JPH03200026A - Cars reference light measuring instrument - Google Patents

Cars reference light measuring instrument

Info

Publication number
JPH03200026A
JPH03200026A JP33822389A JP33822389A JPH03200026A JP H03200026 A JPH03200026 A JP H03200026A JP 33822389 A JP33822389 A JP 33822389A JP 33822389 A JP33822389 A JP 33822389A JP H03200026 A JPH03200026 A JP H03200026A
Authority
JP
Japan
Prior art keywords
light
gas
laser beams
cars
dichroic mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33822389A
Other languages
Japanese (ja)
Inventor
Shohei Noda
野田 松平
Miyuki Etsu
悦 幸
Junichiro Hori
順一郎 堀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP33822389A priority Critical patent/JPH03200026A/en
Publication of JPH03200026A publication Critical patent/JPH03200026A/en
Pending legal-status Critical Current

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  • Radiation Pyrometers (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

PURPOSE:To enhance the accuracy of the temp. measurement of gas by providing a dichroic filter removably and insertably from and into an optical path for the light which is reflected by a dichroic mirror and enters an optical fiber. CONSTITUTION:Gaseous Ar 13b is injected from an Ar gas injecting nozzle 13a and the gaseous nitrogen molecules desired to be measured are purged so that the gas 13b is filled as the atmosphere in a test section 13 where the measuring point 12 to be condensed with pumping light 7 and Stockes light 8 outputted by dye lasers 5, 6 exists. The dichroic filter 17 is removed from the optical path. The non-reconant coherent and non-Stokes Raman diffused (CARS) light is generated from the gas 13b when the pumping light 7 and the Stokes light 8 are condensed to the measuring point 12. This light and the two laser beams are made incident via a lens 14 on the dichroic mirror 15, by which the beams are separated to the reflected light 16 and the transmitted laser beams 7, 8. The slight laser beams 7, 8 remain in this light 16 and the laser beams are condensed to an end face 20a, from which the beams enter the optical fiber 20. The beams are then introduced to a spectroscope 22.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、各種のバーナやエンジン筒内等の燃焼ガス等
のガス温度測定に適用されるカース(コヒーレント・非
ストークス・ラマン拡散;以下CAR8という)参照光
計測装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention applies to CAR8 (coherent non-Stokes Raman diffusion; hereinafter referred to as CAR8) which is applied to the measurement of gas temperature such as combustion gas in various burners and engine cylinders. )Reference light measurement device.

〔従来の技術〕[Conventional technology]

従来の装置を第5図に示す。 A conventional device is shown in FIG.

第5図において、エキシマレーザlから発振されたレー
ザ光2はハーフミラ−3と全反射ミラー4に工り二つに
分割され、そ扛ぞれ色素レーザ5゜6を励起し、それぞ
れ異なる波数今、町のレーザ光を発振させる。
In Fig. 5, a laser beam 2 oscillated from an excimer laser 1 is split into two by a half mirror 3 and a total reflection mirror 4, each of which excites a dye laser 5. , oscillates the town's laser light.

ここで、波数W、のレーザ光をボンピング光7゜波数W
sのレーザ光をストークス光8と呼ぶ。
Here, the laser beam with a wave number W is pumped with a 7° wave number W.
The laser light of s is called Stokes light 8.

ストークス光8の波数Wsハ、ポンプ光7の波数wpと
の波数の差’!1;lp −’Iasが、計測したい気
体分子(こ\では窒素分子)の振動エネルギ準位差(基
底準位と第一励起準位のエネルギの差)に等しくなるL
うに調整されている。
Difference between wave number Ws of Stokes light 8 and wave number wp of pump light 7'! 1; L where lp -'Ias is equal to the vibrational energy level difference (difference in energy between the ground level and the first excited level) of the gas molecule to be measured (in this case, nitrogen molecules)
It has been adjusted accordingly.

上記ポンピング光7とストークス光8Fi、%定の波数
の光のみ反射し、それ以外の波数の光は通過させるダイ
クロイックミラー9と全反射ミラー10にエリ、一つに
合成され、レンズ11により計測点12に集光される。
The pumping light 7 and the Stokes light 8Fi are combined into one by a dichroic mirror 9 and a total reflection mirror 10 that reflect only the light with a certain wave number and pass the other wave numbers, and are combined into one by the lens 11 at the measurement point. The light is focused on 12.

上記計測点工2を含む空間をテストセクション13と呼
ぶ。
The space including the measurement points 2 is called a test section 13.

くなるように調整されているため、そこに存在する気体
分子により第3の光であるCaH2光が発生し、このC
aH2光は他の2つのレーザ光7゜8と共にレンズ14
により平行光となシ、ダイクロイックミラー15により
、反射される光16と透過するレーザ光7,8とに分離
される。
Because the gas molecules present there generate CaH2 light, which is the third light, this C
The aH2 light passes through the lens 14 along with two other laser beams 7°8.
The dichroic mirror 15 separates the parallel light into reflected light 16 and transmitted laser light 7 and 8.

上記ダイクロtイ・ツクミラー15により反射され九光
16には、CaH8光とごくわずかのレーザ光7.8が
残っており、更に、ダイクロイックミラー15aを使用
して、CaH2光とレーザ光を分離する。
Reflected by the dichroic mirror 15, the CaH8 light and a very small amount of the laser beam 7.8 remain in the nine beams 16, and the dichroic mirror 15a is used to separate the CaH2 light and the laser beam. .

この分離され7IcCAR8光18はレンズ19t−通
して光ファイバ20の一端に入射され、入射口より離れ
た場所にある上記光ファイバ20の他端より出射したC
AR8t18はレンズ21により分光器22に導ひかれ
る。
The separated 7IcCAR8 light 18 enters one end of the optical fiber 20 through a lens 19t, and is emitted from the other end of the optical fiber 20 located away from the entrance.
The AR8t18 is guided to a spectrometer 22 by a lens 21.

分光器で分光されたCaH2光は、光電変換器23で電
圧に変換され、信号処理器24によりスペクトル波形が
得られる。
The CaH2 light separated by the spectrometer is converted into voltage by the photoelectric converter 23, and a spectral waveform is obtained by the signal processor 24.

このスペクトル波形には、レーザ光の波長特性や受光側
の感度特性が含まれているので、それらを補正する必賛
があり、その友めにArガスからの非共鳴CaB6光が
補正用の参照光として用いられる。
This spectral waveform includes the wavelength characteristics of the laser beam and the sensitivity characteristics of the light receiving side, so it is necessary to correct them, and the non-resonant CaB6 light from Ar gas is used as a reference for correction. Used as light.

このCaH2光の補正に用いる参照光を得るため、両端
がガラス窓25.26となっている密封容器27に、単
一原子による分子でめり撮動エネルギを持たず非共鳴C
aB6光を発生するArガスを封入し、この容器をテス
トセクションに挿入設置し、同様にスペクトル波形を得
、CaH2光と参照光の強度比をとることにより正確な
CARSスペクトラムが得られる。
In order to obtain a reference light used for correction of this CaH2 light, a non-resonant C
An accurate CARS spectrum can be obtained by filling the container with Ar gas that generates aB6 light, inserting this container into the test section, obtaining the spectrum waveform in the same way, and taking the intensity ratio of the CaH2 light and the reference light.

このようにして得られ友スペクトル波形は第4図に示す
ものでめり、これをあらかじめ理論計算した第3閣に示
すスペクトル波形と順次比較し、最も良A一致を見た理
論スペクトルの温度から計測点の温度が求められる。
The spectral waveform obtained in this way is shown in Figure 4, and it is compared with the theoretically calculated spectral waveform shown in the third table in sequence, and the temperature of the theoretical spectrum that shows the best A match is determined. The temperature at the measurement point is determined.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記従来の装峙において用いる大気圧程度のArガスに
よりつくられる参照光は、計測したい気体分子のCA 
RS光に比べて強度が小さいため、容器に封入するAr
ガスの圧力を高めたり、レーザ光の出力を大きくするこ
とで強度を大きくしているが、エネルギー強度が大きく
なりすぎて容器内部でArガスが絶縁破壊をおこし放電
現象を発生して雑音を生じたり、窓ガラスに傷をつける
ことがあった。
The reference light produced by Ar gas at about atmospheric pressure used in the conventional setup is the CA of the gas molecules to be measured.
Since the intensity is lower than that of RS light, Ar
The intensity is increased by increasing the gas pressure or increasing the output of the laser beam, but the energy intensity becomes too large and the Ar gas causes dielectric breakdown inside the container, causing a discharge phenomenon and causing noise. This may cause damage to the window glass.

ま友、計測の対象となる供試体の構造によっては、テス
トセクションにArガスを封入し定容器を挿入設置でき
なかったり、Arガスを加圧密封して使えないことが多
かった。
Friend, depending on the structure of the specimen to be measured, there are many cases where it is not possible to fill the test section with Ar gas and insert a fixed container, or to seal the Ar gas under pressure.

本発明は上記の課題を解決しようとするものである。The present invention seeks to solve the above problems.

[a題を解決するための手段〕 本発明のCAR8参照光計測装置は、2種類の波数が異
なるレーザ光を発生させ、上記2つのレーザ光の波数差
を計測する気体分子の振動エネルギ準位差に合わせて上
記気体が存在する空間に集光しCaH2光を発生させ、
同CAR8光を含む光をダイクロイックミラーに入射し
てCaH2光を分離し、同CAR8光を光ファイバ、分
光器をy’i L/て光電変換器に入射し、光電変換さ
れ友電気信号を信号処理器に入力して気体分子CaH8
光をスペクトル解析し、スペクトル波形の違いから光7
アイパに入射される中害零略光の光路に出し入れ可能に
設けられたグイクロイックフィルタ、上記2つのレーザ
光が集光される空間にArガスを吐出する手段を備え几
ことを特徴としている。
[Means for Solving Problem a] The CAR8 reference light measurement device of the present invention generates two types of laser beams with different wave numbers, and measures the vibrational energy level of gas molecules to measure the difference in wave numbers between the two laser beams. According to the difference, the light is focused on the space where the above gas exists and generates CaH2 light,
The light containing the same CAR8 light is input to a dichroic mirror to separate the CaH2 light, and the same CAR8 light is passed through an optical fiber and a spectrometer to a photoelectric converter, where it is photoelectrically converted and converted into a Yuden signal. Input into the processor to generate gas molecules CaH8
Analyzing the spectrum of light and determining the difference in the spectral waveform
It is characterized by comprising a guichroic filter that can be inserted into and removed from the optical path of the zero-harm light that enters the AIPAR, and a means for discharging Ar gas into the space where the two laser beams are focused. .

〔作用〕[Effect]

上記において、気体分子より発生するCAR3光全測定
する場合は、グイクロイックフィルタを光路に挿入した
状態として、気体分子が存在する空間に2つのレーザを
集光してCARS光を発生させ、ダイクロイックミラー
がCARS光を反射分離し、同CAR8光は更にグイク
ロイックフィルタにエリ残ったわずかのレーザ光が除去
され几後、光ファイバ、分光器、光電変換器1!r:経
て電気信号に変換され、信号処理器によりスペクトル波
形が得られる。
In the above, when measuring all of the CAR3 light generated by gas molecules, a dichroic filter is inserted in the optical path, two lasers are focused on the space where gas molecules exist to generate CARS light, and a dichroic filter is inserted into the optical path to generate CARS light. A mirror reflects and separates the CARS light, and the CARS8 light is further filtered through a microchroic filter to remove a small amount of the remaining laser light.After that, the optical fiber, spectrometer, and photoelectric converter1! r: The signal is then converted into an electrical signal, and a spectral waveform is obtained by a signal processor.

次に、参照光を得る場合には、上記グイクロイックフィ
ルタは光路から取り除かれ、また、2つのレーザ光が集
光さnる空間にはArガスが吐出され上記気体分子はパ
ージされた状態とする。
Next, when obtaining a reference light, the guichroic filter is removed from the optical path, and Ar gas is discharged into the space where the two laser beams are focused to purge the gas molecules. shall be.

上記の状態で、2つのレーザ光が入射した空間では、A
rガスにより非共鳴CARS光が発生し、ダイクロイッ
クミラーがわずかのレーザ光を含んだ非共鳴CARS光
を反射して光ファイバに入射する。
In the above state, in the space where the two laser beams are incident, A
Non-resonant CARS light is generated by the r gas, and the dichroic mirror reflects the non-resonant CARS light containing a small amount of laser light and enters the optical fiber.

上記わずかのレーザ光が光ファイバの端面に入射するこ
とにより強度の大きい非共鳴CARS光が得られ、この
非共鳴CARS光は分光器を介して光電変換器に入射さ
ル、電気信号に変換され、信号処理器により参照光であ
る非共鳴CARS光のスペクトル波形が得られる。
A high-intensity non-resonant CARS light is obtained by the above-mentioned small amount of laser light being incident on the end face of the optical fiber, and this non-resonant CARS light is incident on a photoelectric converter via a spectroscope and is converted into an electrical signal. A spectral waveform of non-resonant CARS light, which is a reference light, is obtained by a signal processor.

上記CARS光は参照光により補正され、気体分子の温
度が計測されるが、上記参照光は気体分子がArガスに
よりパージされているためCARS光を含まず、またレ
ーザ光が入射された光ファイバの端面に工す強度の大き
い非共鳴CARS光が得られるため、参照光により補正
さnたCARSスペクトラムはより正確なものとなり、
高い精度の気体温度が得られる。
The CARS light is corrected by a reference light to measure the temperature of the gas molecules, but the reference light does not contain the CARS light because the gas molecules have been purged with Ar gas, and the reference light does not contain the CARS light, and the reference light does not contain the CARS light because the gas molecules have been purged with Ar gas. Since a high-intensity non-resonant CARS beam is obtained that is applied to the end face of the beam, the CARS spectrum corrected by the reference beam becomes more accurate.
Highly accurate gas temperature can be obtained.

上記により、従来の装置にて使用していたAI・ガスの
密封容器は不要となるため、その絶縁破壊や破損の恐れ
がなくなり、上記容器が挿入できなlA場所での計測も
可能となり、また強度が大きくノイズの少ない参照光が
得られるため、気体の温度計測の精度を高めることが可
能となった。
As a result of the above, the sealed container for AI/gas used in conventional equipment is no longer required, eliminating the risk of dielectric breakdown or damage, and making it possible to perform measurements at 1A locations where the container cannot be inserted. Since a reference light with high intensity and low noise can be obtained, it has become possible to improve the accuracy of gas temperature measurement.

〔実施例〕〔Example〕

本発明の一実施例を第1図に示す。 An embodiment of the present invention is shown in FIG.

第1図に示す本実施例はエキシマレーザ1より出力され
たレーザ光2がハーフミラ−3に入光し、同ハーフミラ
−3は上記レーザ光2の一部を反射し残りを透過し、反
射したレーザ光は色素レーザ5を介してダイクロイック
ミラー9に入光し、反射され、透過したレーザ光は全反
射ミラー4により反射して色素レーザ6に入光し、同色
素レーザ6はストークス光8を出力して全反射ミラー1
0に入光し反射され、同全反射ミラー10により反射さ
れたストークス光8は上記ダイクロイックミラ=9を透
過し、上記ダイクロイックミラー91Cより反射された
ボンピング光7と合成され、レンズ11、を介してテス
トセクション13の計測点12に集光され計測される窒
素ガスがCARS光を発生し、同CAR8光はレーザ光
と共にレンズ14を介してダイクロイックミラー15i
C入光し、同ダイクロイックミラー15は大部分のレー
ザ光を透過して1部のレーザ光とCARS光よりなる光
1、6 f反射し、同反射された光16はレンズ19゜
光ファイバ20.レンズ21’を介して分光器22に入
力され、光重変換器23Vcjり電気信号に変換されて
信号処理器24に入力されるCAR8参照光計測装置に
おいて、上記ダイクロイックミラー+5により反射され
7’CCAR8光と1部のレーザ光エリなる光16の光
路に出し入れされるダイクロイ・ンクフイルり17、お
工び上d己テストセクション13に設けら7LArガス
13bi噴出するArガス;臂射ノズル13aを備えて
いる。
In this embodiment shown in FIG. 1, a laser beam 2 outputted from an excimer laser 1 enters a half mirror 3, and the half mirror 3 reflects a part of the laser beam 2 and transmits and reflects the rest. The laser light enters the dichroic mirror 9 via the dye laser 5 and is reflected, and the transmitted laser light is reflected by the total reflection mirror 4 and enters the dye laser 6, which emits Stokes light 8. Output and total reflection mirror 1
The Stokes light 8 that is incident on 0 and reflected by the total reflection mirror 10 passes through the dichroic mirror 9, is combined with the bombing light 7 reflected from the dichroic mirror 91C, and then passes through the lens 11. The nitrogen gas that is focused and measured on the measurement point 12 of the test section 13 generates CARS light, and the CARS light is transmitted together with the laser light to the dichroic mirror 15i via the lens 14.
The dichroic mirror 15 transmits most of the laser light and reflects the light 1 and 6 f, which are made up of part of the laser light and the CARS light, and the reflected light 16 is passed through the lens 19 and the optical fiber 20. .. In the CAR8 reference light measuring device, the signal is inputted to the spectrometer 22 via the lens 21', converted into an electrical signal by the optical gravity converter 23Vcj, and inputted to the signal processor 24, reflected by the dichroic mirror +5, and converted to 7'CCAR8. A dichroic film 17 is inserted into and taken out from the optical path of the light 16, which is a part of the laser beam, and an arm-shaped nozzle 13a is installed in the test section 13 to eject Ar gas. There is.

本実施例においては、9素ガス分子エリ発生するCAR
S−1’eを6川定する場合、CARS光と2つのレー
ザ光がダイクロイックミラー15にエリ反射、壕fc)
ま透過さnるまでは従来と同様のため、その作用の説明
全省略する。
In this example, CAR generated by 9 elementary gas molecules
When determining S-1'e at 6 rivers, the CARS light and two laser lights are reflected by the dichroic mirror 15, trench fc)
Since the process up to the point of transmission is the same as the conventional one, a complete explanation of its operation will be omitted.

上記において、CARS光を測定する場合、ダイクロイ
ックミラー15より反射されたCARS光とごくわずか
のレーザ光エリなる光16は、光路に直角に設けたグイ
クロイックフィルタ17に入光し、CARS光にフィル
タを透過し、レーザ光は反射され除去される。
In the above, when measuring the CARS light, the CARS light reflected from the dichroic mirror 15 and the light 16, which is a very small amount of laser light, enter the gichroic filter 17 installed at right angles to the optical path, and are converted into CARS light. After passing through the filter, the laser beam is reflected and removed.

上記分離され7’cCAR8光18は従来と同様にレン
ズ19.21と光ファイバ20に工υ分光器22#C導
かれ、光電変換器23によシ光電変換され信号処理器2
4に1クスベクトル波形が得られる。
The separated 7'cCAR8 light 18 is guided to the optical spectrometer 22#C through the lens 19.21 and the optical fiber 20, as in the conventional case, and photoelectrically converted by the photoelectric converter 23 to the signal processor 2.
4, a 1x vector waveform is obtained.

次に参照光を得る場合には、色素レーザ5,6がそれぞ
れ出力したボンピング光7とストークス光8が集光され
る計測点12のあるテストセクション131d、Arガ
ス噴射ノズル13aよりArガスエ3bが噴射され、計
測したい窒素ガス分子がパージされてA、ガス13b雰
囲気とされ、グイクロイックフィルタ17rt光路工り
除かれる。
Next, when obtaining a reference light, the test section 131d has the measurement point 12 where the bombing light 7 and the Stokes light 8 outputted by the dye lasers 5 and 6 are focused, and the Ar gas ejector 3b is ejected from the Ar gas injection nozzle 13a. The nitrogen gas molecules that are injected and to be measured are purged to create an atmosphere of gas 13b, and are removed through the optical path filter 17rt.

上記計測点12にボンピング光7とストークス光8が集
光されると% Arガス13b17C,Cり非共鳴CA
R8光が発生し、このCAR8光と2つのレーザ光はレ
ンズ14乞介してダイクロイックミラー15に入射し、
反射される光16と透過するレーザ光7,8に分離され
る。上記ダイクロイックミラー15に19反射さnた光
16には、わずかのレーザ光7,8が残っており、この
レーザ光はレンズ19を介して端面20aに集光され、
光7アイバ20に入射する。
When the bombing light 7 and the Stokes light 8 are focused on the measurement point 12, % Ar gas 13b17C, C non-resonant CA
R8 light is generated, and this CAR8 light and two laser beams enter the dichroic mirror 15 through the lens 14.
The laser beams are separated into reflected light 16 and transmitted laser beams 7 and 8. A small amount of laser beams 7 and 8 remain in the light 16 reflected by the dichroic mirror 15, and this laser beam is focused on the end surface 20a via the lens 19.
Light 7 enters the eyeglass 20.

上記レーザ光7,8が光ファイバ20に入射した場合、
発生する非共鳴CAR8光は分子の密度の二乗に比例す
るため、上記レーザ光はガスに比べて密度が非常に大き
い光7アイバ2(1)端面20aVC工り非共鳴CAR
8光を発生し、分光器22に導かれ、光電変換器23に
より光電変換され信号処理器24により参照光のスペク
トル波形が得られる。
When the laser beams 7 and 8 enter the optical fiber 20,
Since the generated non-resonant CAR8 light is proportional to the square of the density of molecules, the above laser light has a very high density compared to gas.
8 lights are generated, guided to a spectroscope 22, photoelectrically converted by a photoelectric converter 23, and a spectral waveform of a reference light is obtained by a signal processor 24.

上記計測点r2Vcおいては、Arガス13blCよっ
て計測じたい窒素ガスが完全にパージされる定め、計測
したい窒素ガス分子のCAR3光を含まない参照光が得
られ、また光ファイバ20の端面20aに集光されたレ
ーザ光は光ファイバ20により非共鳴CAR8光を発生
するため、参照光の強度は第2図に示すように従来の装
Tl1tT/c比べ大幅に高められる。
At the measurement point r2Vc, the nitrogen gas to be measured is completely purged by the Ar gas 13blC, and a reference light that does not contain the CAR3 light of the nitrogen gas molecules to be measured is obtained, and it is also focused on the end face 20a of the optical fiber 20. Since the emitted laser beam generates a non-resonant CAR8 beam through the optical fiber 20, the intensity of the reference beam is greatly increased compared to the conventional device Tl1tT/c, as shown in FIG.

上記参照光は、計測したい気体分子より発生するCAR
8光を含まず、強度が大きい友め、CAR8光との強度
比をとることに工って得られる波長特性や感度特性が補
正されたCARSスペクトラムはより正確なものとなり
、理論スペクトル波形との比較によって計測点12の温
度は高い精度のものが得られる。
The above reference light is a CAR generated from gas molecules to be measured.
The CARS spectrum, which does not include the 8 light and has a higher intensity, has the wavelength characteristics and sensitivity characteristics corrected by taking the intensity ratio with the CAR 8 light, and is more accurate, and is more in line with the theoretical spectrum waveform. By comparison, the temperature at the measurement point 12 can be determined with high accuracy.

上記に工す、従来の装置にて使用して5几A1ガスの密
封容器が不要となるため、その絶縁破壊や破損の恐れが
なくなり、上記容器が挿入できない場所での計測も可能
となり、また強度が大きくノイズの少なめ参照光が得ら
れるtめ、温度計測の精度を旨めることが可能となった
The above-mentioned method eliminates the need for a sealed 5-liter A1 gas container when used with the conventional device, eliminating the risk of insulation breakdown or damage, and making it possible to perform measurements in locations where the container cannot be inserted. Since reference light with high intensity and low noise can be obtained, it has become possible to improve the accuracy of temperature measurement.

〔発明の効果〕〔Effect of the invention〕

本発明のCAR8参照光計測装置は、参照光を得る場合
、2つのレーザ光が集光される空間はArガスによりパ
ージされ、同空間からの光を入射したダイクロイックミ
ラーの反射光の光路に設けられたダイクロイックフィル
タを取シ除き、わずかのレーザ光を光ファイバの端面に
入射非共鳴CAR8光を発生させることによって、従来
の装置にて使用してい′fcArガスの密封容器は不要
となる几め、そのe縁破壊や破損の恐れがなくなり、上
記容器が挿入できない場所での計測も可能となり、また
強度が大きくノイズの少ない参照光が得られるため、気
体の温度計測の精度を高めることが可能となった。
In the CAR8 reference light measuring device of the present invention, when obtaining the reference light, the space where the two laser beams are focused is purged with Ar gas, and the light from the same space is provided in the optical path of the reflected light of the dichroic mirror that is incident. By removing the dichroic filter and generating non-resonant CAR8 light incident on the end face of the optical fiber using a small amount of laser light, the sealed container for fcAr gas used in conventional equipment is no longer required. This eliminates the risk of edge breakage or damage, making it possible to perform measurements in locations where the container cannot be inserted, and providing a reference light with high intensity and low noise, making it possible to improve the accuracy of gas temperature measurements. It became.

【図面の簡単な説明】[Brief explanation of drawings]

第1南は本発明の一実施例の説明図、第2図は上記一実
施例による参照光の従来の装置によるものとの比較図、
第3図は理論計算により得られ念スペクトル図、第4図
は実験に↓つて得らAたN。 ガスCARSスペクトル四、第5図は従来の装置の説明
図である。 1・・・エキシマレーザ、  2・・・エキシマレーザ
光、3・・・ハーフミラ−14・−・全反射ミラー5・
・・色素レーザ、  6・・・色素レーザ、7・・・ボ
ンピング光、  8・・・ストークス光、9・・・ダイ
クロイックミラー lO・・・全反射ミラー  Jl・・・レンズ112・
・・i 111点、  13・・・テストセクション、
13a・・・Arガス噴射ノズル、 13b・・・Ar
ガス14・・・レンズ、  15・・・ダイクロイツク
ミラーl6 り、 0 1 3 ・・・反射光、  17・・・ダイクロイックフィル1
8・・・CAR8光、  工9・・・レンズ、・・・光
7アイパ、  20a・・・端面、・・・レンズ、  
22・・・分光器、・・・光電変換器、 24・・・信
号処理器。
The first south diagram is an explanatory diagram of an embodiment of the present invention, and the second diagram is a comparison diagram of the reference light according to the above embodiment with that of a conventional device.
Figure 3 is a spectrogram obtained by theoretical calculations, and Figure 4 is an experimental spectral diagram. Gas CARS Spectrum 4. FIG. 5 is an explanatory diagram of a conventional apparatus. 1... Excimer laser, 2... Excimer laser light, 3... Half mirror 14... Total reflection mirror 5.
... Dye laser, 6... Dye laser, 7... Bumping light, 8... Stokes light, 9... Dichroic mirror lO... Total reflection mirror Jl... Lens 112.
...i 111 points, 13...test section,
13a...Ar gas injection nozzle, 13b...Ar
Gas 14...Lens, 15...Dichroic mirror l6, 013...Reflected light, 17...Dichroic filter 1
8...CAR8 light, Engineering 9...lens,...light 7 eyeper, 20a...end face,...lens,
22... Spectrometer,... Photoelectric converter, 24... Signal processor.

Claims (1)

【特許請求の範囲】[Claims] 2種類の波数が異なるレーザ光を発生させ、上記2つの
レーザ光の波数差を計測する気体分子の振動エネルギ準
位差に合わせて上記気体が存在する空間に集光しカース
光を発生させ、同カース光を含む光をダイクロイックミ
ラーに入射してカース光を分離し、同カース光を光ファ
イバ、分光器を介して光電変換器に入射し、光電変換さ
れた電気信号を信号処理器に入力して気体分子カース光
をスペクトル解析し、スペクトル波形の違いから気体温
度を計測するカース参照光計測装置において、上記ダイ
クロイックミラーにより反射され光ファイバに入射され
る光の光路に出し入れ可能に設けられたダイクロイック
フィルタ、上記2つのレーザ光が集光される空間にアル
ゴンガスを吐出する手段を備えたことを特徴とするカー
ス参照光計測装置。
generating two types of laser beams with different wave numbers, and measuring the wave number difference between the two laser beams; focusing the light on a space where the gas exists in accordance with the vibrational energy level difference of gas molecules to generate curse light; Light containing the cursed light is input to a dichroic mirror to separate the cursed light, the cursed light is inputted to a photoelectric converter via an optical fiber and a spectrometer, and the photoelectrically converted electrical signal is input to a signal processor. In a curse reference light measurement device that analyzes the spectra of gas molecule curse light and measures gas temperature from differences in spectral waveforms, a curve reference light measuring device is provided that can be inserted into and taken out of the optical path of the light that is reflected by the dichroic mirror and enters the optical fiber. A curse reference light measurement device comprising: a dichroic filter; and means for discharging argon gas into a space where the two laser beams are focused.
JP33822389A 1989-12-28 1989-12-28 Cars reference light measuring instrument Pending JPH03200026A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33822389A JPH03200026A (en) 1989-12-28 1989-12-28 Cars reference light measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33822389A JPH03200026A (en) 1989-12-28 1989-12-28 Cars reference light measuring instrument

Publications (1)

Publication Number Publication Date
JPH03200026A true JPH03200026A (en) 1991-09-02

Family

ID=18316087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33822389A Pending JPH03200026A (en) 1989-12-28 1989-12-28 Cars reference light measuring instrument

Country Status (1)

Country Link
JP (1) JPH03200026A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021181909A (en) * 2020-05-18 2021-11-25 株式会社エーティーエー Difference detection conjugate compensation cars measurement apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021181909A (en) * 2020-05-18 2021-11-25 株式会社エーティーエー Difference detection conjugate compensation cars measurement apparatus

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