JPH03132005A - Magnetic thin film and magnetic head using this film - Google Patents
Magnetic thin film and magnetic head using this filmInfo
- Publication number
- JPH03132005A JPH03132005A JP26893389A JP26893389A JPH03132005A JP H03132005 A JPH03132005 A JP H03132005A JP 26893389 A JP26893389 A JP 26893389A JP 26893389 A JP26893389 A JP 26893389A JP H03132005 A JPH03132005 A JP H03132005A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- alloy
- film
- coercive force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
本発明は低保磁力、高透磁率、高飽和磁束密度を有する
磁性薄膜に関し、特に磁気ディスク装置、ＶＴＲなどに
用いる磁気ヘッドおよび磁気ヘッドのコア材料に適した
磁性薄膜に関する。The present invention relates to a magnetic thin film having low coercive force, high magnetic permeability, and high saturation magnetic flux density, and particularly to a magnetic thin film suitable for magnetic heads used in magnetic disk drives, VTRs, etc., and as core materials for magnetic heads.
近年、磁気記録技術の発展は著しく、記Ｂ密度の向上が
進められている。記録密度を高くするためには高保磁力
の記録媒体を使用する必要があり。
また高保磁力の記録媒体を磁化するためには、高飽和磁
束密度を有する磁極材料が必要となる。
アール・エム・ボゾルス、フェロマグネテイズム、１９
Ｑページから２０９ページ（Ｒ，Ｍ、Ｂｏｚｏｒｔｈ、
Ｆｅｒｒｏｍａｇｎｅｔｉｓｍ。
ｐｐ１９０−２０９）において論じられているようにＦ
ｅ−Ｃｏ系合金は２．４Ｔ程度の高い飽和磁束密度を有
し、またバルク材料では優れた軟磁気特性を有する。In recent years, magnetic recording technology has made remarkable progress, and recording B density has been improved. In order to increase the recording density, it is necessary to use a recording medium with high coercive force. Furthermore, in order to magnetize a recording medium with a high coercive force, a magnetic pole material having a high saturation magnetic flux density is required. R.M. Bosols, Ferromagnetism, 19
From page Q to page 209 (R, M, Bosorth,
Ferromagnetism. F as discussed in pp 190-209)
The e-Co alloy has a high saturation magnetic flux density of about 2.4 T, and also has excellent soft magnetic properties as a bulk material.
しかし、Ｆｅ−Ｃｏ系合金は薄膜にすると軟磁気特性が
劣化し、磁気ヘッド材料として用いることができないと
いう問題があった。
本発明の目的は、上述のＦｅ−Ｃｏ系合金の薄膜化によ
る軟磁気特性劣化の問題を解消し、低保磁力、高透磁率
ならびに高飽和磁束密度を有する磁性薄膜およびこれを
用いた磁気ヘッドを提供することにある。However, when Fe--Co alloys are made into thin films, their soft magnetic properties deteriorate, resulting in the problem that they cannot be used as magnetic head materials. An object of the present invention is to solve the problem of deterioration of soft magnetic properties due to the thinning of the Fe-Co alloy described above, and to provide a magnetic thin film having low coercive force, high magnetic permeability, and high saturation magnetic flux density, and a magnetic head using the same. Our goal is to provide the following.
本発明者らはＦｅ−Ｃｏ系合金にＣ，Ｂ、Ｎを添加した
磁性薄膜について、鋭意研究を行った結果、上記Ｆｅ−
８〜４０ａｔ％ＣＯ合金薄膜にＣ２Ｂ、Ｈの少なくとも
１種を０．１〜１０ａｔ％（但しＣは０．１〜１６ａ
ｔ％）添加することにより、Ｆｅ−Ｃｏ系合金の軟磁気
特性を向上させることができることを明らかにし、本発
明を完成するに至った。
また上記磁性薄膜にＣｒ、Ｍｏ、Ｗ、Ｖ、Ｎｂ。
Ｔａ、Ｔｉ、Ｚｒ、Ｈｆの少なくとも１種を０゜１〜１
５ａｔ％添加することによりさらに軟磁気特性を向上さ
せることができる。
また上記磁性薄膜に他の組成の層を挿入することにより
さらに軟磁気特性を向上させることができる。
またさらに、本発明の磁性薄膜を磁気ヘッドの磁気回路
の少なくとも一部に用いることにより、優れた記録特性
を有する磁気ヘッドを得ることができる。The present inventors conducted intensive research on magnetic thin films made by adding C, B, and N to Fe-Co alloys, and found that the
0.1 to 10 at% of at least one of C2B and H to the 8 to 40 at% CO alloy thin film (however, C is 0.1 to 16 at%)
It has been revealed that the soft magnetic properties of Fe--Co alloys can be improved by adding t%), and the present invention has been completed. Further, the above magnetic thin film contains Cr, Mo, W, V, and Nb. At least one of Ta, Ti, Zr, and Hf at 0°1 to 1
By adding 5 at%, the soft magnetic properties can be further improved. Further, by inserting a layer of a different composition into the magnetic thin film, the soft magnetic properties can be further improved. Furthermore, by using the magnetic thin film of the present invention in at least a portion of the magnetic circuit of a magnetic head, a magnetic head having excellent recording characteristics can be obtained.
以下に本発明の一実施例を挙げ、図表を参照しながらさ
らに具体的に説明する。
［実施例１］
まず、Ｆｅ−Ｃｏ系合金のＣｏ濃度と飽和磁束密度との
関係について調べた。磁性薄膜の作製にはイオンビーム
・スパッタリング装置を用いた。
スパッタリングは以下の条件で行った。
イオンガス・・・Ａｒ
装置内Ａｒガス圧力・・・２．５Ｘ１００２Ｐａ蒸着用
イオンガン加速電圧・・・１２００Ｖ蒸着用イオンガン
イオン電流・・・１２０ｍＡターゲット基板間距離・・
・１２７ｍｍＦｅ−Ｃｏ系合金のＣｏ濃度と飽和磁束密
度との関係を第４図に示す、同図のようにＦｅにＣＯを
添加すると飽和磁束密度が増加する。Ｃｏ濃度が４０ａ
ｔ％以上になると飽和磁束密度が減少する。Ｃｏが８
〜４０ａｔ％の組成範囲で２．３Ｔ以上の飽和磁束密度
が得られる。従ってＣｏ濃度は８〜４０ａｔ％の範囲と
することが好ましい。
またＣｏ濃度を１２〜３８ａｔ％とすると２．３５Ｔ以
上の飽和磁束密度が得られる。
［実施例２］
実施例１と同様の条件でＦ ｅ −３０ａ ｔ％Ｃ。
合金にＣを添加した合金薄膜を作製した。また磁気特性
を測定する前に磁性膜を５００℃で１時間、熱処理した
。Ｃ濃度と保磁力および比透磁率との関係を第１図に示
す。第１図の保磁力のＣ濃度依存性１１に示すように、
Ｆｅ−３０ａｔ％ＣＯ合金にＣを０．１ａｔ％以上添加
すると保磁力が減少する。Ｃ濃度が９ａｔ％の時に保磁
力は極小となる。Ｃ濃度が１６ａ ｔ％より大きくなる
と、保磁力はＣを添加しないときより大きくなる。従っ
て、Ｃの添加は０．１〜１６ａ ｔ％の範囲が好ましい
。また比透磁率のＣ濃度依存性１２に示すように、比透
磁率の変化は保磁力の変化にほぼ対応している。またＦ
ｅ−８〜４０ａ ｔ％Ｃｏの組成範囲の合金においても
Ｃ添加による保磁力の減少が見られた。
次に、Ｆｅ−３０ａｔ％Ｃｏ合金にＢを添加した合金薄
膜を作製した。Ｂ濃度と保磁力および比透磁率との関係
を第２図に示す。第２図の保磁力のＣ濃度依存性２１に
示すように、Ｆｅ−３０ａｔ％Ｇｏ合金にＢを０．１ａ
ｔ％以上添加すると保磁力が減少する。Ｂ濃度が５．！
５ａｔ％の時に保磁力は極小となる。Ｂ濃度が１０ａｔ
％より大きくなると、保磁力はＢを添加しないときより
大きくなる。従って、Ｂの添加は０．１〜１０ａｔ％の
範囲が好ましい。また比透磁率のＢ濃度依存性２２に示
すように、比透磁率の変化は保磁力の変化にほぼ対応し
ている。またＦｅ−８〜４０ａｔ％Ｃｏの組成範囲の合
金においてもＢ添加による保磁力の減少が見られた。
次に、Ｆｅ−３０ａｔ％Ｃｏ合金にＮを添加した合金薄
膜を作製した。Ｎ１度と保磁力および比透磁率との関係
を第３図に示す。第３図の保磁力のＮ濃度依存性３１に
示すように、Ｆｅ−３０ａｔ％Ｃｏ合金にＮをＱ、ｌａ
ｔ％以上添加すると保磁力が減少する。Ｎ濃度が５．２
ａｔ％の時に保磁力は極小となる。Ｎ濃度が１０ａｔ％
より大きくなると、保磁力はＮを添加しないときとほぼ
同等となる。従って、Ｎの添加は０．１〜１０ａむ％の
範囲が好ましい。また比透磁率のＮａ変度依存３２に示
すように、比透磁率の変化は保磁力の変化にほぼ対応し
ている。またＦｅ−８〜４０ａｔ％Ｃｏの組成範囲の合
金においてもＮ添加による保磁力の減少が見られた。
また、Ｆｅ−３０ａｔ％Ｃｏ合金にＣ，Ｂ、Ｎの中の２
種類以上を添加したときにも軟磁気特性が向上する。こ
の時も、これらの元素の添加量の合計は０．１〜１０ａ
ｔ％の範囲が好ましい。またＦｅ−８〜４０ａｔ％Ｃ
ｏの組成範囲の合金においてもＣ，Ｂ、Ｎ添加による保
磁力の減少が見られた。
［実施例３］
実施例１と同様の条件で、多Ｍ磁性７；！を膜を形成し
た。
多層磁性薄膜の断面図を第５図に示す。本実施例では、
主磁性層５１として膜厚４５０人のＦｅ−２７ａｔ％Ｃ
ｏ −９ａ ｔ％Ｃ合金薄膜、中間層５２として膜厚５
ｏ人の各種材料、基板５３としてコーニング社製７０５
９ガラス基板を用いた。多Ｎ磁性薄膜全体の膜厚は５０
００人とし、主磁性層５１の暦数は１０層である。なお
、磁気特性を測定する前に磁性膜を５００°Ｃで１時間
、熱処理した。中間層材料と磁性薄膜の保磁力との関係
を第１表に示す。
第１表に示すごとく、Ｆｅ−Ｃｏ−Ｃ系合金に他の組成
の中間層を挿入すると保磁力が減少する。
しかし、同表のように、中間層として５ｉｎ２、Ａｌ２
Ｏ，を用いた多層磁性薄膜はほかの多層磁性薄膜よりも
保磁力が大きい。これはＳ ｉ Ｏ，、Ａｌ２Ｏ、等の
酸化物が多孔質であり、そのためこれらの直上に蒸着し
た磁性層も空孔等の欠陥を多く含むためと考えられる。
従って、中間層材料としては、金属およびＢ、Ｃ，Ｓｉ
、ＢＮ、Ｂ、Ｃ。
ＳｉＣ等の半金属が好ましい。また、多層化による飽和
磁束密度の低下を防ぐ観点からは、磁性中間層を用いる
ことが好ましい。
第１表
また、Ｆｅ−Ｇｏ−Ｂ、Ｆｅ−Ｃｏ−Ｎ系合金およびＦ
ｅ−ＧｏにＣ，Ｂ、Ｈの中の２種類以上を添加した合金
を多層化しても保磁力が減少する。
［実施例４コ
実施例１と同様の条件でＦｅ−２７ａｔ％Ｃ。
−９ａｔ％Ｃ合金にＴａを添加した合金薄膜を形成した
。第６図の保磁力のＴａ添加量依存性５５に示すように
、Ｔａを０．１ａｔ％以上添加すると保磁力が減少する
。Ｔａ添加量が１５ａｔ％より多くなると、Ｔａを添加
しない場合よりも保磁力が大きくなる。また比透磁率の
Ｔａ添加量依存性５６に示すように、比透磁率の変化は
保磁力の変化に対応している。以上の結果からＦｅ−Ｃ
。
−Ｃ系合金に対するＴａの添加量はＱ、ｌａｔ％から１
５ａｔ％が好ましい。
またＦｅ−２７ａｔ％Ｃｏ−９ａｔ％Ｃ合金にＣｒ、Ｍ
ｏ、Ｗ、Ｖ、Ｎｂ、Ｔａ、Ｔｉ、Ｚｒ。
Ｈｆを８．５ａｔ％添加した時の保磁力の値を第２表に
示す。
第２表に示すように、Ｆｅ−Ｃｏ７Ｃ系合金にＣｒ、Ｍ
ａｔ Ｗ、Ｖ、Ｎｂ、Ｔａ、Ｔｉ、Ｚｒ。
Ｈｆを添加すると保磁力が減少する。
また上記元素の添加量はＱ、１ａｔ％から１５ａｔ％が
好ましい。また上記元素を２種類以上添加しても良い。
また上記元素の添加による保磁力の減少はＦ ｅ −Ｃ
ｏ −Ｂ系合金およびＦｅ−Ｃ。
−Ｎ系合金においても見られた。
第２表
［実施例５］
本発明のＦｅ−２７ａｔ％Ｃｏ−９ａｔ％Ｃ／Ｎ１多層
膜（主磁性層４５０人、Ｎｉ中間Ｎ５０人、積層周期５
００人、総膜厚約２０００人）ないし従来の実用材料で
あるパーマロイ（Ｎｉ−２０ａｔ％Ｆｅ）合金薄膜（膜
厚２０００人）を用い第７図に示すような垂直磁気記録
用単磁極型磁気ヘッド７１を作製した。垂直磁気記録用
単磁極型磁気ヘッド７１の作製工程を以下に述べる。
第７図（ａ）に示すＭ ｎ −Ｚ ｎフェライト６１お
よび高融点ガラス６２からなる基板６３を用い、その表
面に第７図（ｂ）に示すように上記磁性薄膜６４をイオ
ンビームスパッタリング法で形成した。さらにその上に
接着用ガラス膜をイオンビームスパッタリング法により
形成し、第７図（ａ）に示す基板６３を重ねあわせて４
５０℃で３０分間加熱し、上記ガラス膜を溶融固着させ
、第７図（Ｃ）に示す主磁極ブロック６５を作製した。
そして第７図（ｄ）に示すＭ ｎ −Ｚ ｎフェライト
６６および高融点ガラス６７からなる補助コアブロック
６８を用意し、接合面７ｏに上記と同様の接着用ガラス
膜を形成した後、主磁極ブロック６５を補助コアブロッ
ク６８の接合面によって挾み、４５０℃で３０分間加熱
することにより、上記ガラス膜を溶融固着させて接合ブ
ロック６９を作製した。次に第７図（ｄ）に示す二点鎖
線部を切断し、第７図（ｅ）に示す垂直磁気記録用単磁
極型磁気ヘッド７１を得た。
上述の工程によって作製した磁気ヘッドの記録特性をＣ
ｏ−Ｃｒ垂直磁気記録媒体を用いて謂定した。再生ヘッ
ドとしてはフェライトヘッドを用いた。その結果、本発
明の多層磁性薄膜を用いた磁気ヘッドは、パーマロイ合
金を用いた磁気ヘッドと比較して、約６ｄＢ高い出力を
示した。これは本発明の多層磁性薄膜がパーマロイ合金
の飽和磁束密度の約２倍の飽和磁束密度を有するためと
考えられる。An example of the present invention will be described below in more detail with reference to figures and tables. [Example 1] First, the relationship between the Co concentration and the saturation magnetic flux density of the Fe--Co alloy was investigated. An ion beam sputtering device was used to fabricate the magnetic thin film. Sputtering was performed under the following conditions. Ion gas...Ar Ar gas pressure in the device...2.5X1002Pa Ion gun acceleration voltage for deposition...1200V Ion gun ion current for deposition...120mA Distance between target substrates...
- The relationship between Co concentration and saturation magnetic flux density of 127 mm Fe-Co alloy is shown in Fig. 4. As shown in the figure, when CO is added to Fe, the saturation magnetic flux density increases. Co concentration is 40a
When it exceeds t%, the saturation magnetic flux density decreases. Co is 8
A saturation magnetic flux density of 2.3 T or more can be obtained in a composition range of ~40 at%. Therefore, the Co concentration is preferably in the range of 8 to 40 at%. Further, when the Co concentration is 12 to 38 at%, a saturation magnetic flux density of 2.35 T or more can be obtained. [Example 2] Fe-30at%C under the same conditions as Example 1. An alloy thin film was prepared by adding C to the alloy. Furthermore, before measuring the magnetic properties, the magnetic film was heat treated at 500° C. for 1 hour. FIG. 1 shows the relationship between C concentration, coercive force, and relative permeability. As shown in C concentration dependence of coercive force 11 in Fig. 1,
When 0.1 at% or more of C is added to the Fe-30 at% CO alloy, the coercive force decreases. The coercive force becomes minimum when the C concentration is 9 at%. When the C concentration is greater than 16at%, the coercive force becomes larger than when no C is added. Therefore, the addition of C is preferably in the range of 0.1 to 16 at%. Further, as shown in C concentration dependence of relative magnetic permeability 12, changes in relative magnetic permeability approximately correspond to changes in coercive force. Also F
A decrease in coercive force due to the addition of C was also observed in alloys with a composition range of e-8 to 40at%Co. Next, an alloy thin film was prepared by adding B to the Fe-30at%Co alloy. FIG. 2 shows the relationship between B concentration, coercive force, and relative permeability. As shown in C concentration dependence of coercive force 21 in Figure 2, 0.1a of B was added to Fe-30at%Go alloy.
If more than t% is added, the coercive force decreases. B concentration is 5. !
The coercive force becomes minimum at 5 at%. B concentration is 10at
%, the coercive force becomes larger than when B is not added. Therefore, the addition of B is preferably in the range of 0.1 to 10 at%. Further, as shown in B concentration dependence of relative magnetic permeability 22, changes in relative magnetic permeability approximately correspond to changes in coercive force. Further, a decrease in coercive force due to the addition of B was also observed in alloys with a composition range of Fe-8 to 40 at% Co. Next, an alloy thin film was prepared by adding N to the Fe-30at%Co alloy. FIG. 3 shows the relationship between N1 degrees, coercive force, and relative permeability. As shown in N concentration dependence of coercive force 31 in Figure 3, N was added to the Fe-30at%Co alloy at Q, la
If more than t% is added, the coercive force decreases. N concentration is 5.2
At %, the coercive force becomes minimum. N concentration is 10at%
When the coercive force becomes larger, the coercive force becomes almost the same as when no N is added. Therefore, the addition of N is preferably in the range of 0.1 to 10%. Further, as shown in the dependence of relative magnetic permeability on Na variation 32, the change in relative magnetic permeability almost corresponds to the change in coercive force. Further, a decrease in coercive force due to N addition was also observed in alloys with a composition range of Fe-8 to 40 at% Co. In addition, two of C, B, and N are added to the Fe-30at%Co alloy.
Soft magnetic properties are also improved when more than one type is added. At this time, the total addition amount of these elements is 0.1 to 10a.
A range of t% is preferred. Also Fe-8~40at%C
A decrease in coercive force due to the addition of C, B, and N was also observed in alloys with a composition range of 0. [Example 3] Under the same conditions as Example 1, multi-M magnetic 7;! A film was formed. A cross-sectional view of the multilayer magnetic thin film is shown in FIG. In this example,
Fe-27at%C with a film thickness of 450 mm as the main magnetic layer 51
o -9a t%C alloy thin film, film thickness 5 as intermediate layer 52
o Various materials, 705 manufactured by Corning Corporation as the substrate 53
No. 9 glass substrate was used. The total thickness of the multi-N magnetic thin film is 50
00 people, and the calendar number of the main magnetic layer 51 is 10 layers. Note that before measuring the magnetic properties, the magnetic film was heat-treated at 500°C for 1 hour. Table 1 shows the relationship between the intermediate layer material and the coercive force of the magnetic thin film. As shown in Table 1, when an intermediate layer of a different composition is inserted into the Fe--Co--C alloy, the coercive force decreases. However, as shown in the same table, the middle layer is 5in2, Al2
A multilayer magnetic thin film using O, has a larger coercive force than other multilayer magnetic thin films. This is thought to be because oxides such as SiO, Al2O, etc. are porous, and therefore the magnetic layer deposited directly on them also contains many defects such as vacancies. Therefore, intermediate layer materials include metals, B, C, and Si.
,BN,B,C. A metalloid such as SiC is preferred. Further, from the viewpoint of preventing a decrease in saturation magnetic flux density due to multilayering, it is preferable to use a magnetic intermediate layer. Table 1 also shows Fe-Go-B, Fe-Co-N alloys and F
Even if an alloy in which two or more of C, B, and H are added to e-Go is multilayered, the coercive force decreases. [Example 4] Fe-27at%C under the same conditions as Example 1. An alloy thin film was formed by adding Ta to a -9 at% C alloy. As shown in the dependence of coercive force on Ta addition amount 55 in FIG. 6, when 0.1 at% or more of Ta is added, the coercive force decreases. When the amount of Ta added exceeds 15 at %, the coercive force becomes larger than when no Ta is added. Further, as shown in Ta addition amount dependence of relative magnetic permeability 56, changes in relative magnetic permeability correspond to changes in coercive force. From the above results, Fe-C
. -The amount of Ta added to the C-based alloy is Q, lat% to 1
5 at% is preferable. In addition, Fe-27at%Co-9at%C alloy has Cr, M
o, W, V, Nb, Ta, Ti, Zr. Table 2 shows the coercive force values when 8.5 at% of Hf was added. As shown in Table 2, Cr, M
at W, V, Nb, Ta, Ti, Zr. Adding Hf reduces coercive force. Further, the amount of the above element added is preferably Q, from 1 at% to 15 at%. Moreover, two or more types of the above elements may be added. In addition, the decrease in coercive force due to the addition of the above elements is F e -C
o -B alloy and Fe-C. -It was also observed in N-based alloys. Table 2 [Example 5] Fe-27at%Co-9at%C/N1 multilayer film of the present invention (main magnetic layer 450 layers, Ni middle layer N50 layers, lamination period 5
A single-pole magnet for perpendicular magnetic recording as shown in Fig. 7 is produced using a permalloy (Ni-20at%Fe) alloy thin film (film thickness of 2000 mm), which is a conventional practical material. A head 71 was produced. The manufacturing process of the single-pole magnetic head 71 for perpendicular magnetic recording will be described below. A substrate 63 made of Mn-Zn ferrite 61 and high melting point glass 62 shown in FIG. 7(a) is used, and the magnetic thin film 64 is formed on the surface thereof by ion beam sputtering as shown in FIG. 7(b). Formed. Furthermore, an adhesive glass film is formed thereon by ion beam sputtering, and a substrate 63 shown in FIG.
The glass film was heated at 50° C. for 30 minutes to melt and fix the glass film, thereby producing the main pole block 65 shown in FIG. 7(C). Then, an auxiliary core block 68 made of Mn-Zn ferrite 66 and high melting point glass 67 as shown in FIG. The block 65 was sandwiched between the joint surfaces of the auxiliary core block 68 and heated at 450° C. for 30 minutes to melt and fix the glass film, thereby producing a joint block 69. Next, it was cut along the two-dot chain line shown in FIG. 7(d) to obtain a single-pole type magnetic head 71 for perpendicular magnetic recording shown in FIG. 7(e). The recording characteristics of the magnetic head manufactured by the above process are C.
This was determined using an o-Cr perpendicular magnetic recording medium. A ferrite head was used as the reproducing head. As a result, the magnetic head using the multilayer magnetic thin film of the present invention exhibited approximately 6 dB higher output than the magnetic head using the permalloy alloy. This is considered to be because the multilayer magnetic thin film of the present invention has a saturation magnetic flux density approximately twice that of the permalloy alloy.
以上詳細に説明したごとく、Ｆｅ−８〜４０ａｔ％Ｃｏ
合金薄膜にＣ，Ｂ、Ｎの少なくとも１種を０．１〜１０
ａｔ％（但しＣは０．１〜ｂ七％）添加することにより
、Ｆｅ−Ｃｏ系合金の軟磁気特性を向上させることがで
きる。
また上記磁性薄膜にＣｒ、Ｍｏ、Ｗ、Ｖ、Ｎｂ。
Ｔａ、Ｔｉ、Ｚｒ、Ｈｆの少なくとも１種を０゜１〜１
５ａｔ％添加することによりさらに軟磁気特性を向上さ
せることができる。
また上記磁性薄膜に他の組成の層を挿入することにより
さらに軟磁気特性を向上させることができる。
またさらに、本発明の磁性薄膜を磁気ヘッドの磁気回路
の少なくとも一部に用いることにより、優れた記録特性
を有する磁気ヘッドを得ることができる。As explained in detail above, Fe-8~40at%Co
0.1 to 10 of at least one of C, B, and N to the alloy thin film
By adding at% (C is 0.1 to 7%), the soft magnetic properties of the Fe-Co alloy can be improved. Further, the above magnetic thin film contains Cr, Mo, W, V, and Nb. At least one of Ta, Ti, Zr, and Hf at 0°1 to 1
By adding 5 at%, the soft magnetic properties can be further improved. Further, by inserting a layer of a different composition into the magnetic thin film, the soft magnetic properties can be further improved. Furthermore, by using the magnetic thin film of the present invention in at least a portion of the magnetic circuit of a magnetic head, a magnetic head having excellent recording characteristics can be obtained.
第１図はＦｅ−Ｃｏ系合金の軟磁気特性に与えるＣ濃度
の効果を示すグラフ、第２図はＦｅ−Ｃ０系合金の軟磁
気特性に与えるＢ′ａ度の効果を示すグラフ、第３図は
Ｆｅ−Ｃｏ系合金の軟磁気特性に与えるＮ濃度の効果を
示すグラフ、第４図はＦｅ−Ｃｏ系合金の飽和磁束密度
のＣｏ濃度依存性を示すグラフ、第５図は多層磁性薄膜
の断面図、第６図は本発明のＦｅ−Ｃｏ−Ｃ系合金の軟
磁気特性に与えるＴａ添加の効果を示すグラフ、第７図
は本発明の磁性薄膜を用いた垂直磁気記録用単磁極型磁
気ヘッドの作製工程を示す斜視図である。
符号の説明
５１・・・主磁性層、５２・・・中間層、５３・・・基
板、６１ 、６６− Ｍ ｎ −Ｚ ｎフェライト、６
２．６７−・・高融点ガラス、６３・・・基板、６４・
・・磁性薄膜、６５・・・主磁極ブロック、６８・・・
補助コアブロック。
６９・・・接合ブロック、７０・・・接合面、７１・・
・垂直磁気記録用単磁極型磁気ヘッド
后
喝
Ｃ濃度
（ａｔ’１０）
第
回
８凍度（（２を給）
２１保不′ム刀／ＩＢ濠崖イＦ＜ ６□ｒ’！−２２’
Ｅ’Ｆ＝二ミ’ｌ、、ｓ七ど）ミ？“ｄワ Ｆ）／１７
￥イ鵡・１生拓
目
Ｎ４崖（αｔ％）
第
４
図
Ｃσ儂崖（ａ−ｔカ
猶
３
差１反
）Ｊ−
力
図
５
５ΔFigure 1 is a graph showing the effect of C concentration on the soft magnetic properties of Fe-Co alloys, Figure 2 is a graph showing the effect of B'a degree on the soft magnetic properties of Fe-Co alloys, and Figure 3 is a graph showing the effect of B'a degree on the soft magnetic properties of Fe-Co alloys. The figure is a graph showing the effect of N concentration on the soft magnetic properties of Fe-Co alloys, Figure 4 is a graph showing the Co concentration dependence of the saturation magnetic flux density of Fe-Co alloys, and Figure 5 is a multilayer magnetic thin film. FIG. 6 is a graph showing the effect of Ta addition on the soft magnetic properties of the Fe-Co-C alloy of the present invention, and FIG. 7 is a single magnetic pole for perpendicular magnetic recording using the magnetic thin film of the present invention. FIG. 3 is a perspective view showing a manufacturing process of a molded magnetic head. Explanation of symbols 51...Main magnetic layer, 52...Intermediate layer, 53...Substrate, 61, 66-Mn-Zn ferrite, 6
2.67-...High melting point glass, 63...Substrate, 64...
...Magnetic thin film, 65...Main magnetic pole block, 68...
Auxiliary core block. 69...Joint block, 70...Joint surface, 71...
・Single-pole type magnetic head for perpendicular magnetic recording C concentration (at'10) 8th freezing degree ((provided with 2) '
E'F=2mi'l,,s7do)mi? “dwa F)/17
￥I Parrot・1 Raw Takume N4 Cliff (αt%) Fig. 4 Cσ儂 Cliff (a-t kay 3 difference 1 counter) J- force diagram 5 5Δ
Claims (4)
少なくとも１種を０．１〜１０ａｔ％（但しＣは０．１
〜１６ａｔ％）添加したことを特徴とする磁性薄膜。1. At least one of C, B, and N is added to the Fe-8 to 40 at% Co alloy thin film at 0.1 to 10 at% (however, C is 0.1 at%).
~16at%) is added.
ｏ，Ｗ，Ｖ，Ｎｂ，Ｔａ，Ｔｉ，Ｚｒ，Ｈｆの少なくと
も１種を０．１〜１５ａｔ％添加したことを特徴とする
磁性薄膜，2. The magnetic thin film according to claim 1 contains Cr, M.
A magnetic thin film characterized in that 0.1 to 15 at% of at least one of o, W, V, Nb, Ta, Ti, Zr, and Hf is added.
膜に他の組成の層を挿入したことを特徴とする磁性薄膜
。3. A magnetic thin film characterized in that a layer having a different composition is inserted into the magnetic thin film according to claims 1 or 2.
を磁気回路の少なくとも一部に用いた磁気ヘッド。4. A magnetic head using the magnetic thin film according to claims 1 to 3 in at least a part of a magnetic circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26893389A JPH03132005A (en) | 1989-10-18 | 1989-10-18 | Magnetic thin film and magnetic head using this film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26893389A JPH03132005A (en) | 1989-10-18 | 1989-10-18 | Magnetic thin film and magnetic head using this film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03132005A true JPH03132005A (en) | 1991-06-05 |
Family
ID=17465302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26893389A Pending JPH03132005A (en) | 1989-10-18 | 1989-10-18 | Magnetic thin film and magnetic head using this film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03132005A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0529143A (en) * | 1990-07-27 | 1993-02-05 | Fuji Photo Film Co Ltd | Soft magnetic thin film |
| US6132892A (en) * | 1997-09-17 | 2000-10-17 | Kabushiki Kaisha Toshiba | Soft magnetic alloy film and manufacturing method thereof, and magnetic head incorporating the same |
| US7532433B2 (en) | 2003-01-22 | 2009-05-12 | Hitachi Global Storage Technologies Japa | Thin film perpendicular magnetic recording head, their fabrication process and magnetic disk drive using it |
-
1989
- 1989-10-18 JP JP26893389A patent/JPH03132005A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0529143A (en) * | 1990-07-27 | 1993-02-05 | Fuji Photo Film Co Ltd | Soft magnetic thin film |
| US6132892A (en) * | 1997-09-17 | 2000-10-17 | Kabushiki Kaisha Toshiba | Soft magnetic alloy film and manufacturing method thereof, and magnetic head incorporating the same |
| US7532433B2 (en) | 2003-01-22 | 2009-05-12 | Hitachi Global Storage Technologies Japa | Thin film perpendicular magnetic recording head, their fabrication process and magnetic disk drive using it |
| US7813079B2 (en) | 2003-01-22 | 2010-10-12 | Hitachi Global Storage Technologies Japan, Ltd. | Thin film perpendicular magnetic recording head, their fabrication process and magnetic disk drive using it |
| US8085499B2 (en) | 2003-01-22 | 2011-12-27 | Hitachi Global Storage Technologies Japan, Ltd. | Thin film perpendicular magnetic recording head, their fabrication process and magnetic disk drive using it |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2006101072A1 (en) | Perpendicular magnetic recording disk and process for producing the same | |
| JP2001101645A (en) | High density information recording medium and method of manufacturing the medium | |
| US5663857A (en) | Magnetic head | |
| JP2780588B2 (en) | Stacked magnetic head core | |
| JP2539349B2 (en) | Perpendicular magnetic recording media | |
| JPS6129105A (en) | Magnetic alloy thin film | |
| JP3127075B2 (en) | Soft magnetic alloy film, magnetic head, and method of adjusting thermal expansion coefficient of soft magnetic alloy film | |
| JPS63254709A (en) | Laminated magnetic thin film and magnetic head using the same | |
| JPS63293802A (en) | Laminated magnetic thin film and magnetic head using the same | |
| JPH01217723A (en) | Magnetic recording medium | |
| JP2551008B2 (en) | Soft magnetic thin film | |
| JPH0376102A (en) | Multilayer magnetic thin film and magnetic head using the same | |
| JPH01125909A (en) | Laminated magnetic thin film and magnetic head using the same | |
| JP3194578B2 (en) | Multilayer ferromagnetic material | |
| JPH04359501A (en) | Multilayer ferromagnetic substance | |
| JPH05226151A (en) | Soft magnetic alloy film to be used for magnetic head and having high saturation flux density and high heat resistance and magnetic head | |
| JPH04362160A (en) | Ferromagnetic material | |
| JPS6255911A (en) | Soft-magnetic thin film | |
| JPH03112105A (en) | Laminated magnetic thin film and magnetic head | |
| JPH03263307A (en) | Laminated layer soft magnetic thin film | |
| JPH01243404A (en) | Laminated magnetic thin film and magnetic head using the same | |
| JPH0765316A (en) | Magnetic head | |
| JPH08167110A (en) | Magnetic head and method of manufacturing magnetic head | |
| JPS6120208A (en) | Magnetic head | |
| JPH02179909A (en) | Magnetic material film for magnetic head |