JPH03215007A - Manufacture of ceramic substrate - Google Patents
Manufacture of ceramic substrateInfo
- Publication number
- JPH03215007A JPH03215007A JP1146790A JP1146790A JPH03215007A JP H03215007 A JPH03215007 A JP H03215007A JP 1146790 A JP1146790 A JP 1146790A JP 1146790 A JP1146790 A JP 1146790A JP H03215007 A JPH03215007 A JP H03215007A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic substrate
- defects
- alumina
- occurrence
- green sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 title claims abstract description 11
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000010304 firing Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 5
- 230000007547 defect Effects 0.000 abstract description 5
- 238000002156 mixing Methods 0.000 abstract description 5
- 239000011230 binding agent Substances 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 239000000843 powder Substances 0.000 abstract description 3
- 238000004080 punching Methods 0.000 abstract description 3
- 239000000454 talc Substances 0.000 abstract description 3
- 229910052623 talc Inorganic materials 0.000 abstract description 3
- 238000001035 drying Methods 0.000 abstract description 2
- 229920000609 methyl cellulose Polymers 0.000 abstract description 2
- 239000001923 methylcellulose Substances 0.000 abstract description 2
- 235000010981 methylcellulose Nutrition 0.000 abstract description 2
- 239000002245 particle Substances 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 241000581364 Clinitrachus argentatus Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 235000012255 calcium oxide Nutrition 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 150000002085 enols Chemical class 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は各撞竃子素子の悟載基板等として用いられる七
ラｉｑク基板の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a 7-IQ substrate used as a mounting substrate for each of the bellows elements.
従来、セラミックｉｔは基板に分割の為のブレークライ
ンを設け多数個取りにすることが一般に行なわれて論る
。この基板は印絢や素子搭載後にプレークラインで分割
し製品とするものであるがフレークラインを設けること
で焼成時基板に反りが発生しやすくなり不良となる問題
があった。Conventionally, it has been common practice to provide a break line for dividing the substrate in ceramic IT to produce a large number of pieces. This board is divided into products at a flake line after inlaying and mounting of elements, but the provision of the flake line causes the board to warp more easily during firing, resulting in defects.
従来の技術で述べたように七ラミ噌ク基板の製造過程に
お論では不良が多発しやすい。本発明は従来の技術にお
ける上述の問題点に鑑みてなされたもので，その目的と
するところは、反りが小さく不良発生が減少するセラミ
９ク基板を提供することにある。As described in the section on conventional technology, defects tend to occur frequently in the manufacturing process of seven-laminated circuit boards. The present invention has been made in view of the above-mentioned problems in the prior art, and its object is to provide a ceramic substrate with less warpage and less occurrence of defects.
本発明はセラミックグリーンシ一トを焼成して七ラミ噌
ク基板を製造する方法にお論で、プレークライン角度を
１〜４５度にすることを特徴とするセラミック基板の製
造方法のため、上記目的を遜成することができたもので
、以下本発明を詳細に説明する。The present invention is applicable to a method of manufacturing a seven-laminate board by firing a ceramic green sheet. The present invention has been achieved and will be described in detail below.
本発明に用いる骨材としては、アルミナ、窒化ケイ素，
窒化ボロン、マグネシア等のセラミ咋ク骨材全般を用ｈ
るζとがで，８るが、好まし《はアルミナを用ｈること
がより分散性の点で効果があり望ましｂことである．バ
インダーとしては水、メチｌレセルロース、スターチ、
γミノ樹Ｈｋｔ、’エノール樹脂、アクリル、酢酸ビニ
ール、グリセリン、グリコール等のように液状、粉末状
を問わず用ｂられ、併用することもできる。燃焼助剤と
してはタルク、カルシア，イ，トリウム等を用論ること
ができ、特に限定するものではない。混合、混練、焼成
等につｈては特に限定するものでなく、通常用帆られる
ものをそのまま用いることができるが、成形乃至打抜加
工時にプレークライン角度を１〜４５度にすることが必
要である。即ち１度未満では反りが発生し易く、４５度
をこえると分割し難くなるためである．プレークライン
深さは特に限定するものではないが５０〜２００ミクロ
ンであることが好まし論．
以下本発明を実施例にもとづいて説明する。Aggregates used in the present invention include alumina, silicon nitride,
Uses all types of ceramic aggregates such as boron nitride and magnesia.
However, it is preferable to use alumina because it is more effective in terms of dispersibility. As a binder, water, methyl cellulose, starch,
It can be used in either liquid or powder form, such as γminoki Hkt, 'enol resin, acrylic, vinyl acetate, glycerin, glycol, etc., and can also be used in combination. As the combustion aid, talc, calcia, i, thorium, etc. can be used, and there is no particular limitation. There are no particular limitations on mixing, kneading, firing, etc., and ordinary materials can be used as they are, but it is necessary to set the plate angle to 1 to 45 degrees during molding or punching. It is. That is, if the angle is less than 1 degree, warping is likely to occur, and if it exceeds 45 degrees, it becomes difficult to divide. Although the precline depth is not particularly limited, it is preferably 50 to 200 microns. The present invention will be explained below based on examples.
実施例ｌ乃至６と比較例１乃至４
平均粒径２ミクロンのアルミナ１００部に対シ、タルク
２部を加えミキサーで混合後、ミキサー内Ｊ（： 粒度
２ ５０メ噌シュのメチルセルロース５部を水垢部に溶
解させた液状バインダーを粉末材料を混合させつつ注入
添加し、混合後、三本ロールで混練してから押出機で厚
さ１．１鰭にν一ト化し、乾燥後、４００ Ｘ ４ＧＧ
ｍ＋１１に打抜加工する際、史に１００Ｘ １００ ｆ
ｌに分割できるように第１表に示すようにプレークライ
ンを設けた後、次に該グリーンシートをアルミナ製セ−
＃夕一上に１０枚積層し１００″ｃ／＠司の昇温本で１
５７０℃迄昇湿させ、１５７０℃で３時間焼成後，降温
してセラミック基板を得た．実施例ｌ乃至６と比較例ｌ
乃至４のセラミウク基板の反りは第２表のようである。Examples 1 to 6 and Comparative Examples 1 to 4 To 100 parts of alumina with an average particle size of 2 microns, 2 parts of talc were added and mixed in a mixer. The liquid binder dissolved in the limescale area was injected and added while mixing the powder materials, and after mixing, kneaded with three rolls, and then converted to a 1.1 fin thickness with an extruder, and after drying, 400X 4GG
When punching to m+11, 100X 100 f
After providing a pre-cline as shown in Table 1 so that the green sheet can be divided into
#Layer 10 sheets on Yuichi and 100″c/@Tsukasa’s heating book 1
The humidity was raised to 570°C, and after firing at 1570°C for 3 hours, the temperature was lowered to obtain a ceramic substrate. Examples 1 to 6 and Comparative Example 1
The warpage of the ceramic substrates Nos. 4 to 4 is as shown in Table 2.
本発明は上述した如く榊成されている．特許請求の範囲
に記載した構成を有する七ラミ叩ク基板にお論では反り
が小さく不曳発生が低下する効兼がある。The present invention has been completed as described above. In theory, the seven-laminated board having the configuration described in the claims has the effect of reducing warpage and reducing the occurrence of unrolling.
手続補正
書
（自発）
ｌ．
２．
３．
４．
事件の表示
平成２年 特 許 願 第 １１４６７号発明の名称
セラミック基板の製造方法
補正をする者
事件との関係 特許出願人
住 所 大阪府門真市大字門真１０４８番地名称（
５８３）松下電工株式会社Procedural amendment (voluntary) l. 2. 3. 4. Display of the case 1990 Patent application No. 11467 Name of the invention Person amending the manufacturing method of a ceramic substrate Relationship to the case Patent applicant address 1048 Kadoma, Kadoma City, Osaka Prefecture Name (
583) Matsushita Electric Works Co., Ltd.
Claims (1)
基板を製造する方法において、プレークライン角度を１
〜４５度にすることを特徴とするセラミック基板の製造
方法。(1) In a method of manufacturing a ceramic substrate by firing a ceramic green sheet, the plate line angle is set to 1
A method for manufacturing a ceramic substrate, characterized in that the temperature is 45 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1146790A JPH03215007A (en) | 1990-01-19 | 1990-01-19 | Manufacture of ceramic substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1146790A JPH03215007A (en) | 1990-01-19 | 1990-01-19 | Manufacture of ceramic substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03215007A true JPH03215007A (en) | 1991-09-20 |
Family
ID=11778883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1146790A Pending JPH03215007A (en) | 1990-01-19 | 1990-01-19 | Manufacture of ceramic substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03215007A (en) |
-
1990
- 1990-01-19 JP JP1146790A patent/JPH03215007A/en active Pending
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