JPH0316340U - - Google Patents

Info

Publication number
JPH0316340U
JPH0316340U JP7718589U JP7718589U JPH0316340U JP H0316340 U JPH0316340 U JP H0316340U JP 7718589 U JP7718589 U JP 7718589U JP 7718589 U JP7718589 U JP 7718589U JP H0316340 U JPH0316340 U JP H0316340U
Authority
JP
Japan
Prior art keywords
shaft
fixed
rotating arm
cassette
planetary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7718589U
Other languages
Japanese (ja)
Other versions
JPH0731544Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7718589U priority Critical patent/JPH0731544Y2/en
Publication of JPH0316340U publication Critical patent/JPH0316340U/ja
Application granted granted Critical
Publication of JPH0731544Y2 publication Critical patent/JPH0731544Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係るウエハカセツト移載装置
の一実施例を示す縦断正面図、第２図はその要部
の拡大側面図、第３図はその平面図、第４図は従
来例を示す概要図である。 １……回転アーム、３……カセツト受台、４…
…ウエハカセツト、６……筒軸、８……遊星軸、
１０……カセツトチヤツク、１６……固定軸、２
０……平行リンク機構、２１……主動輪、２２…
…従動輪、２３……無端ベルト。 Fig. 1 is a vertical sectional front view showing an embodiment of the wafer cassette transfer device according to the present invention, Fig. 2 is an enlarged side view of its main parts, Fig. 3 is a plan view thereof, and Fig. 4 is a conventional example. FIG. 1...Rotating arm, 3...Cassette holder, 4...
...Wafer cassette, 6...Cylinder shaft, 8...Planetary shaft,
10...cassette chuck, 16...fixed shaft, 2
0...Parallel link mechanism, 21...Main driving wheel, 22...
...Driver wheel, 23...Endless belt.

Claims (1)

【実用新案登録請求の範囲】 その中央部を筒軸の上端に固定し、筒軸を介し
て水平旋回可能、かつ上下動可能に支持した回転
アームと、回転アームの両端部にそれぞれ遊星軸
を回転可能に垂設して各遊星軸に付設した一対の
カセツトチヤツクと、 筒軸内に挿通して筒軸と一体で上下動可能に支
持され、その上端を回転アーム上に延出した固定
軸と、 固定軸の上端部に手動輪を上下２段に固定する
とともに、各遊星軸にそれぞれ主動輪と同径の従
動輪を固定し、回転アームの回転に伴い従動輪が
回転アームと逆回転する機構とを具備して成り、 回転軸対象に配置された一組のカセツト受台上
に載置したウエハカセツトを、平行姿勢状態で移
載するように構成したことを特徴とするウエハカ
セツトの移載装置。[Claims for Utility Model Registration] A rotary arm whose central part is fixed to the upper end of a cylinder shaft and supported so that it can rotate horizontally and move up and down via the cylinder shaft, and a planetary shaft is attached to each end of the rotary arm. A pair of cassette chucks are rotatably mounted vertically and attached to each planetary shaft, and a fixed shaft is inserted into the cylindrical shaft and supported integrally with the cylindrical shaft so that it can move up and down, and whose upper end extends onto the rotating arm. , A manual wheel is fixed to the upper end of the fixed shaft in two stages, upper and lower, and a driven wheel with the same diameter as the main driving wheel is fixed to each planetary shaft, and as the rotating arm rotates, the driven wheel rotates in the opposite direction to the rotating arm. A wafer cassette transfer mechanism comprising a mechanism for transferring wafer cassettes placed on a set of cassette holders arranged symmetrically about a rotational axis in a parallel attitude. loading equipment.
JP7718589U 1989-06-29 1989-06-29 Wafer cassette transfer device Expired - Lifetime JPH0731544Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7718589U JPH0731544Y2 (en) 1989-06-29 1989-06-29 Wafer cassette transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7718589U JPH0731544Y2 (en) 1989-06-29 1989-06-29 Wafer cassette transfer device

Publications (2)

Publication Number Publication Date
JPH0316340U true JPH0316340U (en) 1991-02-19
JPH0731544Y2 JPH0731544Y2 (en) 1995-07-19

Family

ID=31619335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7718589U Expired - Lifetime JPH0731544Y2 (en) 1989-06-29 1989-06-29 Wafer cassette transfer device

Country Status (1)

Country Link
JP (1) JPH0731544Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003015156A1 (en) * 2001-08-02 2003-02-20 Takehide Hayashi Foup mounting robot for semiconductor efem
CN115036248A (en) * 2022-08-12 2022-09-09 安徽大华半导体科技有限公司 Anti-overload chip push-off device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003015156A1 (en) * 2001-08-02 2003-02-20 Takehide Hayashi Foup mounting robot for semiconductor efem
CN115036248A (en) * 2022-08-12 2022-09-09 安徽大华半导体科技有限公司 Anti-overload chip push-off device

Also Published As

Publication number Publication date
JPH0731544Y2 (en) 1995-07-19

Similar Documents

Publication Publication Date Title
KR880010475A (en) Wafer carrier
JPH0316340U (en)
JPH01146336U (en)
JPH0429523U (en)
JPH065295Y2 (en) Automatic transfer device for different work
JPH023231U (en)
JPH024622U (en)
JPS6168861U (en)
JPH0253339U (en)
JPH0264020U (en)
JPS6357089U (en)
JPS61199041U (en)
JPS6343427U (en)
JPS62197628U (en)
JPS6375036U (en)
JPS6420733U (en)
JPS6232742U (en)
JPS63202448U (en)
JPH01125361U (en)
JPH0261520U (en)
JPH01132385U (en)
JPS5895269U (en) Automatic painting turntable
JPH0192392U (en)
JPH0272229U (en)
JPS61163231U (en)