JPH0312573B2 - - Google Patents

Info

Publication number
JPH0312573B2
JPH0312573B2 JP59150233A JP15023384A JPH0312573B2 JP H0312573 B2 JPH0312573 B2 JP H0312573B2 JP 59150233 A JP59150233 A JP 59150233A JP 15023384 A JP15023384 A JP 15023384A JP H0312573 B2 JPH0312573 B2 JP H0312573B2
Authority
JP
Japan
Prior art keywords
workpiece
support
tank
plasma
hanger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59150233A
Other languages
Japanese (ja)
Other versions
JPS6128531A (en
Inventor
Yasuhiko Ogisu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Gosei Co Ltd
Original Assignee
Toyoda Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Gosei Co Ltd filed Critical Toyoda Gosei Co Ltd
Priority to JP15023384A priority Critical patent/JPS6128531A/en
Priority to DE19853520924 priority patent/DE3520924A1/en
Priority to KR1019850004094A priority patent/KR870001171B1/en
Priority to CA000483614A priority patent/CA1249926A/en
Priority to AU43492/85A priority patent/AU565026B2/en
Priority to US06/744,061 priority patent/US4668479A/en
Publication of JPS6128531A publication Critical patent/JPS6128531A/en
Publication of JPH0312573B2 publication Critical patent/JPH0312573B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/22Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
    • B05B7/222Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0242Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects being individually presented to the spray heads by a rotating element, e.g. turntable
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134Plasma spraying
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/137Spraying in vacuum or in an inert atmosphere
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/30Vehicles, e.g. ships or aircraft, or body parts thereof
    • B29L2031/3044Bumpers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electromagnetism (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Description

【発明の詳細な説明】 発明の目的 (産業上の利用分野) この発明は、タンク内に収容された回転支持台
上の複数個のハンガーに合成樹脂製のバンパー等
の被加工物を支持し、タンク内に設けられたプラ
ズマ噴射管から噴射されるプラズマガスによつて
被加工物の表面にプラズマ処理を施し、その被加
工物の表面に塗料を付着し易くするプラズマ処理
装置に関するものである。
[Detailed Description of the Invention] Purpose of the Invention (Field of Industrial Application) This invention supports a workpiece such as a bumper made of synthetic resin on a plurality of hangers on a rotary support stand housed in a tank. , relates to a plasma treatment device that performs plasma treatment on the surface of a workpiece using plasma gas injected from a plasma injection tube installed in a tank, thereby making it easier for paint to adhere to the surface of the workpiece. .

(従来の技術) 従来、この種のプラズマ処理装置においては、
被加工物を支持するためにタンク内に設けられた
ハンガーが平板状であるものが知られている。
(Prior art) Conventionally, in this type of plasma processing apparatus,
It is known that a hanger provided in a tank for supporting a workpiece is shaped like a flat plate.

(発明が解決しようとする問題点) 上記従来のプラズマ処理装置においては、ハン
ガーが単なる板状のものであるため、被加工物が
ハンガー上で妄動するおそれがある。又、これを
防止するためにハンガーの両側縁に移動阻止用の
突壁等を設けることも考えられるが、このように
構成した場合には、被加工物の両側部の表面が前
記ハンガーの突壁にて遮蔽されて、プラズマガス
が被加工物の端部等まで効果的に噴射されず、被
加工物の表面全体にわたつて均一なプラズマ処理
が施されないという問題点がある。
(Problems to be Solved by the Invention) In the above-mentioned conventional plasma processing apparatus, since the hanger is a simple plate-like object, there is a risk that the workpiece may move erratically on the hanger. Also, in order to prevent this, it may be possible to provide protruding walls or the like to prevent movement on both sides of the hanger, but in this case, the surfaces of both sides of the workpiece will not be exposed to the protrusions of the hanger. There is a problem in that the plasma gas is not effectively injected to the edge of the workpiece because it is blocked by the wall, and uniform plasma treatment cannot be performed over the entire surface of the workpiece.

発明の構成 (問題点を解決するための手段) この発明は、前記のような問題点に着目してな
されたものであつて、被加工物をハンガー上に妄
動するおそれもなく安定状態で支持することがで
き、しかもタンク内に自動車用バンパー等の大型
の被加工物を多数収容してプラズマ処理を行う場
合にも、被加工物の表面がハンガーにて遮蔽され
ることなく、その被加工物の端部等までプラズマ
ガスが効果的に行き渡り、被加工物の表面全体に
わたつて均一なプラズマ処理を施すことができる
ようにしたものである。
Structure of the Invention (Means for Solving the Problems) The present invention has been made by focusing on the above-mentioned problems. Furthermore, even when plasma processing is performed with many large workpieces such as car bumpers stored in a tank, the surface of the workpieces is not shielded by a hanger, and the workpieces can be easily processed. Plasma gas is effectively distributed to the edges of the object, allowing uniform plasma treatment to be performed over the entire surface of the object.

そこで、まずこの発明のプラズマ処理装置の概
要を説明すると、このプラズマ処理装置において
は、タンク1内に回転支持台6が収容され、その
支持台6の一対の回転盤11,11間には合成樹
脂製の自動車用バンパー等の被加工物Wを支持す
るための複数個のハンガー23が相対回転可能に
設けられている。タンク1内にはプラズマ噴射管
26が配設され、前記回転支持台6の回転盤1
1,11が回転されながら、このプラズマ噴射管
26から被加工物Wに酸素等のプラズマガスが噴
射されて、被加工物Wの表面にプラズマ処理が施
されるようになつている。
First, the outline of the plasma processing apparatus of the present invention will be explained. In this plasma processing apparatus, a rotary support 6 is housed in a tank 1, and between a pair of rotary disks 11, 11 of the support 6, there is a A plurality of hangers 23 are provided so as to be relatively rotatable for supporting a workpiece W such as a resin automobile bumper. A plasma injection pipe 26 is disposed inside the tank 1, and the rotary disk 1 of the rotary support base 6
1 and 11 are being rotated, plasma gas such as oxygen is injected from this plasma injection tube 26 onto the workpiece W, and the surface of the workpiece W is subjected to plasma treatment.

そして、前記各ハンガー23は、上端部におい
て回転支持台6の回転盤11,11に相対回転可
能に支持された左右一対の側板27等の支持部
と、両側板27の下端部間に架設された連結杆3
0と、被加工物Wの内側を下方から支持するよう
に連結杆30に突設された複数個の支持突片3
2,33とより構成されている。
Each hanger 23 is constructed between a supporting portion such as a pair of left and right side plates 27 whose upper end portions are relatively rotatably supported by the rotating disks 11, 11 of the rotary support base 6, and the lower end portions of the both side plates 27. connecting rod 3
0, and a plurality of supporting protrusions 3 protruding from the connecting rod 30 so as to support the inside of the workpiece W from below.
2, 33.

(作用) 従つて、このプラズマ処理装置において、ハン
ガー23上に自動車用バンパー等の被加工物Wを
載置すれば、複数個の支持突片32,33が被加
工物Wの内側を下面から上方へ持ち上げるように
支持し、被加工物Wはハンガー23上に安定状態
で支持される。そして、この状態において、被加
工物Wの表面が遮蔽されることなくその端部等ま
で効果的にプラズマガスにさらされ、被加工物W
の表面全体にわたつて均一なプラズマ処理が施さ
れる。
(Function) Therefore, in this plasma processing apparatus, when a workpiece W such as an automobile bumper is placed on the hanger 23, the plurality of supporting protrusions 32 and 33 move the inside of the workpiece W from the bottom surface. The workpiece W is supported so as to be lifted upward, and the workpiece W is stably supported on the hanger 23. In this state, the surface of the workpiece W is effectively exposed to the plasma gas up to its edges without being shielded, and the workpiece W
uniform plasma treatment is applied over the entire surface of the

(実施例) 以下、この発明を具体化したプラズマ処理装置
の一実施例を図面に従つて詳細に説明する。
(Example) Hereinafter, an example of a plasma processing apparatus embodying the present invention will be described in detail with reference to the drawings.

さて、この実施例のプラズマ処理装置のタンク
1は第1図に示すようにその一側端に出入口2を
備え、その出入口2にはのぞき窓3を有する蓋体
4が開閉可能に取着されている。タンク1内の底
部には一対のレール5が所定間隔をおいて配設さ
れ、タンク1内のほぼ全長にわたつて延びてい
る。
Now, as shown in FIG. 1, the tank 1 of the plasma processing apparatus of this embodiment has an entrance/exit 2 at one end thereof, and a lid 4 having a peephole 3 is attached to the entrance/exit 2 so as to be openable and closable. ing. A pair of rails 5 are disposed at a predetermined interval at the bottom of the tank 1 and extend over almost the entire length of the tank 1.

前記タンク1内に出入可能に収容されるよう
に、レール5上には回転支持台6が移動可能に支
持されている。第1〜3図に示すようにその回転
支持台6は支持フレーム7と、その支持フレーム
7上に水平軸線の周りで回転可能に支持された回
転体8とより構成され、支持フレーム7の下部両
側には前記レール5に沿つて転動する複数個の車
輪9が回転可能に取付けられている。そして、前
記回転体8は中央の回転軸10と、その回転軸1
0の両端近傍に固定された左右一対の回転円盤1
1とより構成されている。
A rotary support 6 is movably supported on the rail 5 so as to be accommodated in the tank 1 so as to be able to be moved in and out. As shown in FIGS. 1 to 3, the rotary support base 6 is composed of a support frame 7 and a rotating body 8 supported on the support frame 7 so as to be rotatable around a horizontal axis. A plurality of wheels 9 that roll along the rail 5 are rotatably attached to both sides. The rotating body 8 has a central rotating shaft 10 and its rotating shaft 1.
A pair of left and right rotating disks 1 fixed near both ends of 0
1.

第1〜3図に示すように前記支持フレーム7の
外側において、回転軸10の右端には歯車12が
固定されるとともに左端にはスプロケツトホイー
ル13が固定されている。そのスプロケツトホイ
ール13と対応して支持フレーム7の左側板には
スプロケツトホイール14及び歯車15が支軸1
6により一体回転可能に支持され、両スプロケツ
トホイール13,14間にはチエーン17が掛装
されている。前記タンク1の外側にはモータ18
が支持板19を介して配設支持され、そのモータ
軸20が軸受筒21を介してタンク1内に突出し
ている。そして、このモータ軸20の内端には歯
車22が固定され、タンク1内への回転支持台6
の出入れに伴つて支持フレーム7上の歯車15に
係合離脱するようになつている。
As shown in FIGS. 1 to 3, on the outside of the support frame 7, a gear 12 is fixed to the right end of the rotating shaft 10, and a sprocket wheel 13 is fixed to the left end. Corresponding to the sprocket wheel 13, a sprocket wheel 14 and a gear 15 are attached to the support shaft 1 on the left side plate of the support frame 7.
6, and a chain 17 is suspended between both sprocket wheels 13 and 14. A motor 18 is installed outside the tank 1.
is disposed and supported via a support plate 19, and its motor shaft 20 projects into the tank 1 via a bearing sleeve 21. A gear 22 is fixed to the inner end of this motor shaft 20, and a rotation support base 6 is fixed to the inner end of the motor shaft 20.
The gear 15 on the support frame 7 is engaged with and disengaged from the gear 15 as the support frame 7 is moved in and out.

第1,2図に示すように前記回転支持台6の両
回転円盤11間には複数個のハンガー23がその
左右両側板の上端部において支軸24により相対
回転可能に支持され、その上部に合成樹脂製の自
動車用バンパー等の被加工物Wの内側を下方より
支持できるようになつている。その被加工物Wと
対応するように前記タンク1の内周面には、その
円周方向にほぼ等角度間隔をおいて位置する複数
のライン(実施例では90度の角度間隔をおいて位
置する4つのライン)上において、それぞれ複数
個の支持金具25が突設され、任意の一又は複数
のライン上の支持金具25には外周に多数の噴射
口(図示しない)を有するプラズマ噴射管26が
支持されている。そして、このプラズマ噴射管2
6の噴射口からタンク1内へ酸素等のプラズマガ
スが噴射され、ハンガー23内の被加工物Wの表
面にプラズマ処理が施されるようになつている。
As shown in FIGS. 1 and 2, a plurality of hangers 23 are supported relatively rotatably by support shafts 24 at the upper ends of the left and right sides of the rotary disks 11 of the rotary support base 6, and The inner side of a workpiece W such as a synthetic resin automobile bumper can be supported from below. On the inner circumferential surface of the tank 1, in correspondence with the workpiece W, there are a plurality of lines located at approximately equal angular intervals in the circumferential direction (in the embodiment, lines are located at angular intervals of 90 degrees). A plurality of support fittings 25 are provided protrudingly on each of the four lines), and each of the support fittings 25 on one or more arbitrary lines has a plasma injection tube 26 having a large number of injection ports (not shown) on the outer periphery. is supported. And this plasma injection tube 2
Plasma gas such as oxygen is injected into the tank 1 from the injection port 6, and the surface of the workpiece W in the hanger 23 is subjected to plasma treatment.

次に、この発明の主要部の構成について説明す
ると、第1,2,4図に示すようにこの実施例に
おける各ハンガー23はその左右両側に支持部と
しての一対の側板27を備え、その上端部におい
て支軸24により回転支持台6の回転円盤11内
面に相対回転可能に支持されている。そして各側
板27の下部中央には切欠窓28が形成され、そ
の切欠窓28にはプラズマガスの通過を許容する
ネツト29が張設されている。
Next, the configuration of the main part of the present invention will be explained. As shown in FIGS. 1, 2, and 4, each hanger 23 in this embodiment is provided with a pair of side plates 27 as supporting parts on both left and right sides thereof, and the upper end thereof It is supported by a support shaft 24 on the inner surface of the rotary disk 11 of the rotary support base 6 so as to be relatively rotatable. A notched window 28 is formed at the center of the lower part of each side plate 27, and a net 29 is stretched over the notched window 28 to allow passage of plasma gas.

前記左右一対の側板27の下端部前縁間には1
本の棒材よりなる連結杆30が架設されている。
第4図に示すようにその連結杆30の左右両端に
は、連結杆30から後方に向かつて延びる支持部
31aと、その支持部31aの後端から側板27
の下端部後縁に向かつて横方向に延びる連結部3
1bと、前記支持部31aの後端から連結杆30
に向かつて内側前方へ斜状に延びる補強部31c
とよりなる補強枠31が設けられている。
Between the lower end front edges of the pair of left and right side plates 27, there is a
A connecting rod 30 made of a book rod is installed.
As shown in FIG. 4, at both left and right ends of the connecting rod 30, there is a support portion 31a extending rearward from the connecting rod 30, and a side plate 27 extending from the rear end of the supporting portion 31a.
A connecting portion 3 extending laterally toward the rear edge of the lower end of the
1b, and a connecting rod 30 from the rear end of the support portion 31a.
The reinforcing portion 31c extends obliquely toward the inner front toward the
A reinforcing frame 31 is provided.

その補強枠31の支持部31a上には前後一対
の端縁支持突片32が突設され、その上端には自
動車用バンパー等の被加工物Wをその左端及び右
端部の前後両端縁において内側の下方から支持す
るための支持部32aが内側下方に向かつて折曲
形成されている。又、この端縁支持突片32間に
おいて補強枠31の支持部31a上には中央支持
突片33が突設され、その上端には被加工物Wを
その左端及び右端部の前後中央において内側の下
方から支持するための支持部33aが、前記端縁
支持突片32の支持部32aよりも高い位置にお
いて内側下方に向かい折曲形成されており、その
支持部33aの前端が前記連結杆30に結合され
ている。
A pair of front and rear edge support protrusions 32 are protruded on the support portion 31a of the reinforcing frame 31, and the upper end of the protrusion supports a workpiece W such as an automobile bumper inside at both the front and rear edges of the left and right ends. A support portion 32a for supporting from below is bent inwardly and downwardly. Moreover, a center support protrusion 33 is provided protrudingly on the support part 31a of the reinforcing frame 31 between the edge support protrusions 32, and the workpiece W is held at the upper end of the center support protrusion 33 inwardly at the front and rear center of the left and right ends. A support portion 33a for supporting the connecting rod 30 from below is bent inwardly and downwardly at a position higher than the support portion 32a of the edge support protrusion 32, and the front end of the support portion 33a is formed to support the connecting rod 30 from below. is combined with

従つて、このように構成されたプラズマ処理装
置において、ハンガー23上に自動車用バンパー
等の被加工物Wを載置した場合、連結杆30両端
の補強杆31上に設けられた複数個の支持突片3
2,33の上端支持部32a,33aが被加工物
Wの下面にそれぞれ係合し、被加工物Wはハンガ
ー23上において下方から安定状態で支持され
る。そして、この状態においては、被加工物Wの
表面に遮蔽物が全く存在しないため、プラズマ噴
射管26から噴射されるプラズマガスが被加工物
Wに対してむらなく効果的に行き渡り、被加工物
Wの表面全体にわたつて均一なプラズマ処理が施
される。
Therefore, in the plasma processing apparatus configured as described above, when a workpiece W such as an automobile bumper is placed on the hanger 23, a plurality of supports provided on the reinforcing rods 31 at both ends of the connecting rod 30 Projection piece 3
The upper end support parts 32a and 33a of 2 and 33 engage with the lower surface of the workpiece W, respectively, and the workpiece W is stably supported from below on the hanger 23. In this state, since there is no shielding object on the surface of the workpiece W, the plasma gas injected from the plasma injection tube 26 evenly and effectively spreads over the workpiece W. Uniform plasma treatment is performed over the entire surface of W.

なお、この発明は前記実施例の構成に限定され
るものではなく、例えば支持部27として板状、
棒状、網状、格子状等のものを使用したり、この
発明の趣旨から逸脱しない範囲で各部の構成を任
意に変更して具体化することも可能である。
Note that the present invention is not limited to the configuration of the embodiment described above, and for example, the support portion 27 may have a plate shape,
It is also possible to use rod-shaped, net-shaped, lattice-shaped, etc., or to change the configuration of each part arbitrarily without departing from the spirit of the invention.

発明の構成 以上詳述したようにこの発明は、被加工物をハ
ンガー上に妄動するおそれもなく安定状態で支持
することができ、しかもタンク内に自動車用バン
パー等の大型の被加工物を多数収容してプラズマ
処理を行う場合にも、被加工物の表面がハンガー
にて遮蔽されることなく、その被加工物の端部等
までプラズマガスが効果的に行き渡り、被加工物
の表面全体にわたつて均一なプラズマ処理を施す
ことができるという優れた効果を奏する。
Structure of the Invention As detailed above, the present invention allows workpieces to be supported on a hanger in a stable state without fear of movement, and moreover, a large number of large workpieces such as automobile bumpers can be supported in a tank. Even when the workpiece is housed in plasma processing, the surface of the workpiece is not blocked by the hanger, and the plasma gas is effectively distributed to the edges of the workpiece, covering the entire surface of the workpiece. This provides an excellent effect in that uniform plasma treatment can be performed over the entire area.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明を具体化したプラズマ処理装
置の縦断面図、第2図は同装置の斜視図、第3図
は同じく部分拡大側断面図、第4図はハンガーの
部分拡大斜視図である。 図において、1はタンク、6は回転支持台、7
は支持フレーム、8は回転体、23はハンガー、
26はプラズマ噴射管、27は側板、30は連結
杆、32,33は支持突片である。
FIG. 1 is a longitudinal sectional view of a plasma processing apparatus embodying the present invention, FIG. 2 is a perspective view of the same apparatus, FIG. 3 is a partially enlarged side sectional view, and FIG. 4 is a partially enlarged perspective view of a hanger. be. In the figure, 1 is a tank, 6 is a rotating support, and 7 is a tank.
is a support frame, 8 is a rotating body, 23 is a hanger,
26 is a plasma injection tube, 27 is a side plate, 30 is a connecting rod, and 32 and 33 are supporting protrusions.

Claims (1)

【特許請求の範囲】 1 被加工物Wを収容するためのタンク1と、 該タンク1内に設けられ、前記被加工物Wの表
面にプラズマ処理を施すためのプラズマガスを噴
射するプラズマガス噴射管26と、 前記タンク1内に設けられ、支持フレーム7及
び該支持フレーム7に回転可能に支持された一対
の回転盤11,11を有する回転支持台6と、 前記回転支持盤11,11間に設けられ前記回
転盤11,11に回転可能に支持された一対の対
向する支持部27,27と、該支持部27,27
間に架設された連結部30と、該連結部30から
上方に向つて突設され、前記被加工物Wの内側を
下方より支持するための一対の支持突片32,3
3とを有するハンガー23、 とからなることを特徴とするプラズマ処理装置。 2 前記被加工物は合成樹脂製バンパーである特
許請求の範囲第1項に記載のプラズマ処理装置。 3 前記支持部27には切欠窓28が設けてある
特許請求の範囲第2項に記載のプラズマ処理装
置。
[Scope of Claims] 1. A tank 1 for accommodating a workpiece W; and a plasma gas injection device provided in the tank 1 for injecting plasma gas to perform plasma treatment on the surface of the workpiece W. a pipe 26; a rotary support base 6 provided in the tank 1 and having a support frame 7 and a pair of rotary discs 11, 11 rotatably supported by the support frame 7; and between the rotary support discs 11, 11. a pair of opposing support parts 27, 27 provided in the rotary disks 11, 11 and rotatably supported by the rotary disks 11, 11;
A connecting portion 30 installed between the connecting portion 30 and a pair of supporting protrusions 32 and 3 that project upward from the connecting portion 30 and support the inside of the workpiece W from below.
3. A plasma processing apparatus comprising: a hanger 23 having a hanger 23; 2. The plasma processing apparatus according to claim 1, wherein the workpiece is a bumper made of synthetic resin. 3. The plasma processing apparatus according to claim 2, wherein the support portion 27 is provided with a cutout window 28.
JP15023384A 1984-06-12 1984-07-19 Plasma treatment apparatus Granted JPS6128531A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP15023384A JPS6128531A (en) 1984-07-19 1984-07-19 Plasma treatment apparatus
DE19853520924 DE3520924A1 (en) 1984-06-12 1985-06-11 PLASMA PROCESSING SYSTEM
KR1019850004094A KR870001171B1 (en) 1984-06-12 1985-06-11 Plasma treatment apparatus
CA000483614A CA1249926A (en) 1984-06-12 1985-06-11 Plasma processing apparatus
AU43492/85A AU565026B2 (en) 1984-06-12 1985-06-12 Plasma processing
US06/744,061 US4668479A (en) 1984-06-12 1985-06-12 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15023384A JPS6128531A (en) 1984-07-19 1984-07-19 Plasma treatment apparatus

Publications (2)

Publication Number Publication Date
JPS6128531A JPS6128531A (en) 1986-02-08
JPH0312573B2 true JPH0312573B2 (en) 1991-02-20

Family

ID=15492459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15023384A Granted JPS6128531A (en) 1984-06-12 1984-07-19 Plasma treatment apparatus

Country Status (1)

Country Link
JP (1) JPS6128531A (en)

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US9134370B2 (en) 1999-11-23 2015-09-15 Mentor Graphics Corporation Continuous application and decompression of test patterns and selective compaction of test responses

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JPS6223822A (en) * 1985-11-20 1987-01-31 Aisin Warner Ltd Four-wheel driving automatic transmission
EP0524707B1 (en) * 1988-07-28 1995-09-20 Fuji Jukogyo Kabushiki Kaisha Transmission system for a two and four-wheel drive motor vehicle
US5234091A (en) * 1988-07-28 1993-08-10 Fuji Jukogyo Kabushiki Kaisha Power transmission system for a four-wheel drive motor vehicle
CN105032657B (en) * 2015-07-24 2018-07-17 上海卫星装备研究所 A large satellite frame painting turning device
CN106179848B (en) * 2016-08-27 2019-01-11 徐州市凯诺机械有限公司 A kind of hardware production door lock high-efficency spraying device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9134370B2 (en) 1999-11-23 2015-09-15 Mentor Graphics Corporation Continuous application and decompression of test patterns and selective compaction of test responses
US8914694B2 (en) 2006-02-17 2014-12-16 Mentor Graphics Corporation On-chip comparison and response collection tools and techniques

Also Published As

Publication number Publication date
JPS6128531A (en) 1986-02-08

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