JPH0318367B2 - - Google Patents

Info

Publication number
JPH0318367B2
JPH0318367B2 JP19842182A JP19842182A JPH0318367B2 JP H0318367 B2 JPH0318367 B2 JP H0318367B2 JP 19842182 A JP19842182 A JP 19842182A JP 19842182 A JP19842182 A JP 19842182A JP H0318367 B2 JPH0318367 B2 JP H0318367B2
Authority
JP
Japan
Prior art keywords
grooves
substrate
thin film
inorganic photosensitive
surface wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19842182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5986917A (ja
Inventor
Eiji Iegi
Atsushi Yamagami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP19842182A priority Critical patent/JPS5986917A/ja
Publication of JPS5986917A publication Critical patent/JPS5986917A/ja
Publication of JPH0318367B2 publication Critical patent/JPH0318367B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP19842182A 1982-11-11 1982-11-11 表面波装置 Granted JPS5986917A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19842182A JPS5986917A (ja) 1982-11-11 1982-11-11 表面波装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19842182A JPS5986917A (ja) 1982-11-11 1982-11-11 表面波装置

Publications (2)

Publication Number Publication Date
JPS5986917A JPS5986917A (ja) 1984-05-19
JPH0318367B2 true JPH0318367B2 (fr) 1991-03-12

Family

ID=16390823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19842182A Granted JPS5986917A (ja) 1982-11-11 1982-11-11 表面波装置

Country Status (1)

Country Link
JP (1) JPS5986917A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3206285B2 (ja) * 1994-03-25 2001-09-10 株式会社村田製作所 端面反射型表面波共振子
JP4921032B2 (ja) * 2006-05-09 2012-04-18 株式会社岡本工作機械製作所 クラウニングロ−ルの溝加工方法

Also Published As

Publication number Publication date
JPS5986917A (ja) 1984-05-19

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