JPH03183783A - 窒化チタン膜の形成方法 - Google Patents

窒化チタン膜の形成方法

Info

Publication number
JPH03183783A
JPH03183783A JP32177889A JP32177889A JPH03183783A JP H03183783 A JPH03183783 A JP H03183783A JP 32177889 A JP32177889 A JP 32177889A JP 32177889 A JP32177889 A JP 32177889A JP H03183783 A JPH03183783 A JP H03183783A
Authority
JP
Japan
Prior art keywords
titanium nitride
film
titanium
alkoxide
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32177889A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0549754B2 (th
Inventor
Yoshimi Tanaka
義身 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AICHI PREF GOV
Aichi Prefectural Government
Original Assignee
AICHI PREF GOV
Aichi Prefectural Government
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AICHI PREF GOV, Aichi Prefectural Government filed Critical AICHI PREF GOV
Priority to JP32177889A priority Critical patent/JPH03183783A/ja
Publication of JPH03183783A publication Critical patent/JPH03183783A/ja
Publication of JPH0549754B2 publication Critical patent/JPH0549754B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemically Coating (AREA)
JP32177889A 1989-12-11 1989-12-11 窒化チタン膜の形成方法 Granted JPH03183783A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32177889A JPH03183783A (ja) 1989-12-11 1989-12-11 窒化チタン膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32177889A JPH03183783A (ja) 1989-12-11 1989-12-11 窒化チタン膜の形成方法

Publications (2)

Publication Number Publication Date
JPH03183783A true JPH03183783A (ja) 1991-08-09
JPH0549754B2 JPH0549754B2 (th) 1993-07-27

Family

ID=18136323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32177889A Granted JPH03183783A (ja) 1989-12-11 1989-12-11 窒化チタン膜の形成方法

Country Status (1)

Country Link
JP (1) JPH03183783A (th)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19506579A1 (de) * 1995-02-24 1996-08-29 Fraunhofer Ges Forschung Verfahren zur Herstellung von TiN-Schichten und die mit diesem Verfahren hergestellte Schicht
JP2006027941A (ja) * 2004-07-14 2006-02-02 Univ Kanagawa 窒化物薄膜の製造方法
JP2013244534A (ja) * 2012-05-29 2013-12-09 Toyota Motor Corp 表面処理方法および塗型剤

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259080A (ja) * 1989-03-31 1990-10-19 Shoei Chem Ind Co 金属窒化物薄膜の形成方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259080A (ja) * 1989-03-31 1990-10-19 Shoei Chem Ind Co 金属窒化物薄膜の形成方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19506579A1 (de) * 1995-02-24 1996-08-29 Fraunhofer Ges Forschung Verfahren zur Herstellung von TiN-Schichten und die mit diesem Verfahren hergestellte Schicht
JP2006027941A (ja) * 2004-07-14 2006-02-02 Univ Kanagawa 窒化物薄膜の製造方法
JP2013244534A (ja) * 2012-05-29 2013-12-09 Toyota Motor Corp 表面処理方法および塗型剤

Also Published As

Publication number Publication date
JPH0549754B2 (th) 1993-07-27

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