JPH0311058U - - Google Patents
Info
- Publication number
- JPH0311058U JPH0311058U JP7126189U JP7126189U JPH0311058U JP H0311058 U JPH0311058 U JP H0311058U JP 7126189 U JP7126189 U JP 7126189U JP 7126189 U JP7126189 U JP 7126189U JP H0311058 U JPH0311058 U JP H0311058U
- Authority
- JP
- Japan
- Prior art keywords
- carrier gas
- organic metals
- container
- powdered organic
- stirrer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000012159 carrier gas Substances 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 2
- 238000003756 stirring Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の主要部を縦断面で表した図で
あり、第２図は本考案の蒸発用容器を用いた熱電
変換材料製造用装置の概略図である。
１……容器、１１……撹拌機、２０……プラズ
マ発生装置、３０……反応装置、５０……反応ガ
ス供給装置、６０……反応ガス排気装置。
FIG. 1 is a longitudinal cross-sectional view of the main parts of the present invention, and FIG. 2 is a schematic diagram of an apparatus for producing thermoelectric conversion materials using the evaporation container of the present invention. DESCRIPTION OF SYMBOLS 1... Container, 11... Stirrer, 20... Plasma generator, 30... Reaction device, 50... Reaction gas supply device, 60... Reaction gas exhaust device.
Claims (1)
に同伴された有機金属蒸気の排出管が取り付けら
れており、粉末状有機金属を撹拌するための撹拌
機を備えたことを特徴とする粉末状有機金属の蒸
発用容器。 For evaporation of powdered organic metals, characterized in that an inlet pipe for carrier gas and a discharge pipe for the organic metal vapor entrained in the carrier gas are attached to the upper part, and a stirrer for stirring the powdered organic metals is provided. container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7126189U JPH0311058U (en) | 1989-06-20 | 1989-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7126189U JPH0311058U (en) | 1989-06-20 | 1989-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0311058U true JPH0311058U (en) | 1991-02-01 |
Family
ID=31608132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7126189U Pending JPH0311058U (en) | 1989-06-20 | 1989-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311058U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6024597U (en) * | 1983-07-28 | 1985-02-19 | 丸井 宏之 | parallel line ruler |
-
1989
- 1989-06-20 JP JP7126189U patent/JPH0311058U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6024597U (en) * | 1983-07-28 | 1985-02-19 | 丸井 宏之 | parallel line ruler |