JPH031962U - - Google Patents
Info
- Publication number
- JPH031962U JPH031962U JP6095689U JP6095689U JPH031962U JP H031962 U JPH031962 U JP H031962U JP 6095689 U JP6095689 U JP 6095689U JP 6095689 U JP6095689 U JP 6095689U JP H031962 U JPH031962 U JP H031962U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- cooling roll
- atmosphere
- sealing device
- seal bars
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims 2
- 238000009489 vacuum treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000006837 decompression Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す縦断概念図、
第２図は本考案の他の実施例を示す縦断概念図、
第３図は、従来の連続真空蒸着装置の一例を示す
縦断概念図である。
１，１′……走行基板、２……蒸着室、３……
ガイドロール、４……冷却ロール、５……巻取リ
ール、６……払出リール、７……蒸着装置、８…
…真空シール装置、９……シールロール、１０…
…シールバー、１１……減圧室、１２……ケーシ
ング、１３……真空配管、１４……真空排気装置
、１５……冷却ロール。
FIG. 1 is a longitudinal conceptual diagram showing an embodiment of the present invention;
FIG. 2 is a longitudinal conceptual diagram showing another embodiment of the present invention;
FIG. 3 is a longitudinal conceptual diagram showing an example of a conventional continuous vacuum evaporation apparatus. 1, 1'... Traveling substrate, 2... Vapor deposition chamber, 3...
Guide roll, 4... Cooling roll, 5... Take-up reel, 6... Payout reel, 7... Vapor deposition device, 8...
...Vacuum sealing device, 9...Seal roll, 10...
... Seal bar, 11 ... Decompression chamber, 12 ... Casing, 13 ... Vacuum piping, 14 ... Vacuum exhaust device, 15 ... Cooling roll.
Claims (1)
搬入して、真空処理を施した後、連続的に大気中
に搬出する装置において、払出リール、巻取リー
ル、真空シール装置、表面処理室、排気装置、お
よび冷却ロールを備え、上記真空シール装置は上
記冷却ロールと相対して同冷却ロールの半周未満
の領域を覆うように設置された複数個のシールバ
ーとそれらシールバーを保持するケーシングとか
ら構成されたことを特徴とする連続真空処理装置
。 In equipment that continuously transports flexible strips from the atmosphere into a vacuum, performs vacuum treatment, and then continuously transports them into the atmosphere, there are The vacuum sealing device includes a processing chamber, an exhaust device, and a cooling roll, and the vacuum sealing device holds a plurality of seal bars that are installed opposite to the cooling roll so as to cover an area less than half the circumference of the cooling roll, and hold the seal bars. 1. A continuous vacuum processing device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6095689U JPH031962U (en) | 1989-05-29 | 1989-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6095689U JPH031962U (en) | 1989-05-29 | 1989-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH031962U true JPH031962U (en) | 1991-01-10 |
Family
ID=31588779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6095689U Pending JPH031962U (en) | 1989-05-29 | 1989-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031962U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0521071U (en) * | 1991-03-11 | 1993-03-19 | タキゲン製造株式会社 | Separate operation type latch device |
| JP2003531594A (en) * | 2000-05-02 | 2003-10-28 | ルナ ソシエテ アノニム | External filter for tanks, especially aquariums |
-
1989
- 1989-05-29 JP JP6095689U patent/JPH031962U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0521071U (en) * | 1991-03-11 | 1993-03-19 | タキゲン製造株式会社 | Separate operation type latch device |
| JP2003531594A (en) * | 2000-05-02 | 2003-10-28 | ルナ ソシエテ アノニム | External filter for tanks, especially aquariums |
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