JPH03155687A - Semiconductor laser excited solid state laser - Google Patents

Semiconductor laser excited solid state laser

Info

Publication number
JPH03155687A
JPH03155687A JP1295874A JP29587489A JPH03155687A JP H03155687 A JPH03155687 A JP H03155687A JP 1295874 A JP1295874 A JP 1295874A JP 29587489 A JP29587489 A JP 29587489A JP H03155687 A JPH03155687 A JP H03155687A
Authority
JP
Japan
Prior art keywords
laser
semiconductor laser
solid
semiconductor
state laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1295874A
Other languages
Japanese (ja)
Inventor
Hideo Nagai
秀男 永井
Masahiro Kume
雅博 粂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1295874A priority Critical patent/JPH03155687A/en
Publication of JPH03155687A publication Critical patent/JPH03155687A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109Frequency multiplication, e.g. harmonic generation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Lasers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は光ディスクの記録再生やレーザ応用計測等に用
いられる超小型の半導体レーザ励起固体レーザ装置に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an ultra-small semiconductor laser-excited solid-state laser device used for recording and reproducing optical discs, laser applied measurement, and the like.

従来の技術 固体レーザ装置の励起には、従来、アークランプやフラ
ッシュランプ等が用いられてきたが、励起効率が良くな
いためにレーザ全体の効率は悪(、ランプやレーザ媒質
の放熱の点から、装置は大型とならざるを得なかった。
Conventional technology Conventionally, arc lamps, flash lamps, etc. have been used to excite solid-state laser devices, but due to poor excitation efficiency, the overall efficiency of the laser is poor (in terms of heat dissipation of the lamp and laser medium). However, the equipment had to be large.

ところが近年、半導体レーザの高出力化に伴いこれを固
体レーザの励起源として用いる試みがなされるようにな
ってきた。半導体1)−ザを用いると、固体レーザの吸
収帯に波長を合わせることができ、励起効率は非常に良
(なる。しかも余分なスペクトルの吸収による発熱がな
いために放熱も楽になり、小型で高効率の固体レーザが
実現できる。
However, in recent years, with the increase in the output power of semiconductor lasers, attempts have been made to use them as an excitation source for solid-state lasers. By using a semiconductor 1) laser, the wavelength can be matched to the absorption band of a solid-state laser, and the pumping efficiency is very good.Moreover, there is no heat generation due to absorption of excess spectrum, so heat dissipation is easy, and it is small and compact. A highly efficient solid-state laser can be realized.

一方KT i 0PO4(KTP)結晶などの非線形光
学結晶を用いて固体レーザ光を高調波に変換して、緑色
や青色の可視光を得る方法も従来がら知られており、先
述の半導体レーザ励起による固体レーザ光の高調波を利
用する試みもなされるようになってきた。
On the other hand, it has long been known to convert solid-state laser light into harmonics using a nonlinear optical crystal such as a KT i 0PO4 (KTP) crystal to obtain green or blue visible light. Attempts have also been made to utilize harmonics of solid-state laser light.

第4図に従来の半導体レーザ励起Nd : YAGレー
ザの構成図を示す。同一パッケージ内にNd:YAGロ
ッド、KTP結晶2.セルフォックレンズ4.半導体レ
ーザチップ5が収められている。
FIG. 4 shows a configuration diagram of a conventional semiconductor laser pumped Nd:YAG laser. Nd:YAG rod, KTP crystal 2. in the same package. SELFOC lens 4. A semiconductor laser chip 5 is housed therein.

YAGレーザの共振器はYGAロッド1の励起側面図1
−AとKTP結晶2の出射側端面2−Bのあいだで形成
されており、この共振器内にKTP結晶2が挿入された
形になっている。半導体レーザ光はセルフォックレンズ
4でYAGロッドの端面上に集光され、YAGロッド1
を軸方向から励起している。
The resonator of the YAG laser is the excitation side view of the YGA rod 1.
-A and the output side end face 2-B of the KTP crystal 2, and the KTP crystal 2 is inserted into this resonator. The semiconductor laser beam is focused onto the end face of the YAG rod by the SELFOC lens 4, and the YAG rod 1
is excited from the axial direction.

発明が解決しようとする課題 第2図に示すような、基本波の共振器内に非線形光学結
晶を挿入して第2高調波に変換する方式では、共振器内
にい(つかの基本波の軸モードが存在し、その和周波が
非線形光学結晶内で生じるため、第2高調波が強く変調
されてノイズの原因となっていた。特に光ディスクにこ
の第2高調波を利用する際に大きな問題となっている。
Problems to be Solved by the Invention In the method shown in Figure 2, in which a nonlinear optical crystal is inserted into a resonator for the fundamental wave to convert it into a second harmonic, Since there is an axial mode and its sum frequency is generated within the nonlinear optical crystal, the second harmonic is strongly modulated and causes noise.This is a big problem especially when using this second harmonic for optical discs. It becomes.

課題を解決するための手段 和周波による第2高調波のノイズを低減するために、本
発明の半導体レーザ励起固体レーザ装置は、KTP結晶
、λ/4板(λ−1.064μm)、Nd : YAG
ロッド、セルフォックレンズ、半導体レーザチップの順
に同一パッケージ内に収められて構成されている。
Means for Solving the Problems In order to reduce the noise of the second harmonic due to the sum frequency, the semiconductor laser pumped solid-state laser device of the present invention includes a KTP crystal, a λ/4 plate (λ-1.064 μm), a Nd: YAG
The rod, SELFOC lens, and semiconductor laser chip are housed in the same package in this order.

作用 以上の構成により、一体化された超小型の低ノイズ緑色
レーザが実現できる。
Function The above configuration makes it possible to realize an integrated, ultra-compact, low-noise green laser.

実施例 以下、本発明の一実施例について、図面を引き用しなが
ら説明する。第1図に本発明の半導体レーザ励起固体レ
ーザ装置の構造図を示す。同一パッケージ内にKTP結
晶2.λ/4板3くλ1.064μm)、Nd : Y
AGロッド1.セルフォックレンズ4.半導体レーザチ
ップ5の順に収められている。YAGロッド1はNd濃
度131%2直径3鴫、長さ5鴫である。λ/4板3は
幅3×3鴫、長さ5嘘、KTP結晶2は幅3×3閣。
EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings. FIG. 1 shows a structural diagram of a semiconductor laser pumped solid-state laser device of the present invention. KTP crystal 2. in the same package. λ/4 plate 3 × λ1.064 μm), Nd: Y
AG rod 1. SELFOC lens 4. The semiconductor laser chips 5 are housed in this order. The YAG rod 1 has a Nd concentration of 131%, a diameter of 3 mm, and a length of 5 mm. λ/4 plate 3 has a width of 3 x 3 and a length of 5. KTP crystal 2 has a width of 3 x 3.

長さ5mである。共振器はYAGロッド1の励起側端面
1−AとKTP結晶2の出射側端面2−Bのあいだで形
成されており、前者は曲率半径60曜の凸面ミラー、後
者は平面ミラーになっている。KTP結晶2がNd :
 YAGレーザの共振器内に挿入された構造になってお
り、しかもビームウェストがKTP結晶2内にあるので
、効率よく高調波への変換がおこなわれる。YAGロッ
ド1、λ/4板3.KTP結晶2の各面での各波長に対
する反射膜コーティングは表1に示す通りである。
It is 5m long. The resonator is formed between the excitation side end face 1-A of the YAG rod 1 and the output side end face 2-B of the KTP crystal 2, the former being a convex mirror with a radius of curvature of 60 days, and the latter being a flat mirror. . KTP crystal 2 is Nd:
Since the structure is such that it is inserted into the resonator of the YAG laser, and the beam waist is within the KTP crystal 2, conversion to harmonics is performed efficiently. YAG rod 1, λ/4 plate 3. The reflective film coating for each wavelength on each side of the KTP crystal 2 is as shown in Table 1.

表  1 また励起用に波長0.809μmの半導体レーザチップ
4を用い、セルフォックレンズ4で集光してYAGロッ
ド1を軸励起している。
Table 1 Furthermore, a semiconductor laser chip 4 with a wavelength of 0.809 μm is used for excitation, and the YAG rod 1 is axially excited by condensing the light with a SELFOC lens 4.

KTP結晶2はTYPEHの位相整合を用いており、λ
/4板3の軸方向はKTP結晶2の常波及び異常波の方
向と45度の角をなしている。第2図にλ/4板3を挿
入したときく第2図(a)〉としないとき(第2図(b
))の高調波0.53μmのパワー変化をトレースした
図を示す。この図かられかるように、λ/4板を挿入す
ることによりノイズが減少して高調波0.53μmの出
力が安定することがわかる。第3図にλ/4板を挿入し
たときの入出力特性を示す。半導体レーザの駆動電流が
400mAのとき16mWの高調波0.53μmの出力
を得た。
KTP crystal 2 uses TYPEH phase matching, and λ
The axial direction of the /4 plate 3 forms an angle of 45 degrees with the direction of ordinary waves and extraordinary waves of the KTP crystal 2. When the λ/4 plate 3 is inserted in Fig. 2 (Fig. 2 (a)) and when not (Fig. 2 (b)
)) shows a diagram tracing the power change of harmonic 0.53 μm. As can be seen from this figure, inserting the λ/4 plate reduces noise and stabilizes the output of harmonics of 0.53 μm. Figure 3 shows the input/output characteristics when a λ/4 plate is inserted. When the driving current of the semiconductor laser was 400 mA, an output of 16 mW and harmonics of 0.53 μm was obtained.

発明の効果 本発明の半導体レーザ励起固体1ノ−ザ装置は、低ノイ
ズ出力の超小型固体レーザ高調波レーザであり、光ディ
スクの記録再生、1ノ−ザプリンタ。
ADVANTAGEOUS EFFECTS OF THE INVENTION The semiconductor laser-excited solid-state one-noser device of the present invention is an ultra-compact solid-state laser harmonic laser with low noise output, and can be used for recording and reproducing optical discs and one-noser printer.

レーザ応用計測等に大きな効果を有する。It has a great effect on laser applied measurements, etc.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図に本発明の半導体レーザ励起固体レーザ装置の構
造図、第2図(a) 、 (b)は本発明のレーザ装置
の出力の時間痩化および従来構造のレーザ装置の出力の
時間変化をそれぞれ示す図、第3図は本発明の駆動電流
に対する高調波0.53μmの出力を示す図、第4図は
従来の半導体レーザ励起固体レーザ装置の構造図である
。 1・・・・・・Nd : YAGロッド、2・・・・・
・KTP結晶、3・・・・・・λ/4板、4・・・・・
・セルフオンレンズ、5・・・・・・半導体装直胴レー
ザチップ、6・・・・・・PINフォトダイオード、7
・・・・・・ベース。
Fig. 1 is a structural diagram of the semiconductor laser pumped solid-state laser device of the present invention, and Fig. 2 (a) and (b) show the time reduction of the output of the laser device of the present invention and the time change of the output of the laser device of the conventional structure. FIG. 3 is a diagram showing the harmonic output of 0.53 μm with respect to the drive current of the present invention, and FIG. 4 is a structural diagram of a conventional semiconductor laser pumped solid-state laser device. 1...Nd: YAG rod, 2...
・KTP crystal, 3...λ/4 plate, 4...
・Self-on lens, 5... Semiconductor packaged laser chip, 6... PIN photodiode, 7
······base.

Claims (1)

【特許請求の範囲】[Claims] 同一パッケージ内に非線形光学結晶、λ/4板、固体レ
ーザ媒質、レンズ、半導体レーザチップが順に収められ
ており、前記固体レーザ媒質の前記半導体レーザチップ
に近い方の端面と、前記非線形光学結晶の前記半導体レ
ーザチップに遠い方の端面とで光共振器を形成しており
、前記λ/4板と前記非線形光学結晶が前記共振器内に
挿入された形になっており、前記レンズで半導体レーザ
光を集光して前記固体レーザ媒質を軸方向に端面励起す
ることを特徴とする半導体レーザ励起固体レーザ装置。
A nonlinear optical crystal, a λ/4 plate, a solid laser medium, a lens, and a semiconductor laser chip are housed in this order in the same package. An optical resonator is formed with the far end face of the semiconductor laser chip, the λ/4 plate and the nonlinear optical crystal are inserted into the resonator, and the semiconductor laser is A semiconductor laser-pumped solid-state laser device, characterized in that the solid-state laser medium is end-excited in the axial direction by condensing light.
JP1295874A 1989-11-14 1989-11-14 Semiconductor laser excited solid state laser Pending JPH03155687A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1295874A JPH03155687A (en) 1989-11-14 1989-11-14 Semiconductor laser excited solid state laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1295874A JPH03155687A (en) 1989-11-14 1989-11-14 Semiconductor laser excited solid state laser

Publications (1)

Publication Number Publication Date
JPH03155687A true JPH03155687A (en) 1991-07-03

Family

ID=17826296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1295874A Pending JPH03155687A (en) 1989-11-14 1989-11-14 Semiconductor laser excited solid state laser

Country Status (1)

Country Link
JP (1) JPH03155687A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5882338A (en) * 1993-05-04 1999-03-16 Zeneca Limited Syringes and syringe pumps
US6019745A (en) * 1993-05-04 2000-02-01 Zeneca Limited Syringes and syringe pumps

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61253878A (en) * 1985-05-01 1986-11-11 スペクトラ−フイジツクス・インコ−ポレイテツド Nd-yag laser
JPH01220879A (en) * 1988-02-29 1989-09-04 Sony Corp Laser beam source

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61253878A (en) * 1985-05-01 1986-11-11 スペクトラ−フイジツクス・インコ−ポレイテツド Nd-yag laser
JPH01220879A (en) * 1988-02-29 1989-09-04 Sony Corp Laser beam source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5882338A (en) * 1993-05-04 1999-03-16 Zeneca Limited Syringes and syringe pumps
US6019745A (en) * 1993-05-04 2000-02-01 Zeneca Limited Syringes and syringe pumps

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