JPH03119472U - - Google Patents

Info

Publication number
JPH03119472U
JPH03119472U JP2584490U JP2584490U JPH03119472U JP H03119472 U JPH03119472 U JP H03119472U JP 2584490 U JP2584490 U JP 2584490U JP 2584490 U JP2584490 U JP 2584490U JP H03119472 U JPH03119472 U JP H03119472U
Authority
JP
Japan
Prior art keywords
spin
spin head
periphery
rotatably supported
rotation center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2584490U
Other languages
English (en)
Other versions
JPH0810398Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2584490U priority Critical patent/JPH0810398Y2/ja
Publication of JPH03119472U publication Critical patent/JPH03119472U/ja
Application granted granted Critical
Publication of JPH0810398Y2 publication Critical patent/JPH0810398Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Description

【図面の簡単な説明】
第１図〜第３図が本考案に係わる実施例の説明
図であり、第１図は装置の説明図、第２図は塗布
した薄膜の断面説明図、第３図ａ〜ｃは要部の他
の形状例を示す説明図、第４図と第５図は比較例
の説明図である。 １……送風口、１１……中心部、１２……角状
開口部、２……スピンカツプ、３……スピンヘツ
ド、４……被塗布板、５……レジスト、５１……
段差、Ａ……中心部、Ｂ……周端部、Ｍ１，Ｍ２
……中間部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 回転可能に水平に軸支されたスピンヘツドの上
    方に、送風口をスピンヘツドの回転中心部側を大
    きく、周部を小さく開口して配設したことを特徴
    とする回転塗布装置。
JP2584490U 1990-03-14 1990-03-14 回転塗布装置 Expired - Lifetime JPH0810398Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2584490U JPH0810398Y2 (ja) 1990-03-14 1990-03-14 回転塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2584490U JPH0810398Y2 (ja) 1990-03-14 1990-03-14 回転塗布装置

Publications (2)

Publication Number Publication Date
JPH03119472U true JPH03119472U (ja) 1991-12-10
JPH0810398Y2 JPH0810398Y2 (ja) 1996-03-29

Family

ID=31528764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2584490U Expired - Lifetime JPH0810398Y2 (ja) 1990-03-14 1990-03-14 回転塗布装置

Country Status (1)

Country Link
JP (1) JPH0810398Y2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09148226A (ja) * 1995-11-27 1997-06-06 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2001118790A (ja) * 1999-08-12 2001-04-27 Tokyo Electron Ltd 現像装置、基板処理装置及び現像方法
JP2018156962A (ja) * 2017-03-15 2018-10-04 東京エレクトロン株式会社 塗布処理装置及びカップ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09148226A (ja) * 1995-11-27 1997-06-06 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2001118790A (ja) * 1999-08-12 2001-04-27 Tokyo Electron Ltd 現像装置、基板処理装置及び現像方法
JP2018156962A (ja) * 2017-03-15 2018-10-04 東京エレクトロン株式会社 塗布処理装置及びカップ

Also Published As

Publication number Publication date
JPH0810398Y2 (ja) 1996-03-29

Similar Documents

Publication Publication Date Title
JPH0161975U (ja)
JPH0366673U (ja)
JPS5810496Y2 (ja) 毛髪乾燥機
JPS5897835U (ja) スピンナコ−タ−
JPS63121098U (ja)
JPS6049962U (ja) スピ−ドスプレヤ−装置
JPH03119738U (ja)
JPH0350230U (ja)
JPH0458812U (ja)
JPS63114077U (ja)
JPH0440888U (ja)
JPH0414798U (ja)
JPS63162997U (ja)
JPH02123993U (ja)
JPH0212485U (ja)
JPH03112928U (ja)
JPS59147527U (ja) 自転する芳香剤容器
JPS641787U (ja)
JPS6329653U (ja)
JPH0390675U (ja)
JPH01130899U (ja)
JPH03118018U (ja)
JPS6384954U (ja)
JPS6446818U (ja)
JPH0394658U (ja)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term