JPH0321047B2 - - Google Patents

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Publication number
JPH0321047B2
JPH0321047B2 JP58127286A JP12728683A JPH0321047B2 JP H0321047 B2 JPH0321047 B2 JP H0321047B2 JP 58127286 A JP58127286 A JP 58127286A JP 12728683 A JP12728683 A JP 12728683A JP H0321047 B2 JPH0321047 B2 JP H0321047B2
Authority
JP
Japan
Prior art keywords
circuit
output
signal
displacement
oscillation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58127286A
Other languages
Japanese (ja)
Other versions
JPS6018701A (en
Inventor
Masahiro Tarui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP12728683A priority Critical patent/JPS6018701A/en
Publication of JPS6018701A publication Critical patent/JPS6018701A/en
Publication of JPH0321047B2 publication Critical patent/JPH0321047B2/ja
Granted legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Description

【発明の詳細な説明】 本発明は差動トランスを用いた変位測定装置に
関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a displacement measuring device using a differential transformer.

測長機や計量機などのように差動トランスを用
いた装置では、測定すべき長さや重量などに比例
させて差動トランスのコアを直線方向に変位さ
せ、この変位量を電気信号に変換して長さや重量
などを測定している。しかしてこのような測定装
置では極めて高い測定精度が要求されるため、温
度変化などによる差動トランスや他の電子回路の
特性の変化が大きな測定誤差を生ずる原因となつ
ていた。
In devices that use a differential transformer, such as length measuring machines and weighing machines, the core of the differential transformer is displaced in a linear direction in proportion to the length or weight to be measured, and this amount of displacement is converted into an electrical signal. to measure length, weight, etc. However, since such measuring devices require extremely high measurement accuracy, changes in the characteristics of the differential transformer and other electronic circuits due to changes in temperature, etc., have caused large measurement errors.

この対策として、従来、例えば第1図に示すよ
うに差動トランス1の1次コイル側に直列にサー
ミスタ2を挿入して差動トランス1の温度による
感度変化を相殺する方法が用いられている。しか
し、この方法では、差動トランス1の特性とサー
ミスタ2の特性を一致させるのが困難なため充分
な温度補償ができず、また差動トランス1の1次
側に発振信号を印加する発振回路4や、出力信号
に増幅、検波あるいはA/D変換などの処理を行
なう変位量検出のための後段の電子回路3などの
温度による感度変化を何ら補償していないため、
測定精度が充分に保てなかつた。(なお図中5は
電子回路3の出力信号によつて変位量を表示する
表示器である。) また従来、第2図に示すように差動トランス1
の出力を、増幅、検波、A/D変換などの後段の
変位量検出のための電子回路3とは別系統に取り
出して検波回路6で検波して直流電圧にし、これ
を予め設定した基準電圧Eと比較回路7で比較
し、両者が一致するように制御信号を発振回路4
に出力して発振電を制御する方法も用いられてい
る。しかし、この方法では変位量検出のための電
子回路3の感度変化を補償できないため、測定精
度が充分に保てなかつた。
As a countermeasure against this problem, conventional methods have been used, for example, as shown in Figure 1, to insert a thermistor 2 in series on the primary coil side of the differential transformer 1 to offset changes in sensitivity due to temperature of the differential transformer 1. . However, with this method, it is difficult to match the characteristics of the differential transformer 1 and the thermistor 2, so sufficient temperature compensation cannot be achieved, and the oscillation circuit that applies the oscillation signal to the primary side of the differential transformer 1 4 and the downstream electronic circuit 3 for detecting the amount of displacement that performs processing such as amplification, detection, or A/D conversion on the output signal.
Measurement accuracy could not be maintained sufficiently. (The reference numeral 5 in the figure is a display that displays the amount of displacement based on the output signal of the electronic circuit 3.) Conventionally, as shown in FIG. 2, a differential transformer 1
The output is taken out to a separate system from the electronic circuit 3 for subsequent stage displacement detection such as amplification, detection, and A/D conversion, and is detected by the detection circuit 6 to convert it into a DC voltage, which is then converted to a preset reference voltage. E is compared with the comparison circuit 7, and the control signal is sent to the oscillation circuit 4 so that the two match.
A method of controlling the oscillation current by outputting it to the oscillator is also used. However, this method cannot compensate for changes in the sensitivity of the electronic circuit 3 for detecting the amount of displacement, and therefore measurement accuracy cannot be maintained sufficiently.

本発明は上記の欠点を改良し、充分な感度補償
ができるようにした変位測定装置.を提供するこ
とを目的としている。
The present invention is a displacement measuring device that improves the above-mentioned drawbacks and enables sufficient sensitivity compensation. is intended to provide.

以下、図面に基いて本発明の一実施例を説明す
る。
Hereinafter, one embodiment of the present invention will be described based on the drawings.

第3図は本発明の変位測定装置の一実施例を示
すブロツク図である。
FIG. 3 is a block diagram showing an embodiment of the displacement measuring device of the present invention.

同図において、11は所定周波数と発振信号を
出力する発振回路、12は測定すべき直線方向の
変位に比例してコア12aが変位する差動トラン
スであつて、発振回路11の発振信号によつて1
次コイル12bが励磁され、逆極性に接続された
2つの2次コイル12c,12dからコア12a
の変位に対応した出力電圧e1、e2をそれぞれ出力
する。13は差動トランス12の2次コイル12
c,12dの出力電圧e1、e2の差電圧e1−e2を2
次コイル13bに取り出す入力トランスであつ
て、入力トランス13の1次コイル13aの中間
タツプからはe1とe2の平均電圧(e1+e2)/2が
取り出される。14は第1の切換スイツチで、入
力トランス13の2次コイル13bからの出力端
子イと1次コイル13aの中間タツプからの出力
端子ロとを切換えるものである。15は切換スイ
ツチ14を介した端子イ又はロからの出力信号を
増幅する交流増幅器、16は交流増幅器15の出
力信号を検波して直流信号にする検波器、17は
検波器16の出力信号を増幅する直流増幅器、1
8は直流増幅器17の出力信号をデイジタル信号
に変換するA/D変換器である。19は第2の切
換スイツチで、前記第1の切換スイツチ14に連
動してA/D変換器18の出力信号を端子イ,ロ
に振り分ける。20は変位出力回路で、端子イに
接続され、A/D変換器18の出力信号を変位信
号として出力する。21は端子ロに接続され、
A/D変換器18の出力信号をアナログ信号に変
換するD/A変換器である。22はD/A変換器
21の出力信号を予め設定した基準電圧Eと比較
して両者が等しくなるように制御信号を出力する
比較回路、23は比較回路22の制御信号を記憶
して発振回路11へ該制御信号を出力して発振回
路11の発振信号の振幅を制御する制御信号記憶
回路である。
In the figure, 11 is an oscillation circuit that outputs a predetermined frequency and an oscillation signal, and 12 is a differential transformer whose core 12a is displaced in proportion to the linear displacement to be measured. 1
The secondary coil 12b is excited, and the core 12a is connected to the two secondary coils 12c and 12d connected with opposite polarity.
output voltages e 1 and e 2 corresponding to the displacement of , respectively. 13 is the secondary coil 12 of the differential transformer 12
The difference voltage e 1 −e 2 between the output voltages e 1 and e 2 of c and 12d is 2
The average voltage (e 1 +e 2 )/2 of e 1 and e 2 is taken out from the intermediate tap of the primary coil 13a of the input transformer 13, which is an input transformer taken out to the secondary coil 13b. Reference numeral 14 denotes a first changeover switch, which switches between output terminal A from the secondary coil 13b of the input transformer 13 and output terminal B from the intermediate tap of the primary coil 13a. 15 is an AC amplifier that amplifies the output signal from terminal A or B via the changeover switch 14; 16 is a detector that detects the output signal of the AC amplifier 15 and converts it into a DC signal; and 17 is a detector that amplifies the output signal of the detector 16. Amplifying DC amplifier, 1
8 is an A/D converter that converts the output signal of the DC amplifier 17 into a digital signal. A second changeover switch 19 distributes the output signal of the A/D converter 18 to terminals A and B in conjunction with the first changeover switch 14. A displacement output circuit 20 is connected to terminal A and outputs the output signal of the A/D converter 18 as a displacement signal. 21 is connected to terminal RO,
This is a D/A converter that converts the output signal of the A/D converter 18 into an analog signal. 22 is a comparison circuit that compares the output signal of the D/A converter 21 with a preset reference voltage E and outputs a control signal so that both are equal; 23 is an oscillation circuit that stores the control signal of the comparison circuit 22; This is a control signal storage circuit that outputs the control signal to the oscillation circuit 11 to control the amplitude of the oscillation signal of the oscillation circuit 11.

次に上記実施例の動作を説明する。 Next, the operation of the above embodiment will be explained.

差動トランス12の1次コイル12bは発振回
路11からの発振信号によつて励磁され、2次コ
イル12c,12dの出力電圧e1、e2はコア12
aの変位に対応して変化する。入力トランス13
の2次コイル13bには出力電圧e1−e2が生じ、
1次コイル13aの中間タツプには(e1+e2)/
2が生じる。
The primary coil 12b of the differential transformer 12 is excited by the oscillation signal from the oscillation circuit 11, and the output voltages e 1 and e 2 of the secondary coils 12c and 12d are applied to the core 12.
It changes according to the displacement of a. Input transformer 13
An output voltage e 1 −e 2 is generated in the secondary coil 13b of
The middle tap of the primary coil 13a has (e 1 +e 2 )/
2 occurs.

第1の切換スイツチ14を介して、端子イ又は
ロから得られる出力信号は交流増幅器15で増幅
され、検波器16で検波されて直流信号にされ、
直流増幅器17で増幅され、A/D変換器18で
デイジタル信号に変換される。第1、第2の切換
スイツチ14,19がイ側に接続されている場合
には、差電圧e1−e2の交流信号が上記のように増
幅、検波され、A/D変換されて、変位信号とし
て変位出力回路20から出力される。第1、第2
の切換スイツチ14,19がロ側に接続されてい
る場合には、平均電圧(e1+e2)/2の交流信号
が同一の回路15〜18を経てD/A変換器21
でアナログ信号に変換され、比較回路22で基準
電圧Eと比較され、両者が等しくなるように制御
信号が出力される。この制御信号は制御信号記憶
回路23で記憶され、発振回路11へ出力されて
発振信号の振幅を制御して発振電圧e0を制御す
る。
The output signal obtained from terminal A or B via the first changeover switch 14 is amplified by an AC amplifier 15, detected by a detector 16, and converted into a DC signal.
The signal is amplified by a DC amplifier 17 and converted into a digital signal by an A/D converter 18. When the first and second changeover switches 14 and 19 are connected to the A side, the AC signal of the difference voltage e 1 -e 2 is amplified and detected as described above, and A/D converted. It is output from the displacement output circuit 20 as a displacement signal. 1st, 2nd
When the changeover switches 14 and 19 are connected to the low side, the AC signal with the average voltage (e 1 +e 2 )/2 passes through the same circuits 15 to 18 to the D/A converter 21.
It is converted into an analog signal by the comparison circuit 22, and compared with the reference voltage E by the comparison circuit 22, and a control signal is outputted so that the two become equal. This control signal is stored in the control signal storage circuit 23 and output to the oscillation circuit 11 to control the amplitude of the oscillation signal and control the oscillation voltage e 0 .

周知の如く、差動トランス12の2次コイル1
2c,12dの出力電圧e1、e2は、第4図に示す
ように、差動トランス12のコア12aの変位に
対応してほぼ直線的に変化する。即ち、コア12
aが零点から上方へ(横軸の+側)変位すると2
次コイル12cの出力電圧e1は増加し、2次コイ
ル12dの出力電圧e2は減少する。コア12aが
下方へ変位するとe1は減少し、e2は増加する。こ
のため、差電圧e1−e2は零点から上方、下方への
変位にほぼ比例して増加するが、平均電圧(e1
e2)/2はコア12の変位に無関係にほぼ一定に
なる。
As is well known, the secondary coil 1 of the differential transformer 12
The output voltages e 1 and e 2 of the differential transformers 2c and 12d change approximately linearly in response to the displacement of the core 12a of the differential transformer 12, as shown in FIG. That is, core 12
When a is displaced upward from the zero point (to the + side of the horizontal axis), 2
The output voltage e 1 of the secondary coil 12c increases, and the output voltage e 2 of the secondary coil 12d decreases. When the core 12a is displaced downward, e 1 decreases and e 2 increases. Therefore, the differential voltage e 1 −e 2 increases approximately in proportion to the upward and downward displacement from the zero point, but the average voltage (e 1 +
e 2 )/2 remains approximately constant regardless of the displacement of the core 12.

しかして、温度変化などによつて差動トランス
12の出力電圧e1、e2に変動が生じると、差電圧
e1−e2及び平均電圧(e1+e2)/2も変動する。
そして、第4図に鎖線で示すようにe1、e2はコア
の変位に比例して増大するので、e1、e2の変動幅
aもコアの変位に比例して増大し、このため差電
圧e1−e2の変動幅bもコアの変化に比例して増大
するが、平均電圧(e1+e2)/2の変動幅cはコ
アの変位と無関係にほぼ一定になる。従つて、温
度の変化などが生じても平均電圧(e1+e2)/2
の変動幅cを零にする方向に制御すれば差電圧e1
−e2の変動もなくなり、誤差の少ない変位信号が
得られる。また差動トランス12以外にも、発振
回路11、入力トランス13、交流増幅器15、
検波器16、直流増幅器17、A/D変換器18
なども温度変化などによつて感度変化を生ずる
が、平均電圧信号(e1+e2)/2と差電圧信号e1
−e2と全く同一の回路を経由するため、平均電圧
及び差電圧に関して同一比率の変動を生じさせる
ことになる。
However, if the output voltages e 1 and e 2 of the differential transformer 12 fluctuate due to temperature changes, the differential voltage
e 1 −e 2 and the average voltage (e 1 +e 2 )/2 also vary.
As shown by the chain line in Fig. 4, e 1 and e 2 increase in proportion to the displacement of the core, so the fluctuation width a of e 1 and e 2 also increases in proportion to the displacement of the core, and therefore Although the variation width b of the differential voltage e 1 −e 2 also increases in proportion to the change in the core, the variation width c of the average voltage (e 1 +e 2 )/2 remains almost constant regardless of the core displacement. Therefore, even if changes in temperature occur, the average voltage (e 1 + e 2 )/2
If the fluctuation width c of is controlled in the direction of zero, the differential voltage e 1
−e 2 fluctuation is also eliminated, and a displacement signal with less error can be obtained. In addition to the differential transformer 12, the oscillation circuit 11, the input transformer 13, the AC amplifier 15,
Detector 16, DC amplifier 17, A/D converter 18
etc. also cause sensitivity changes due to temperature changes, etc., but the average voltage signal (e 1 + e 2 )/2 and the difference voltage signal e 1
-e Since it passes through the same circuit as 2 , it causes the same ratio of fluctuations in the average voltage and differential voltage.

従つて、第2の切換スイツチ19、D/A変換
器21を経た平均電圧信号を比較器22で予め設
定した基準電圧Eと比較して両者が一致するよう
に制御信号を出力すれば、第1、第2の切換スイ
ツチ14,19をイ側に切換えた場合の差電圧信
号の変動が補正されて、変位出力回路20に出力
される。
Therefore, if the average voltage signal passed through the second changeover switch 19 and the D/A converter 21 is compared with the reference voltage E set in advance by the comparator 22, and a control signal is output so that the two match, the 1. Fluctuations in the differential voltage signal when the second changeover switches 14 and 19 are switched to the A side are corrected and output to the displacement output circuit 20.

従つて、測定ごとに、あるいは一定測定回数ご
とに第1、第2の切換スイツチ14,19をロ側
に切換えて発振回路11の振幅を制御することに
よつて温度変化などによる誤差を著しく減少させ
ることができる。
Therefore, by controlling the amplitude of the oscillation circuit 11 by switching the first and second changeover switches 14 and 19 to the low side after each measurement or after a certain number of measurements, errors caused by temperature changes, etc. can be significantly reduced. can be done.

また第5図に示すように、測定対象の変位が著
しく大きく、コア12aの変位が大きい場合に
は、e1、e2、e1−e2、(e1+e2)/2のいずれもあ
る変位より上では直線性が悪くなる。従つて、こ
のような場合にも(e1+e2)/2の例えば第5図
にdで示す曲線部分を直線部分d′となるように比
較回路22から制御信号を出力すれば、差電圧信
号e1−e2の曲線部分fを直線部分f′となるように
することができるから、測定の非直線性による誤
差の補償も可能である。
Further, as shown in FIG. 5, when the displacement of the measurement target is extremely large and the displacement of the core 12a is large, all of e 1 , e 2 , e 1 −e 2 , and (e 1 +e 2 )/2 Linearity deteriorates above a certain displacement. Therefore, even in such a case, if a control signal is outputted from the comparator circuit 22 so that the curved portion of (e 1 +e 2 )/2 shown by d in FIG. 5 becomes a straight line portion d', the differential voltage Since the curved portion f of the signal e 1 -e 2 can be made to be a straight line portion f', it is also possible to compensate for errors due to nonlinearity of measurement.

なお上記実施例では制御信号を発振回路11に
出力しているが、第2の切換スイツチ19からの
出力電圧が一定になるように閉ループ制御すれば
同じ結果が得られるから、制御信号を交流増幅器
15、検波器16、直流増幅器17、A/D変換
器18のいずれかに出力してもよい。
In the above embodiment, the control signal is output to the oscillation circuit 11, but the same result can be obtained by performing closed loop control so that the output voltage from the second changeover switch 19 is constant. 15, the detector 16, the DC amplifier 17, or the A/D converter 18.

以上説明したように本発明の変位測定装置では
変位出力のための電子回路の最終段の出力と同じ
出力端子から得た出力に基づいて測定値補償のた
めの制御量を決定し、この制御量を記憶しておい
て、この記憶した制御量によつて、以後の測定を
制御するようにしたから、変位出力のための回路
全体の温度特性の直線性を補償することができ
る。
As explained above, the displacement measuring device of the present invention determines the control amount for measurement value compensation based on the output obtained from the same output terminal as the output of the final stage of the electronic circuit for displacement output, and determines the control amount for compensation of the measured value. Since the following measurements are controlled using the stored control amount, the linearity of the temperature characteristic of the entire circuit for outputting displacement can be compensated for.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は従来の補償回路付き変位測
定装置を示すブロツク図、第3図は本発明の一実
施例を示すブロツク図、第4図及び第5図は差動
トランスのコアの変位に対する出力特性を示す図
である。 11……発振回路、12……差動トランス、1
4……第1の切換スイツチ、17……直流増幅
器、19……第2の切換スイツチ、20……変位
出力回路、22……比較回路、23……制御信号
記憶回路。
1 and 2 are block diagrams showing a conventional displacement measuring device with a compensation circuit, FIG. 3 is a block diagram showing an embodiment of the present invention, and FIGS. 4 and 5 are diagrams showing the core of a differential transformer. FIG. 3 is a diagram showing output characteristics with respect to displacement. 11...Oscillation circuit, 12...Differential transformer, 1
4...First changeover switch, 17...DC amplifier, 19...Second changeover switch, 20...Displacement output circuit, 22...Comparison circuit, 23...Control signal storage circuit.

Claims (1)

【特許請求の範囲】 1 所定周波数の発振信号を発生する発振回路
と、 該発振回路の発振信号によつて1次コイルが励
磁され、二つの2次コイルの出力電圧がコアの変
位に対応して変化する差動トランスと、 前記二つの2次コイルの出力電圧の差電圧信号
を出力する差電圧出力回路と、 前記差電圧信号を増幅検波する増幅検波回路
と、 前記差電圧信号についての前記増幅検波回路の
出力信号を受けて、これを前記コアの変位信号と
して出力する変位出力回路とを備えた変位測定装
置において、 前記二つの2次コイルの出力電圧の和電圧信号
を出力する和電圧出力回路と、 前記増幅検波回路への入力を、前記差電圧出力
回路と和電圧出力回路のいずれかに切換える第1
の切換スイツチと、 前記和電圧出力回路の出力を前記第1の切換ス
イツチによつて前記増幅検波回路へ入力させた場
合の前記増幅検波回路の出力信号を予め設定され
た基準電圧と比較して、前記発振回路へ制御信号
を出力する制御回路と、 前記増幅検波回路の出力を、前記変位出力回路
と前記制御回路のいずれかに前記第1の切換スイ
ツチに連動して切換える第2の切換スイツチと、 前記制御回路の制御信号を記憶する制御信号記
憶回路とを設け、 前記第1の切換スイツチを介して前記和電圧信
号出力回路の出力を入力したときの前記増幅検波
回路の出力信号を、前記第2の切換スイツチを介
して前記制御回路で受けて、このときの制御回路
の制御信号を前記制御信号記憶回路に記憶させた
後、前記第1切換スイツチを前記差電圧信号出力
回路へ切換えると共に、前記第2の切換スイツチ
を前記変位出力回路側へ切換えて、以後の変位測
定において前記制御信号記憶回路に記憶された制
御信号で前記発振回路を制御するようにしたこと
を特徴とする変位測定装置。
[Claims] 1. An oscillation circuit that generates an oscillation signal of a predetermined frequency; a primary coil is excited by the oscillation signal of the oscillation circuit, and the output voltages of the two secondary coils correspond to the displacement of the core. a differential voltage output circuit that outputs a differential voltage signal between the output voltages of the two secondary coils; an amplification and detection circuit that amplifies and detects the differential voltage signal; and a displacement output circuit that receives an output signal of the amplification detection circuit and outputs it as a displacement signal of the core, the sum voltage outputting a sum voltage signal of the output voltages of the two secondary coils. an output circuit, and a first circuit that switches the input to the amplification and detection circuit to either the difference voltage output circuit or the sum voltage output circuit.
a changeover switch, and an output signal of the amplification and detection circuit when the output of the sum voltage output circuit is input to the amplification and detection circuit by the first changeover switch is compared with a preset reference voltage. , a control circuit that outputs a control signal to the oscillation circuit, and a second switch that switches the output of the amplification and detection circuit to either the displacement output circuit or the control circuit in conjunction with the first switch. and a control signal storage circuit for storing a control signal of the control circuit, and an output signal of the amplification and detection circuit when the output of the sum voltage signal output circuit is inputted via the first changeover switch. After receiving the control signal from the control circuit through the second changeover switch and storing the control signal of the control circuit at this time in the control signal storage circuit, the first changeover switch is switched to the differential voltage signal output circuit. At the same time, the second changeover switch is switched to the displacement output circuit side, and the oscillation circuit is controlled by the control signal stored in the control signal storage circuit in subsequent displacement measurements. measuring device.
JP12728683A 1983-07-13 1983-07-13 Displacement measuring device Granted JPS6018701A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12728683A JPS6018701A (en) 1983-07-13 1983-07-13 Displacement measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12728683A JPS6018701A (en) 1983-07-13 1983-07-13 Displacement measuring device

Publications (2)

Publication Number Publication Date
JPS6018701A JPS6018701A (en) 1985-01-30
JPH0321047B2 true JPH0321047B2 (en) 1991-03-20

Family

ID=14956211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12728683A Granted JPS6018701A (en) 1983-07-13 1983-07-13 Displacement measuring device

Country Status (1)

Country Link
JP (1) JPS6018701A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2526597Y2 (en) * 1988-03-07 1997-02-19 トヨタ自動車株式会社 Differential transformer type displacement detector
US5066911A (en) * 1989-04-07 1991-11-19 Sundstrand Data Control, Inc. Apparatus and method for sensing displacement using variations magnetic flux linkage
JP4852666B1 (en) * 2011-03-04 2012-01-11 株式会社マコメ研究所 Displacement sensor
JP2015184093A (en) * 2014-03-24 2015-10-22 多摩川精機株式会社 Linear type differential transformer sensor device and temperature correction method thereof
CN109870098A (en) * 2017-12-04 2019-06-11 北京自动化控制设备研究所 A method for detecting the position of a UAV rudder system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246748U (en) * 1975-09-30 1977-04-02

Also Published As

Publication number Publication date
JPS6018701A (en) 1985-01-30

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