JPH03215341A - Production of ceramic substrate - Google Patents
Production of ceramic substrateInfo
- Publication number
- JPH03215341A JPH03215341A JP2011466A JP1146690A JPH03215341A JP H03215341 A JPH03215341 A JP H03215341A JP 2011466 A JP2011466 A JP 2011466A JP 1146690 A JP1146690 A JP 1146690A JP H03215341 A JPH03215341 A JP H03215341A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic substrate
- liquid binder
- green sheet
- aggregate
- ceramic green
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000007788 liquid Substances 0.000 claims abstract description 11
- 239000011230 binding agent Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 10
- 239000000843 powder Substances 0.000 claims description 9
- 238000005507 spraying Methods 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 5
- 238000002485 combustion reaction Methods 0.000 abstract description 2
- 238000000465 moulding Methods 0.000 abstract description 2
- 239000000454 talc Substances 0.000 abstract description 2
- 229910052623 talc Inorganic materials 0.000 abstract description 2
- 239000007864 aqueous solution Substances 0.000 abstract 1
- 229920000609 methyl cellulose Polymers 0.000 abstract 1
- 239000001923 methylcellulose Substances 0.000 abstract 1
- 235000010981 methylcellulose Nutrition 0.000 abstract 1
- 230000007547 defect Effects 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 235000012255 calcium oxide Nutrition 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 238000005494 tarnishing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は各種電子素子の搭載基板等として用いられるセ
ラミック基板の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a ceramic substrate used as a mounting substrate for various electronic devices.
従来、セラミック基板のバインダーは液状バインダーに
あっては骨材等の粉末材料中に注入添加して論るが、粉
末材料の大半が微粉末のため、部分吸看が発生し、液状
バインダーの均一分散ができず成形物端邪に欠け、タラ
リクが発生しやすく不良高が増大する問題があった。Conventionally, liquid binders for ceramic substrates are added by injection into powder materials such as aggregates, but since most of the powder materials are fine powders, partial absorption occurs and the liquid binder is not uniform. There was a problem that dispersion could not be achieved, the molded product lacked edge quality, and tarnishing was likely to occur, resulting in an increase in the number of defects.
従来の技術で述べたようにセラミ噌ク基板の製造過程に
おいては不良が多発しやすー。本発明番ま従来の技術に
おける上述の問題点Ｃこ鑑みてなされたもので、その目
的とするところは、不良発生カＳ減少するセラミック基
板を提供すること番こめる。As mentioned in the section on conventional technology, defects tend to occur frequently in the manufacturing process of ceramic substrates. The present invention has been made in view of the above-mentioned problems in the prior art, and its object is to provide a ceramic substrate in which the number of defects S is reduced.
本発明はセラミ噌クグリーンシ一トを焼成してセラミ噌
ク基板を製造する方法において，液状／＜イングーを骨
材等の粉末材料に噴霧添加することを特徴とするセラミ
ック基板の製造方法のため、液状バインダー金均一分散
させることができ、上記目的を達成することができたも
ので、以下本発明を詳細に説明する。The present invention relates to a method for producing a ceramic substrate by firing a ceramic green sheet, and the method includes spraying and adding liquid Ingu to a powder material such as aggregate. The liquid binder gold can be uniformly dispersed and the above object can be achieved.The present invention will be described in detail below.
本発明に用ｂる骨材としては、アルミナ、窒化ケイ素、
窒化ボロン、マグネシア等のセラミリク骨材全般を用−
ることができるが、好ましくはアルミナを用ｂることが
より分散性の点で効果があり望まし論ことである。バイ
ンダーとしては水、メチｌレセｌレロース、スターチ、
アミノ樹月旨．７エ／ − ルＩｆ ｉｌｌ 、アクリ
ル、酢酸ビニール、クリセリン、グリコール等のように
液状、粉末状を問わず用いられ、併用することもできる
。燃焼助剤としてはタルク、カルシア、イウトリウム等
を用−ることができ、特に限定するものではなｈ．液状
バインダーの添加については、粉末材料に噴霧添加する
ことが必要である。かくすることにより液状バインダー
を粉末材料に均一分散させることができるものである。Aggregates used in the present invention include alumina, silicon nitride,
Uses all types of ceramic aggregates such as boron nitride and magnesia.
However, it is preferable to use alumina because it is more effective in terms of dispersibility. As a binder, water, methyl lecellose, starch,
Amino Jugetsuji. It can be used in either liquid or powder form, such as acrylic, vinyl acetate, chrycerin, glycol, etc., and can also be used in combination. As the combustion aid, talc, calcia, iutrium, etc. can be used, and there are no particular limitations.h. For addition of liquid binder, it is necessary to spray add it to the powder material. By doing so, the liquid binder can be uniformly dispersed in the powder material.
成形、焼成等につｈては特に限定するものでなく、通常
用ｂられるものをその菫ま用いることができる。Molding, firing, etc. are not particularly limited, and commonly used materials can be used.
以下本発明を実施例にもとづｈて説明する。The present invention will be explained below based on examples.
実施例
平均粒径２ミクロンのアルミナ１００部に対ｔ，、メル
ク２部を加えミキサーで混合後、ミキサー内に粒度２５
０メッシュのメチルセルロースｓｍｔ水迅部に溶解させ
た液状バインダーを粉末材料を混合させつつＩ ＫＱ／
ｄ の圧力で噴霧して添加し混合後、三本ロールで混
練してから押出機で厚さ１，Ｉｆｆにシート化し、乾燥
後、４００ Ｘ ４ｏｏ ｆｉに打抜ｈてグリーンシ一
トを得た．次に該グリーンシ一トをアルミナ製七噌ター
上にｌθ枚積層し１００℃局間の昇温車で１５７０℃迄
昇温させ、１５７０℃で３時間焼成後、降温しでセラミ
咋ク基板を得た。Example: Add 2 parts of Merck to 100 parts of alumina with an average particle size of 2 microns and mix in a mixer.
I KQ/
The mixture was added by spraying at a pressure of d, mixed, kneaded with three rolls, formed into a sheet with a thickness of 1.Iff using an extruder, and after drying, was punched into 400 x 4oo fi to obtain a green sheet. Ta. Next, lθ sheets of the green sheet were laminated on an alumina 7-inch plate, heated to 1570°C using a heating car between 100°C stations, fired at 1570°C for 3 hours, and then lowered to form a ceramic substrate. I got it.
比較例
実施例の液状バインダーを噴霧添加せず、粉末材料中に
注入添加した以外は実施例と同様に処理してセラミック
基板を得た。Comparative Example A ceramic substrate was obtained in the same manner as in the example except that the liquid binder of the example was not added by spraying but was added by injection into the powder material.
実施例及び比較例のセラミ噌ク基板の性能は第１表のよ
うである。Table 1 shows the performance of the ceramic substrates of Examples and Comparative Examples.
本発明は上述した如く構成されている。特許請求の範囲
に記載した構成を有するセラミック基板におｂては不良
発生が低下する効果がある。The present invention is constructed as described above. The ceramic substrate having the configuration described in the claims has the effect of reducing the occurrence of defects.
Claims (1)
基板を製造する方法において、液状バインダーを骨材等
の粉末材料に噴霧添加することを特徴とするセラミック
基板の製造方法。(1) A method for producing a ceramic substrate by firing a ceramic green sheet, which comprises spraying and adding a liquid binder to a powder material such as aggregate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011466A JPH03215341A (en) | 1990-01-19 | 1990-01-19 | Production of ceramic substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011466A JPH03215341A (en) | 1990-01-19 | 1990-01-19 | Production of ceramic substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03215341A true JPH03215341A (en) | 1991-09-20 |
Family
ID=11778857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011466A Pending JPH03215341A (en) | 1990-01-19 | 1990-01-19 | Production of ceramic substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03215341A (en) |
-
1990
- 1990-01-19 JP JP2011466A patent/JPH03215341A/en active Pending
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