JPS6410047U - - Google Patents

Info

Publication number
JPS6410047U
JPS6410047U JP1987103644U JP10364487U JPS6410047U JP S6410047 U JPS6410047 U JP S6410047U JP 1987103644 U JP1987103644 U JP 1987103644U JP 10364487 U JP10364487 U JP 10364487U JP S6410047 U JPS6410047 U JP S6410047U
Authority
JP
Japan
Prior art keywords
cover
utility
grounded electrode
grounded
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987103644U
Other languages
Japanese (ja)
Other versions
JPH0646990Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987103644U priority Critical patent/JPH0646990Y2/en
Priority to US07/214,179 priority patent/US4968918A/en
Priority to EP88110707A priority patent/EP0298420B1/en
Priority to DE3887933T priority patent/DE3887933T2/en
Priority to KR1019880008345A priority patent/KR950001541B1/en
Publication of JPS6410047U publication Critical patent/JPS6410047U/ja
Application granted granted Critical
Publication of JPH0646990Y2 publication Critical patent/JPH0646990Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案のプラズマ処理装置の電極廻り
の概略図の一例を示す。１は非接地電極、２は接
地電極、３は吹き出し孔を有するガス導入管、４
は導入ガスを電極間に封じ込める為のカバー、５
，６は処理試料をプラズマ空間を走行させる為の
ローラー、また第２，３図において８は処理試料
７の送り出し及び巻取りローラー、９は真空ポン
プに通じる排気孔、１０はアース、１１は低周波
或いは高周波電源、マツチング回路に通じるケー
ブル、１２は真空容器である。第３図のｌ１は非
接地電極の巾、ｌ２はローラの間隔を示す。 FIG. 1 shows an example of a schematic diagram around electrodes of the plasma processing apparatus of the present invention. 1 is a non-grounded electrode, 2 is a grounded electrode, 3 is a gas introduction pipe having a blowout hole, 4
5 is a cover to confine the introduced gas between the electrodes;
, 6 are rollers for moving the processed sample through the plasma space, and in Figures 2 and 3, 8 is a delivery and take-up roller for the processed sample 7, 9 is an exhaust hole leading to a vacuum pump, 10 is a ground, and 11 is a low A frequency or high frequency power source, a cable leading to a matching circuit, and 12 a vacuum container. In FIG. 3, l1 indicates the width of the non-grounded electrode, and l2 indicates the spacing between the rollers.

Claims (1)

【実用新案登録請求の範囲】 (1) 真空容器内に非接地電極１、接地電極２、
吹き出し孔を有するガス導入管３、導入されたガ
スを電極間に封じ込める為のカバー４、及び処理
物７をプラズマ空間を走行させる為のローラー５
，６からなるプラズマ処理ユニツトを少なくとも
１個有するプラズマ処理装置。 (2) カバー４が金属製である実用新案登録請求
の範囲第１項記載の装置。 (3) カバー４がプラズマ空間を監視できる透視
窓を有する実用新案請求の範囲第１項或いは第２
項記載の装置。 (4) カバー４が接地されている実用新案登録請
求の範囲第１項記載の装置。[Scope of claims for utility model registration] (1) Non-grounded electrode 1, grounded electrode 2,
A gas introduction pipe 3 having a blowout hole, a cover 4 for sealing the introduced gas between the electrodes, and a roller 5 for moving the processed material 7 through the plasma space.
, 6. A plasma processing apparatus having at least one plasma processing unit consisting of . (2) The device according to claim 1, wherein the cover 4 is made of metal. (3) Utility model claim 1 or 2 in which the cover 4 has a see-through window that can monitor the plasma space.
Apparatus described in section. (4) The device according to claim 1 of the utility model registration claim, in which the cover 4 is grounded.
JP1987103644U 1987-07-06 1987-07-06 Plasma processing device Expired - Lifetime JPH0646990Y2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1987103644U JPH0646990Y2 (en) 1987-07-06 1987-07-06 Plasma processing device
US07/214,179 US4968918A (en) 1987-07-06 1988-07-01 Apparatus for plasma treatment
EP88110707A EP0298420B1 (en) 1987-07-06 1988-07-05 Apparatus for plasma treatment
DE3887933T DE3887933T2 (en) 1987-07-06 1988-07-05 Plasma processing device.
KR1019880008345A KR950001541B1 (en) 1987-07-06 1988-07-06 Plasma treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987103644U JPH0646990Y2 (en) 1987-07-06 1987-07-06 Plasma processing device

Publications (2)

Publication Number Publication Date
JPS6410047U true JPS6410047U (en) 1989-01-19
JPH0646990Y2 JPH0646990Y2 (en) 1994-11-30

Family

ID=31334664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987103644U Expired - Lifetime JPH0646990Y2 (en) 1987-07-06 1987-07-06 Plasma processing device

Country Status (1)

Country Link
JP (1) JPH0646990Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101367422B1 (en) * 2012-12-12 2014-02-26 (주) 파카알지비 Fabric surface treatment apparatus

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58132161A (en) * 1982-01-26 1983-08-06 株式会社山東鉄工所 Low temperature plasma treating apparatus
JPS58163772A (en) * 1982-03-23 1983-09-28 株式会社山東鉄工所 Low temperature plasma treating apparatus
JPS59179631A (en) * 1983-03-31 1984-10-12 Japan Synthetic Rubber Co Ltd Apparatus for plasma polymerization treatment of film
JPS59226028A (en) * 1983-06-06 1984-12-19 Nitto Electric Ind Co Ltd Vacuum treating device
JPS6048339A (en) * 1983-08-26 1985-03-16 Unitika Ltd Method and apparatus for treating sheetlike item with plasma at low temperature

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58132161A (en) * 1982-01-26 1983-08-06 株式会社山東鉄工所 Low temperature plasma treating apparatus
JPS58163772A (en) * 1982-03-23 1983-09-28 株式会社山東鉄工所 Low temperature plasma treating apparatus
JPS59179631A (en) * 1983-03-31 1984-10-12 Japan Synthetic Rubber Co Ltd Apparatus for plasma polymerization treatment of film
JPS59226028A (en) * 1983-06-06 1984-12-19 Nitto Electric Ind Co Ltd Vacuum treating device
JPS6048339A (en) * 1983-08-26 1985-03-16 Unitika Ltd Method and apparatus for treating sheetlike item with plasma at low temperature

Also Published As

Publication number Publication date
JPH0646990Y2 (en) 1994-11-30

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