JPH03128660U - - Google Patents
Info
- Publication number
- JPH03128660U JPH03128660U JP3846090U JP3846090U JPH03128660U JP H03128660 U JPH03128660 U JP H03128660U JP 3846090 U JP3846090 U JP 3846090U JP 3846090 U JP3846090 U JP 3846090U JP H03128660 U JPH03128660 U JP H03128660U
- Authority
- JP
- Japan
- Prior art keywords
- quartz plate
- electrode
- stepped portion
- fastener
- counter electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3846090U JPH03128660U (mo) | 1990-04-10 | 1990-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3846090U JPH03128660U (mo) | 1990-04-10 | 1990-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03128660U true JPH03128660U (mo) | 1991-12-25 |
Family
ID=31546488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3846090U Pending JPH03128660U (mo) | 1990-04-10 | 1990-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03128660U (mo) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11194016A (ja) * | 1998-01-05 | 1999-07-21 | Nikon Corp | 表面形状測定方法 |
| JP2011159638A (ja) * | 2011-05-18 | 2011-08-18 | Shimadzu Corp | プラズマ処理装置 |
-
1990
- 1990-04-10 JP JP3846090U patent/JPH03128660U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11194016A (ja) * | 1998-01-05 | 1999-07-21 | Nikon Corp | 表面形状測定方法 |
| JP2011159638A (ja) * | 2011-05-18 | 2011-08-18 | Shimadzu Corp | プラズマ処理装置 |
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