JPH03210A - Manufacture of epoxy resin forming material - Google Patents

Manufacture of epoxy resin forming material

Info

Publication number
JPH03210A
JPH03210A JP13400989A JP13400989A JPH03210A JP H03210 A JPH03210 A JP H03210A JP 13400989 A JP13400989 A JP 13400989A JP 13400989 A JP13400989 A JP 13400989A JP H03210 A JPH03210 A JP H03210A
Authority
JP
Japan
Prior art keywords
epoxy resin
weight
pts
parts
inorganic filler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13400989A
Other languages
Japanese (ja)
Inventor
Masaya Ichikawa
市川 雅哉
Yasuhiro Kyotani
京谷 靖宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP13400989A priority Critical patent/JPH03210A/en
Publication of JPH03210A publication Critical patent/JPH03210A/en
Pending legal-status Critical Current

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  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)

Abstract

PURPOSE:To make it possible to manufacture epoxy resin forming material, which highly contains inorganic filler, has low viscosity and is excellent in formability with small generation of thin fin by a method wherein resin composition is again heated, melted and kneaded after the subsequent addition of hardening assistant and, after that, cooled and ground. CONSTITUTION:Resin composition, which consists of epoxy resin (a), phenol- novolak setting agent (b) and inorganic filler, is heated, melted and kneaded and, after that, cooled and ground into particulates. Hardening assistant is dispersed in the resultant particulates and again heated, melted and kneaded and finally cooled and ground. From five to ten pts.wt. of phenol-novolak setting agent (b) is used with respect to 10-20 pts.wt. of the epoxy resin (a). As the inorganic filler, 400-1000 pts.wt. of powder singly such as crystal silica, fused silica or the like or their combination is used with respect to 100 pts.wt. of the sum of the components (a) and (b). As the setting assistant, imidazoles, tertiary amine or the like is preferable and 0.05-5 pts.wt. of the hardening assistant is used with respect to 100 pts.wt. of the sum of the components (a) and (b). Further, the particulate is preferably a finely divided particle having a particle diameter below 100 mesh.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、半導体素子を保護する目的で用いられる半
導体封止に有用なエポキシ樹脂成形材料の製造方法に関
する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for producing an epoxy resin molding material useful for semiconductor encapsulation used for the purpose of protecting semiconductor elements.

〔従来の技術〕[Conventional technology]

近年、半導体分野においては高集積、高機能、高速、高
出力化の要求が年々高まってきている。
In recent years, in the semiconductor field, demands for higher integration, higher functionality, higher speed, and higher output have been increasing year by year.

それに伴い半導体装置を封止成形する封止成形材料に対
して、耐湿性はもちろんのこと低応力、高熱伝導性など
の要求がなされている。このために、無機質充填材をま
すます高充填させる必要に迫られてきている。しかしな
がら、低応力、高熱伝導性のために無機質充填材を高充
填させると成形材料の低粘度を確保することはできなか
った。したがって、成形材料の高粘度化のために半導体
装1内のワイヤー変形や切断を招き、さらには耐湿性に
有害な成形品としての半導体装置に未充填やボイドなど
を生じると言う問題があった。また各成分を一度に配合
し加熱、溶融、混線で成形材料化するには、樹脂の適度
な硬化度で終わらせるために樹脂と無機質充填材との濡
れが充分におこなわれないために、成形品の周りに薄パ
リが多く発生しその除去が非常に困難と言う問題があっ
た。
Accordingly, there are demands for encapsulating materials for encapsulating semiconductor devices to have not only moisture resistance but also low stress and high thermal conductivity. For this reason, there is an increasing need to increase the amount of inorganic filler. However, it has not been possible to ensure low viscosity of the molding material when the inorganic filler is highly filled in order to achieve low stress and high thermal conductivity. Therefore, due to the high viscosity of the molding material, wires within the semiconductor device 1 may be deformed or cut, and furthermore, there may be problems such as unfilling or voids in the semiconductor device as a molded product, which is harmful to moisture resistance. . In addition, in order to form a molding material by blending each component at once and heating, melting, and cross-wiring, the wetting of the resin and inorganic filler cannot be achieved sufficiently in order to achieve an appropriate degree of curing of the resin. There was a problem in that a lot of thin flakes were generated around the product and it was very difficult to remove them.

(発明が解決しようとする課題〕 無機質充填材を高充填させながら、なおかつ低粘度で成
形性に優れ、成形品の周りに発生する薄パリの少ないエ
ポキシ樹脂成形材料の製造方法を提供することにある。
(Problems to be Solved by the Invention) To provide a method for manufacturing an epoxy resin molding material that is highly filled with inorganic fillers, has low viscosity, has excellent moldability, and has less flakiness generated around molded products. be.

〔課題を解決するための手段〕[Means to solve the problem]

本発明者らは、課題を解決するために成形前にあっては
樹脂の硬化をあまり進行させずに、無機質充填材と樹脂
を充分に混練して濡らしてやると成形材料として低粘度
化が図れ、なおかつ樹脂と無機質充填材が同じ挙動を示
すことにより薄パリが減少することを見出し、本発明に
至った。すなわち、本発明は、(イ)エポキシ樹脂、(
ロ)フェノールノボラック系硬化剤、(ハ)および、無
機質充填材からなる樹脂組成物を加熱、溶融、混練した
後、冷却、粉砕した粉粒体に (ニ)硬化助剤を分散させ、再度加熱、溶融、混練した
後、冷却、粉砕することを特徴とするエポキシ樹脂成形
材料の製造方法を提供することにある。
In order to solve the problem, the present inventors have discovered that by thoroughly kneading and wetting the inorganic filler and resin without allowing the resin to harden much before molding, the viscosity of the molding material can be reduced. Furthermore, it was discovered that the resin and the inorganic filler exhibit the same behavior, thereby reducing thin flakes, leading to the present invention. That is, the present invention provides (a) an epoxy resin, (
B) After heating, melting and kneading a resin composition consisting of a phenol novolak curing agent, (c) and an inorganic filler, (d) curing aid is dispersed in the cooled and pulverized powder, and heated again. An object of the present invention is to provide a method for producing an epoxy resin molding material, which comprises melting, kneading, cooling, and pulverizing.

以下に、前記の発明を説明する。まず本発明のエポキシ
樹脂(イ)としては、耐湿性、耐熱性等の性能の良好な
ものとして知られている公知のものを適宜使用すること
ができる。このようなエポキシ樹脂自体としては、例え
ばノボラック型エポキシ樹脂、ビスフェノールA型エポ
キシ樹脂、ビスフェノールF型エポキシ樹脂、脂環式エ
ポキシ樹脂、ハロゲン化エポキシ樹脂などを例示するこ
とができる。
The invention described above will be explained below. First, as the epoxy resin (a) of the present invention, any known resin known to have good properties such as moisture resistance and heat resistance can be used as appropriate. Examples of such epoxy resins include novolak epoxy resins, bisphenol A epoxy resins, bisphenol F epoxy resins, alicyclic epoxy resins, and halogenated epoxy resins.

フェノールノボラック系硬化剤(ロ)としては1分子中
に2個以上のフェノール性水酸基を有するフェノールノ
ボラック型樹脂を好ましいものとして例示することがで
き、従来より使用されているフェノールノボラック樹脂
、クレゾールノボラック樹脂、キシレノールノボラック
樹脂などを、エポキシ樹脂10〜20重量部に対して5
〜10重量部の範囲で用いることができる。
Preferred examples of the phenol novolak curing agent (b) include phenol novolak type resins having two or more phenolic hydroxyl groups in one molecule, including conventionally used phenol novolak resins and cresol novolak resins. , xylenol novolac resin, etc., to 10 to 20 parts by weight of epoxy resin.
It can be used in a range of 10 parts by weight.

無機質充填材(ハ)としては、通常使用される例えば結
晶シリカ、溶融シリカ、アルミナ、窒化ケイ素、酸化チ
タン、炭酸力ルンユウl、などのt5)末を単独又は、
組合せて(イ)および(ロ)成分の合計量100重量部
に対して400〜1000重量部用いることができる。
As the inorganic filler (c), commonly used powders such as crystalline silica, fused silica, alumina, silicon nitride, titanium oxide, carbonate, etc. can be used alone or,
In combination, 400 to 1000 parts by weight can be used based on 100 parts by weight of the total amount of components (a) and (b).

特には高純度の結晶シリカ、溶融シリカ、アルミナ、窒
化ケイ素が望ましい、又、これら無機質充填材の粒径は
100μ未満のものが成形金型のゲートを詰まらせない
ので好ましい。なお無機質充填材と樹脂との濡れを良く
するためにこれら無機質充填材を予めカップリング剤、
例えばエポキシシラン、アミノシランなどで処理するこ
ともできる。
In particular, highly pure crystalline silica, fused silica, alumina, and silicon nitride are preferred, and the particle size of these inorganic fillers is preferably less than 100 μm because they do not clog the gate of the mold. In order to improve wetting between the inorganic filler and the resin, these inorganic fillers are coated with a coupling agent,
For example, it can also be treated with epoxysilane, aminosilane, etc.

硬化助薊(ニ)としては、イミダゾール類、3級アミン
などが望ましく、その使用量は(イ)および、(ロ)成
分の合計量100重量部に対して0.05〜5重量部用
いることができる。なお、硬化助剤は後添加するので固
形が好ましく、成形金型のゲート詰まり防止と、均一分
散のためにその粒径は100メツシュ未満の微粒子であ
ることが好ましい。
As the curing aid (2), imidazoles, tertiary amines, etc. are desirable, and the amount used is 0.05 to 5 parts by weight per 100 parts by weight of the total amount of components (a) and (b). I can do it. Since the curing aid is added later, it is preferably solid, and the particle size is preferably less than 100 mesh in order to prevent clogging of the mold gate and to ensure uniform dispersion.

その他、離型剤として、通常使用される例えば、カルナ
バワンクス、ステアリン酸、ステアリン酸の金属塩など
が用いられ、染顔料としてはカーボンブラック、酸化チ
タン、アゾ系の含金属化合物の黒色有機染料などが用い
られ、難燃剤としては二酸化アンチモン、水酸化アルミ
ニウムなどが必要に応じて用いられる。
In addition, commonly used mold release agents include carnauba wax, stearic acid, and metal salts of stearic acid, and dyes and pigments include carbon black, titanium oxide, and black organic dyes of azo metal-containing compounds. Antimony dioxide, aluminum hydroxide, etc. are used as flame retardants as necessary.

以上の成分を配合して成形材料化するに際しては、加熱
、溶融、混練は熱ロール又は、ニーダ−などによりおこ
なうことができ、分散、冷却、粉砕も成形材料の生産に
用いられる通常の装置を使用することができる。これら
の装置を用いて、成分(イ)のエポキシ樹脂、成分(ロ
)のフェノルツボラック系硬化剤、成分(ハ)の無機質
充填材および離型剤、染顔料、難燃剤など、その他、成
分を必要に応じて配合し、混合分散機にかけた粉体を、
熱ロールで加熱、溶融、混練してシート状にし、冷却機
で固くし、粉砕機で粉粒体とする。
When blending the above ingredients to make a molding material, heating, melting, and kneading can be performed using heated rolls or a kneader, and dispersion, cooling, and pulverization can also be performed using ordinary equipment used in the production of molding materials. can be used. Using these devices, component (a) epoxy resin, component (b) phenoltuborac curing agent, component (c) inorganic filler and mold release agent, dyes and pigments, flame retardants, etc. The powder is blended as necessary and passed through a mixing/dispersing machine.
It is heated, melted, and kneaded using hot rolls to form a sheet, hardened using a cooling machine, and made into powder using a pulverizer.

この粉粒体に成分(ニ)の硬化助剤を後添加し、混合分
散機にかけて均一分散した粉粒体を、再度、熱ロールで
加熱、溶融、混練してシート状にし、冷却機で固(し、
粉砕機で粉粒体としてエポキシ樹脂成形材料を製造する
ものである。
The hardening aid of component (d) is added to this powder and granules afterward, and the powder and granules are homogeneously dispersed using a mixing and dispersing machine.Then, the powder and granules are again heated, melted, and kneaded with hot rolls to form a sheet, and then solidified with a cooling machine. (death,
The epoxy resin molding material is manufactured in the form of powder using a pulverizer.

〔実施例〕〔Example〕

実施例1 エポキシ樹脂としてオルソクレゾールノボラックエポキ
シ樹脂(エポキシ当量220、軟化点64°C)を14
重量部、硬化剤としてフェノールノボラック樹脂(OH
当N110、軟化点80″C)を7重量部、無機質充填
材としては、結晶シリカを100重量部、この結晶シリ
カの表面改質としてエポキシシランカップリング剤を0
.5重量部、離型剤としてカルナバワックスを0.4重
量部、顔料としてカーボンブラックを0゜4重量部、こ
れらの成分を均一に分散した後、100 ’Cの熱ロー
ルで加熱、溶融、混練を20回繰り返し充分に行ったも
のを冷却、粉砕して粉粒体としたものに硬化助剤として
、粒径100メツシュ未満の2メチルイミダゾールを0
.1重量部加えて、均一分散、混合して、再度、100
 ’Cの熱ロールで加熱、溶融、混練を5回繰り返し充
分に行ったものを冷却、粉砕して粉粒体としてエポキシ
樹脂成形材料とした。
Example 1 Orthocresol novolak epoxy resin (epoxy equivalent: 220, softening point: 64°C) was used as an epoxy resin at 14
Part by weight, phenol novolak resin (OH
7 parts by weight of N110, softening point 80''
.. 5 parts by weight, 0.4 parts by weight of carnauba wax as a mold release agent, and 0.4 parts by weight of carbon black as a pigment.After uniformly dispersing these components, they were heated, melted, and kneaded with a hot roll at 100'C. The process was repeated 20 times, then cooled and pulverized to form a powder, and as a hardening agent, 2-methylimidazole with a particle size of less than 100 mesh was added to the powder.
.. Add 1 part by weight, uniformly disperse and mix, and add 100% by weight again.
The mixture was thoroughly heated, melted, and kneaded 5 times using a hot roll of 'C', and then cooled and crushed to form a powder into an epoxy resin molding material.

実施例2 実施例1の硬化助剤2メチルイミダゾールの粒径を10
0メツシュ以上の2メチルイミダゾールとした以外は、
実施例1と全く同様にしてエポキシ樹脂成形材料とした
Example 2 The particle size of the hardening aid 2 methylimidazole in Example 1 was changed to 10
Except for using 2-methylimidazole with a mesh size of 0 or more,
An epoxy resin molding material was prepared in exactly the same manner as in Example 1.

比較例1 実施例1′と硬化助剤の量以外は同じ成分配合で、硬化
助剤を除いた成分をまず均一分散した後、100°Cの
熱ロールで加熱、溶融、混線を20回繰り返し充分に行
ったものを冷却、粉砕して粉粒体としたものに硬化助剤
として、粒径100メツシュ未満の2メチルイミダゾー
ルを0.15重量部加えて、均一分散、混合してエポキ
シ樹脂成形材料とした。
Comparative Example 1 The ingredients were the same as in Example 1' except for the amount of curing aid, and the components except for the curing aid were first uniformly dispersed, and then heating, melting, and cross-wiring were repeated 20 times with a heated roll at 100°C. After cooling and pulverizing the thoroughly processed material, 0.15 parts by weight of 2-methylimidazole with a particle size of less than 100 mesh is added as a hardening agent, and the mixture is uniformly dispersed and mixed to form epoxy resin. It was used as a material.

比較例2 実施例1と同じ成分配合で、硬化助剤の2メチルイミダ
ゾールも他の成分と一緒に最初から均一分散した後、1
00℃の熱ロールで加熱、溶融、混練を6回繰り返し行
ったものを、冷却、粉砕して粉粒体のエポキシ樹脂成形
材料とした。なお、同じ配合品で100°Cの熱ロール
で加熱、溶融、混練を12回繰り返し行ったものを、冷
却、粉砕して粉粒体のエポキシ樹脂成形材料としたもの
においては、成形することができないぐらい硬化が進ん
でいた。
Comparative Example 2 With the same component composition as in Example 1, the hardening aid 2-methylimidazole was uniformly dispersed from the beginning together with other components, and then 1
The mixture was heated, melted, and kneaded six times using a hot roll at 00°C, then cooled and pulverized to obtain a granular epoxy resin molding material. In addition, if the same compounded product is heated, melted, and kneaded 12 times with a heated roll at 100°C, then cooled and crushed to form a powdered epoxy resin molding material, it is not possible to mold it. It had hardened to the point where it could not be done.

以上で得たそれぞれのエポキシ樹脂成形材料を用いて成
形材料の成形性代用特性として、溶融粘度を島津製作所
の高化式フローテスター(ノズルの形状φ1m*、厚み
2m、ポット温度150°C1荷重30kg/cd)で
、スパイラルフローをEMM■に準じ金型温度170°
Cで、ゲルタイムをJSR型キュラストメーター(金型
温度170 ’C)でそれぞれ測定し、これらの値を第
1表に示した。
Using each of the epoxy resin molding materials obtained above, the melt viscosity was measured using a Shimadzu Koka type flow tester (nozzle shape φ1 m*, thickness 2 m, pot temperature 150°C, load 30 kg) as a substitute for the moldability of the molding material. /cd), and the mold temperature is 170° according to EMM■.
C, the gel time was measured using a JSR model Curelastometer (mold temperature 170'C), and these values are shown in Table 1.

また、実際の成形性として、アルミニウム配線TEG素
子を実装したリードフレームを16DIPニドランスフ
アー成形で成形したのち、バリフローはこの金型の10
μの厚みのエアーベントに形成される薄パリの長さを実
測し、ワイヤー変形は軟X線でφ25μの金線の変形度
合いを観察して判定し、未充填は16DIP成形品の外
観を観察して判定し、これらの結果も第1表に示した。
In addition, for actual moldability, after molding the lead frame mounting the aluminum wiring TEG element by 16DIP nitrogen transfer molding, the variflow was
The length of the thin strip formed in the air vent with a thickness of μ was actually measured, wire deformation was determined by observing the degree of deformation of the φ25 μ gold wire with soft X-rays, and the appearance of the 16 DIP molded product was observed for unfilled parts. These results are also shown in Table 1.

比較例1および2に対して実施例1および2は、はぼ同
じ配合で硬化助剤を後添加したのち、再度、加熱、溶融
、混練し、その後冷却、粉砕して得た粉粒体としたこと
により、ゲルタイムがほぼ同等にもかかわらず溶融粘度
を低下、スパイラルフローを大きくすることができ、1
6DIPの実際の成形においてもこれら低粘度化の効果
だけでなく、樹脂と無機質充填材の濡れの向上を示すバ
リフローの低減が認められる。
In contrast to Comparative Examples 1 and 2, Examples 1 and 2 were made with powder and granules obtained by post-adding a hardening aid with almost the same composition, heating, melting, and kneading, and then cooling and pulverizing. By doing so, it was possible to reduce the melt viscosity and increase the spiral flow even though the gel time was almost the same.
In actual molding of 6DIP, not only the effect of lowering the viscosity but also the reduction of burr flow, which indicates improved wetting of the resin and the inorganic filler, is observed.

実施例2に示したように、後添加の硬化助剤が100メ
ツシュ以上の粒子を含むものになると、均一分散が損な
われて特性評価値にバラツキを生じたり、金型のゲート
詰まりを生じ成形品に未充填を発生させるなど好ましく
ない。
As shown in Example 2, if the post-added curing aid contains particles of 100 mesh or more, uniform dispersion may be impaired, resulting in variations in property evaluation values, or mold gate clogging, resulting in poor molding. This is not desirable as it may cause unfilled items.

〔発明の効果〕〔Effect of the invention〕

上述のように本発明の硬化助剤を後から添加し再度、加
熱、溶融、混練し、その後冷却、粉砕する方法によって
、無機質充填材を高充填させながら、なおかつ低粘度で
薄パリ発生の少ない成形性に優れたエポキシ樹脂成形材
料の製造をすることができるのである。
As mentioned above, by adding the curing aid of the present invention later, heating, melting, kneading, and then cooling and pulverizing, the inorganic filler can be highly filled, while the viscosity is low and there is little occurrence of thin flakes. This makes it possible to produce an epoxy resin molding material with excellent moldability.

特許出願人  松下電工株式会社Patent applicant Matsushita Electric Works Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] (1)(イ)エポキシ樹脂、 (ロ)フェノールノボラック系硬化剤、 (ハ)および、無機質充填材からなる樹脂 組成物を加熱、溶融、混練した後、冷却、粉砕した粉粒
体に (ニ)硬化助剤を分散させ、再度加熱、溶 融、混練した後、冷却、粉砕することを特徴とするエポ
キシ樹脂成形材料の製造方法。
(1) After heating, melting, and kneading a resin composition consisting of (a) an epoxy resin, (b) a phenol novolac curing agent, (c), and an inorganic filler, cooling and grinding the resulting powder into powder and granules, ) A method for producing an epoxy resin molding material, which comprises dispersing a curing aid, heating, melting, and kneading it again, followed by cooling and pulverizing.
(2)前記硬化助剤が100メッシュ未満の粒子で構成
されている固形の粉末であることを特徴とする請求項1
記載のエポキシ樹脂成形材料の製造方法。
(2) Claim 1, wherein the curing aid is a solid powder composed of particles of less than 100 mesh.
A method for manufacturing the epoxy resin molding material described.
(3)前記(イ)成分のエポキシ樹脂が10〜20重量
部、(ロ)成分のフェノールノボラック系硬化剤が5〜
10重量部、(イ)および(ロ)成分の合計量100重
量部に対して(ハ)成分の無機質充填材が400〜10
00重量部、そして同じく(ニ)成分の硬化助剤が0.
05〜5重量部の割合で配合してなる請求項1又は、2
記載のエポキシ樹脂成形材料の製造方法。
(3) 10 to 20 parts by weight of the epoxy resin as the component (a) and 5 to 20 parts by weight of the phenol novolak curing agent as the component (b).
10 parts by weight, the inorganic filler of component (c) is 400 to 10 parts by weight per 100 parts by weight of the total amount of components (a) and (b).
00 parts by weight, and also 0.00 parts by weight of the curing aid, component (2).
Claim 1 or 2, wherein the composition is blended in a proportion of 0.05 to 5 parts by weight.
A method for manufacturing the epoxy resin molding material described.
JP13400989A 1989-05-26 1989-05-26 Manufacture of epoxy resin forming material Pending JPH03210A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13400989A JPH03210A (en) 1989-05-26 1989-05-26 Manufacture of epoxy resin forming material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13400989A JPH03210A (en) 1989-05-26 1989-05-26 Manufacture of epoxy resin forming material

Publications (1)

Publication Number Publication Date
JPH03210A true JPH03210A (en) 1991-01-07

Family

ID=15118248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13400989A Pending JPH03210A (en) 1989-05-26 1989-05-26 Manufacture of epoxy resin forming material

Country Status (1)

Country Link
JP (1) JPH03210A (en)

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