JPH0366673U - - Google Patents

Info

Publication number
JPH0366673U
JPH0366673U JP12653089U JP12653089U JPH0366673U JP H0366673 U JPH0366673 U JP H0366673U JP 12653089 U JP12653089 U JP 12653089U JP 12653089 U JP12653089 U JP 12653089U JP H0366673 U JPH0366673 U JP H0366673U
Authority
JP
Japan
Prior art keywords
substrate
processed
spin chuck
substrate holder
blowing means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12653089U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12653089U priority Critical patent/JPH0366673U/ja
Publication of JPH0366673U publication Critical patent/JPH0366673U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係るスピンチヤツクの一実施
例を示すもので、正方形の基板に適用した場合の
平面図、第２図は要部の断面図、第３図は送風ダ
クトの斜視図、第４図は本考案の効果を説明する
ための基板の要部側面図、第５図は従来のスピン
チヤツクの平面図、第６図は同チヤツクの正面図
である。 ２……基板保持具、３……基板、４……回転軸
、７……回転方向、８ａ〜８ｄ……基板の側面、
１３……送風ダクト、１４……吸気孔、１５……
排気孔、２０……空気流、２１……レジスト液。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 被処理基板を基板保持具上に略水平に設置
    して回転させ、その回転中に処理液を遠心力を利
    用して前記被処理基板上に略均一に塗布するスピ
    ンチヤツクにおいて、前記被処理基板の側面に上
    向きの空気流を送風する送風手段を前記基板保持
    具に設けたことを特徴とするスピンチヤツク。 (2) 請求項１記載のスピンチヤツクにおいて、
    前記送風手段の吸気孔は前記基板保持具の回転方
    向に開口していることを特徴とするスピンチヤツ
    ク。
JP12653089U 1989-10-31 1989-10-31 Pending JPH0366673U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12653089U JPH0366673U (ja) 1989-10-31 1989-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12653089U JPH0366673U (ja) 1989-10-31 1989-10-31

Publications (1)

Publication Number Publication Date
JPH0366673U true JPH0366673U (ja) 1991-06-28

Family

ID=31674336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12653089U Pending JPH0366673U (ja) 1989-10-31 1989-10-31

Country Status (1)

Country Link
JP (1) JPH0366673U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014588A (ja) * 2009-06-30 2011-01-20 Ulvac Seimaku Kk 塗布装置及び気流制御板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014588A (ja) * 2009-06-30 2011-01-20 Ulvac Seimaku Kk 塗布装置及び気流制御板

Similar Documents

Publication Publication Date Title
JPH0366673U (ja)
JPS6112653U (ja) バキユ−ムチヤツク
JPH03119472U (ja)
JPH03109676U (ja)
JPH0390675U (ja)
JPH0167735U (ja)
JPH0161975U (ja)
JPH0197548U (ja)
JPH0399431U (ja)
JPH0550724U (ja) レジスト裏面塗布装置
JPH02101098U (ja)
JPH0372240U (ja)
JPS6014829U (ja) 自動エアブロ−装置
JPS62131433U (ja)
JPS6412678U (ja)
JPH0359189U (ja)
JPH0221734U (ja)
JPS6359322U (ja)
JPS58122549U (ja) 電気掃除機のエア−タ−ビン吸口
JPS6343425U (ja)
JPH0425231U (ja)
JPS62135673U (ja)
JPH0259706U (ja)
JPS6353583U (ja)
JPS62202378U (ja)