JPH03112931U - - Google Patents

Info

Publication number
JPH03112931U
JPH03112931U JP2251090U JP2251090U JPH03112931U JP H03112931 U JPH03112931 U JP H03112931U JP 2251090 U JP2251090 U JP 2251090U JP 2251090 U JP2251090 U JP 2251090U JP H03112931 U JPH03112931 U JP H03112931U
Authority
JP
Japan
Prior art keywords
slider
raw material
solution
substrate
material solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2251090U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2251090U priority Critical patent/JPH03112931U/ja
Publication of JPH03112931U publication Critical patent/JPH03112931U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図はこの考案による液相エピタキシヤル成
長装置の要部構成図、第２図はこの考案による実
施例の構成図、第３図は従来技術による液相エピ
タキシヤル成長装置の構成図、第４図は第３図の
斜視図である。 １１〜１３……原料溶液、２……基板、３……
溶液溜、４……スライダー、５……残留溶液、６
……傾斜面。

Claims (1)

  1. 【実用新案登録請求の範囲】 スライダーに設けられた溝にはめ込まれる基板
    と、原料溶液を保持する溶液溜とで構成され、前
    記溶液溜は固定され、前記スライダーを移動する
    ことによつて、前記基板を前記原料溶液に触れさ
    せる液相エピタキシヤル成長装置において、 前記溝の壁面うち、前記スライダーの移動方向
    に対し、後方の壁面の縁を傾斜面とすることを特
    徴とする液相エピタキシヤル成長装置。
JP2251090U 1990-03-06 1990-03-06 Pending JPH03112931U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2251090U JPH03112931U (ja) 1990-03-06 1990-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2251090U JPH03112931U (ja) 1990-03-06 1990-03-06

Publications (1)

Publication Number Publication Date
JPH03112931U true JPH03112931U (ja) 1991-11-19

Family

ID=31525517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2251090U Pending JPH03112931U (ja) 1990-03-06 1990-03-06

Country Status (1)

Country Link
JP (1) JPH03112931U (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364465A (en) * 1976-11-19 1978-06-08 Mitsubishi Electric Corp Semiconductor crystal production apparatus
JPS5378766A (en) * 1976-12-23 1978-07-12 Fujitsu Ltd Crystal growth device
JPS62144321A (ja) * 1985-12-19 1987-06-27 Mitsubishi Electric Corp 液相エピタキシヤル成長装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364465A (en) * 1976-11-19 1978-06-08 Mitsubishi Electric Corp Semiconductor crystal production apparatus
JPS5378766A (en) * 1976-12-23 1978-07-12 Fujitsu Ltd Crystal growth device
JPS62144321A (ja) * 1985-12-19 1987-06-27 Mitsubishi Electric Corp 液相エピタキシヤル成長装置

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