontal axis centrifugal drying device configured to rotate the rotor by a rotation drive means to remove water droplets attached to the substrate, the peripheral wall of the chamber is formed in a substantially circular shape to surround the rotor, and the peripheral wall of the chamber is formed in a substantially circular shape so as to surround the rotor. An intake port is opened on one side and an exhaust port is opened on the other side, and the distance from the rotation center of the rotor to the chamber peripheral wall is set to gradually increase from the intake port to the exhaust port,
A horizontal axis centrifugal substrate drying device characterized by being configured to perform forced exhaust along the rotational direction of a rotor. 2 The centrifugal chamber has an intake port on the upper wall, an exhaust port on the lower wall of the chamber, and is configured to drain water and force exhaust air from the exhaust port, and a double-bearing horizontal shaft type rotor is rotatable inside the chamber. A horizontal axis centrifugal type, which is equipped with a clamping device attached to the rotor to hold the substrate to be processed inside the rotor, and the rotor is rotated by a rotational drive means to remove water droplets adhering to the substrate. A horizontal axis centrifugal type drying device, characterized in that the peripheral wall of the chamber is formed into a substantially circular shape so as to surround the rotor, and the inner surface of the peripheral wall of the chamber is made of a hydrophobic material so as to correspond at least to the length in the axial direction of the rotor. Substrate drying equipment.