JPH03218981A - Sheet for roasting ceramics base plate - Google Patents

Sheet for roasting ceramics base plate

Info

Publication number
JPH03218981A
JPH03218981A JP2011739A JP1173990A JPH03218981A JP H03218981 A JPH03218981 A JP H03218981A JP 2011739 A JP2011739 A JP 2011739A JP 1173990 A JP1173990 A JP 1173990A JP H03218981 A JPH03218981 A JP H03218981A
Authority
JP
Japan
Prior art keywords
alumina
sheet
ceramics
fiber
firing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011739A
Other languages
Japanese (ja)
Other versions
JPH0627026B2 (en
Inventor
Masahiro Maeda
昌宏 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tomoegawa Co Ltd
Original Assignee
Tomoegawa Paper Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tomoegawa Paper Co Ltd filed Critical Tomoegawa Paper Co Ltd
Priority to JP2011739A priority Critical patent/JPH0627026B2/en
Publication of JPH03218981A publication Critical patent/JPH03218981A/en
Publication of JPH0627026B2 publication Critical patent/JPH0627026B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To obtain a sheet from which a smooth ceramics base plate is produced without adverse effect on ceramics based on an unevenness at is time roasting of the ceramics base plate by combining an alumina-based binder with alumina-based ceramics fiber and manufacturing the sheet. CONSTITUTION:This sheet is manufactured by combining an alumina-based binder with alumina-based ceramics fiber. The utilized alumina-based ceramics fiber is obtained by using Al2O3-SiO2-based ceramics as a starting raw material and fabricating it into fiber. Al2O3 content incorporated in this fiber is regulated to high blending of 80-95%. As the alumina-based binder, colloid liquid of alumina hydrate wherein water is used as a dispersion medium, namely alumina sol is applied. Ammonia is used for fixing of alumina sol and pH is regulated to 7-10. When pH is deviated form this range, fixing of alumina sol is not made good and necessary strength of the sheet is not obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は電子機器用の回路基板の作成に使用されるセラ
ミックス基板焼成時に用いるセパレートシ一トとしての
セラミックス基板焼成用シートに関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a sheet for firing ceramic substrates as a separate sheet used in firing ceramic substrates used in the production of circuit boards for electronic devices.

〔従来の技術〕 〔発明か解決しようとする課題〕従来
、回路基板はセラミックス台板上にアルミナ等からなる
セラミックスの未焼成基板を必要に応Lて多段に載置レ
て、基板と基板の間等に機械又は手作業でアルミナ粉末
の如き高融点金属酸化物の粉末を散布し、その後未焼成
基板を焼成して基板を製造していた。
[Prior Art] [Problem to be Solved by the Invention] Conventionally, circuit boards have been manufactured by placing unfired ceramic substrates made of alumina or the like on a ceramic base plate in multiple stages as necessary. A high-melting point metal oxide powder such as alumina powder is sprinkled in between by a machine or manually, and then the unfired substrate is fired to produce a substrate.

この方法では作業性が悪く前記高融点金属酸化物が均一
に分散されず、製造された基板に反りやうねりを発生す
るとともに、基板同志の付着も起るために、コスト高と
なる等の問題があった。
This method has poor workability, and the high melting point metal oxide is not uniformly dispersed, causing warpage and waviness in the manufactured substrate, as well as adhesion of the substrates to each other, resulting in high costs and other problems. was there.

又、他の方法としてガラス繊維.ロックウール,アルミ
ナシリケート等を基本材として作製したセラミックスシ
一トを、セラミックス焼成用シートとして使用すること
も行なわれてきているが、近年は新素材セラミックスの
開発により、セラミックスの焼成温度が上昇する傾向に
あり、このような繊維を使用したシートでは1000℃
以上の高温域での基板の焼成に際して該シートが基板と
反応したり、基板同志が融着したりして基板の焼成に対
する悪影響が発生する等の問題があった。
Another method is glass fiber. Ceramic sheets made using rock wool, alumina silicate, etc. as basic materials have been used as sheets for firing ceramics, but in recent years, the firing temperature of ceramics has increased due to the development of new ceramic materials. There is a tendency for sheets using such fibers to reach temperatures of 1000°C.
When the substrate is fired in the above-mentioned high-temperature range, there are problems such as the sheet reacting with the substrate or the substrates being fused together, which adversely affects the firing of the substrate.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は前記の如き実情に鑑み、鋭意検討の結果なされ
たもので、アルミナ系セラ≦7クス繊維と、アルミナ系
バインダーとを組合せて抄造した?のシートを採用した
ものである。
The present invention was developed as a result of intensive studies in view of the above-mentioned circumstances, and is made by combining alumina-based ceramic ≦7 fibers and an alumina-based binder. The seat was adopted as follows.

本発明を構成するアルミナ系セラミックス繊維は、Al
tos −Sift質を出発原料として繊維化したもの
で、例えば商品名デンカアルセン(電気化学工業社製)
として上市されているものが本発明に適用される.そし
てその特徴とするところは、繊維中に含まれるA1■0
,の含有量が80〜95%という高配合にあることにあ
る。つまり通常のアルミナシリケート繊維(セラミック
ファイバー)はAlzO.の含有量が55%が上限なの
に対し、本発明で適用するアルミナ系セラミックス繊維
は例えば前駆体法とよばれる特殊な繊維化技術を用い、
紡糸助剤を添加した原液を繊維化することにより、AI
,0.の含有量を約80〜95%にしたものである。
The alumina ceramic fiber constituting the present invention is Al
Tos-Sift material is made into fibers as a starting material, for example, the product name is Denka Arsene (manufactured by Denki Kagaku Kogyo Co., Ltd.).
Those commercially available as . are applicable to the present invention. And its feature is that the A1 and 0 contained in the fibers are
, is in a high blend of 80 to 95%. In other words, normal alumina silicate fibers (ceramic fibers) are AlzO. The upper limit of the content is 55%, whereas the alumina ceramic fiber applied in the present invention uses a special fiberization technology called the precursor method, for example.
By turning the stock solution containing a spinning aid into fibers, AI
,0. The content is about 80 to 95%.

このように高配合のA1■0,がら構成されるアルミナ
系セラミックス繊維を使用することにより、前述のガラ
ス繊維、ロックウール、アルミナシリケート繊維よりも
耐熱温度を大幅に向上することが可能となり、1600
℃の使用温度でも繊維が劣化したり、収縮したりするこ
とがない。
By using alumina-based ceramic fibers composed of A1 and 0, which have a high content, it is possible to significantly improve the heat resistance temperature compared to the glass fibers, rock wool, and alumina silicate fibers mentioned above.
The fibers do not deteriorate or shrink even at operating temperatures of °C.

一方本発明を構成するアルミナ系バインダーとは水を分
散媒としたアルミナ水和物のコロイド液すなわちアルミ
ナゾルが適用される。該アルミナゾルは5mμ〜200
mμのコロイドの大きさを持つベーマイト系アルミナ水
和物で重合粒子が水中の陰イオンを安定剤として分散し
ている乳白色の液体であり、例えば商品名アルミナゾル
(日産化学社製)として上市されているものが使用され
る。
On the other hand, the alumina-based binder constituting the present invention is a colloidal liquid of alumina hydrate using water as a dispersion medium, that is, an alumina sol. The alumina sol has a diameter of 5 mμ to 200
It is a milky white liquid in which polymerized particles of boehmite-based alumina hydrate with a colloid size of mμ are dispersed using anions in water as a stabilizer. What is available is used.

本発明の実施に際しては湿式抄造法が用いられる。すな
わちアルミナ系セラミックス繊維を水に分散しスラリー
とし、これにバインダーとして例えばアルミナゾルをア
ルミナ系セラミックス繊維に対し5〜60重量%加えて
抄造される。この場合アルミナゾルが5重量%未満では
抄造されたシートに所定の強度が得られず、一方60重
量%を超えた場合はアルミナゾルの歩留りが悪くなり、
シートの強度上昇には貢献しない。
A wet papermaking method is used in carrying out the present invention. That is, alumina ceramic fibers are dispersed in water to form a slurry, and a binder, such as alumina sol, is added thereto in an amount of 5 to 60% by weight based on the alumina ceramic fibers to form paper. In this case, if the alumina sol is less than 5% by weight, the sheet produced will not have the desired strength, while if it exceeds 60% by weight, the yield of alumina sol will be poor.
It does not contribute to increasing the strength of the sheet.

アルミナゾルの定着にはアンモニアを使用し、pHが7
〜10になるように調整する. pHがこの範囲を外れ
た場合はアルミナゾルの定着は旨く行かず、必要なシー
トの強度は得られない。
Ammonia is used to fix the alumina sol, and the pH is 7.
Adjust so that it is ~10. If the pH is outside this range, the fixation of the alumina sol will not be successful and the required strength of the sheet will not be obtained.

得られるシートの厚さは0.05〜2mが適当であり、
0.05 ws未満では焼成後必要なシートの強度が得
られず、又焼成において基板同志が融着する可能性を生
じるので好ましくない。又、シートの厚さが2諺を超え
た場合は必要以上に厚くなるだけであるので、コストが
高くなるだけで他に有利な効果は生れない。
The appropriate thickness of the sheet obtained is 0.05 to 2 m,
If it is less than 0.05 ws, the required strength of the sheet cannot be obtained after firing, and there is a possibility that the substrates will fuse together during firing, which is not preferable. Moreover, if the thickness of the sheet exceeds 2,000 yen, the sheet will simply become thicker than necessary, which will only increase the cost and will not produce any other advantageous effects.

又、無機バインダーだけではシートに強度が不足するよ
うな場合、PVA,SWP,天然パルブ,合成パルプ等
の有機系バインダーを使用することが好ましい。ただし
有機系バインダーの添加量はバインダーの総量に対し2
0重量%以下であることが望ましい。20重量%を超え
た場合には、セラミックスの焼成時にセラミックス基板
に悪影響を及ぼす可能性が考えられる。しかし、−その
影響が容認できる範囲ならばその範囲での添加はたとえ
20重量%を超えても不都合ではない。
Further, in cases where the strength of the sheet is insufficient with an inorganic binder alone, it is preferable to use an organic binder such as PVA, SWP, natural pulp, or synthetic pulp. However, the amount of organic binder added is 2 to the total amount of binder.
It is desirable that the amount is 0% by weight or less. If it exceeds 20% by weight, there is a possibility that it will have an adverse effect on the ceramic substrate during firing of the ceramic. However, if the effect is within an acceptable range, it is not disadvantageous to add it within that range, even if it exceeds 20% by weight.

上記の方法で抄造された本発明のセラミックス基板焼成
用シートは表面が平滑で基板焼成時にシートの凹凸によ
るセラミックスへの悪影響はなく平滑なセラミンクス基
板が得られる。
The sheet for firing ceramic substrates of the present invention produced by the above method has a smooth surface, and when the sheet is fired, unevenness of the sheet does not have an adverse effect on the ceramics, and a smooth ceramic substrate can be obtained.

〔実施例〕〔Example〕

以下に本発明を実施例により具体的に説明する。 The present invention will be specifically explained below using examples.

実施例1 水101にAhOiの含有量が約80%のアルミナ系セ
ラミックス繊維(商品名電化アルカセン、電気化学工業
社製)を40g、アルミナ系バインダー(商品名アルミ
ナゾル、日産化学社製)の乾燥重量10g相当量を加え
てよく攪拌した後、アンモニア、硫酸バンドでpHを調
節し、バインダーを定着後、更にポリアクリルアミド系
の凝集剤(商品名サンフロソクAH−200P、日産化
学社製)を加え、この原料2lをTAPPI型手抄器に
入れて手抄を行い、本発明のセラミックス基板焼成用シ
ートを作成した。
Example 1 40 g of alumina-based ceramic fiber (trade name: Denka Alkasen, manufactured by Denki Kagaku Kogyo Co., Ltd.) with an AhOi content of about 80% in 101 water, and the dry weight of an alumina-based binder (trade name: Alumina Sol, manufactured by Nissan Chemical Co., Ltd.) After adding an amount equivalent to 10 g and stirring well, adjust the pH with ammonia and sulfuric acid band, fix the binder, and then add a polyacrylamide-based flocculant (trade name: Sanfurosoku AH-200P, manufactured by Nissan Chemical Co., Ltd.). 2 liters of the raw material was placed in a TAPPI type hand paper machine and subjected to hand paper making to produce a sheet for firing ceramic substrates of the present invention.

比較例1 実施例1におけるアルミナ系セラミックス繊維?アルミ
ナシリケート繊維(Al■03含有量50%商品名イビ
ウール、イビデン社製)に代え、アルミナ系バインダー
をシリカ系バインダー(商品名スノーテックス、日産化
学社製)に代えた以外は実施例1と同様にして比較用の
セラミックス基板焼成用シートを作成した。
Comparative Example 1 Alumina ceramic fiber in Example 1? Same as Example 1 except that the alumina silicate fiber (50% Al 03 content, trade name Ibiwool, manufactured by Ibiden) was replaced, and the alumina binder was replaced with a silica binder (trade name Snowtex, manufactured by Nissan Chemical Co., Ltd.). A ceramic substrate firing sheet was prepared for comparison.

比較例2 実施例1におけるアルミナ系セラミックス繊維をアルミ
ナシリケート繊維(Al■03含有量50%商品名イビ
ウール、イビデン社製)に代えた以外は実施例1と同様
にして比較用のセラミックス基板焼成用シートを作成し
た。
Comparative Example 2 A comparative ceramic substrate for firing was prepared in the same manner as in Example 1, except that the alumina-based ceramic fiber in Example 1 was replaced with alumina silicate fiber (trade name: Ibiwool, manufactured by Ibiden Co., Ltd. with an Al 03 content of 50%). I created a sheet.

比較例3 実施例1におけるアルミナ系バインダーをシリカ系バイ
ンダー(商品名スノーテソクス、日産化学社製)に代え
た以外は実施例1と同様にして比較用のセラミックス基
板焼成用シートを作成した。
Comparative Example 3 A ceramic substrate firing sheet for comparison was prepared in the same manner as in Example 1 except that the alumina binder in Example 1 was replaced with a silica binder (trade name Snowtesox, manufactured by Nissan Chemical Co., Ltd.).

上記実施例lおよび比較例1〜3により得られたセラミ
,クス基板焼成用シ一ト1を第1図に示すように厚さ1
.  5m、面積50tmxlOOtmからなるアルミ
ナの未焼成セラミックス基板2の間に挟み、900−1
500T:の温度で焼成した結果、第1表に示す結果が
得られた。なお、第1図中の3はセラミックス台板であ
る。
The sheet 1 for firing ceramic substrates obtained in Example 1 and Comparative Examples 1 to 3 above was heated to a thickness of 1 mm as shown in FIG.
.. 900-1 sandwiched between alumina unfired ceramic substrates 2 having a length of 5 m and an area of 50 tm x lOOtm.
As a result of firing at a temperature of 500T, the results shown in Table 1 were obtained. Note that 3 in FIG. 1 is a ceramic base plate.

第1表 注) 上記第1表から明らかなとおり、アルミナシリケート繊
維を使用したシート(比較例1〜3)では1000℃ま
では収縮率が比較的小さくセパレートシ一トとして使用
してもセラミックス基板に何の影響も無かったが、12
00℃を超えると、シートの収縮が始まり1500℃で
は約50%(面積保持率)の収縮となり、セラミックス
基板表面に収縮や凹凸などの影響を与えることが判明し
た。
Table 1 Note) As is clear from Table 1 above, sheets using alumina silicate fibers (Comparative Examples 1 to 3) have a relatively small shrinkage rate up to 1000°C, and even when used as separate sheets, they cannot be used as ceramic substrates. There was no effect on 12
It was found that when the temperature exceeds 00°C, the sheet begins to shrink, and at 1500°C, it shrinks by about 50% (area retention rate), which causes shrinkage and unevenness on the surface of the ceramic substrate.

しかし、本発明によるデンカアルカセンとアルミナゾル
の組合わせによるシート(実施例l)では1500℃で
焼成しても何ら影響はなかった。
However, the sheet made of the combination of Denka alkacene and alumina sol according to the present invention (Example 1) had no effect even when fired at 1500°C.

バインダーについてもシリカ系のもの(比較例1〜3)
は1000℃を超えると、基板との反応、融着がおこり
、セパレーターとして使用出来ないことが判明した。
The binder is also silica-based (Comparative Examples 1 to 3)
It was found that when the temperature exceeds 1000°C, reaction and fusion with the substrate occur, making it impossible to use it as a separator.

実施例2 アルミナ含有量80%のアルミナ系セラミックス繊維(
商品名デンカアルセン、電気化学工業社製)とアルミナ
系バインダー(アルミナゾル)を乾燥重量比率で前者が
80部、後者が20部となるように抄紙原料を水中で調
整しアジテーターを用いて攪拌混合する。この抄紙原料
にpHが9.0となるようにアンモニア水を加えアルミ
ナゾルを定着させる。更にこれにポリアクリルアミド系
の凝集剤(商品名サンフロックAH−2 0 0 P、
日産化学社製)を加える。この抄紙原料を抄紙幅200
Mのフォードリニアー型抄紙機で抄紙し、坪料1 5 
0 g/rrl、厚さ200μ一からなる本発明のセラ
ミックス基板焼成用シートを得た。
Example 2 Alumina ceramic fiber with 80% alumina content (
(trade name: Denka Arsene, manufactured by Denki Kagaku Kogyo Co., Ltd.) and an alumina binder (alumina sol) are adjusted in water so that the dry weight ratio of the former is 80 parts and the latter is 20 parts, and the mixture is stirred and mixed using an agitator. . Ammonia water is added to this papermaking raw material so that the pH becomes 9.0, and the alumina sol is fixed thereon. Furthermore, a polyacrylamide-based flocculant (trade name Sunfloc AH-200P,
(manufactured by Nissan Chemical Co., Ltd.). This papermaking raw material is used to make paper width 200.
Paper is made using M's Ford Linear paper machine, and the basis weight is 15.
A sheet for firing a ceramic substrate of the present invention having a weight of 0 g/rrl and a thickness of 200 μm was obtained.

第2図に示すようにこのシ一ト4をリールから矢印方向
に送り出し、ヒーター5を内蔵する酸化雰囲気中の連続
焼成炉6を通過させ、内部にある基板用の未焼成セラミ
ックスシ一トを焼成した後、リールに巻き取るようにし
て実施した。
As shown in FIG. 2, this sheet 4 is sent out from the reel in the direction of the arrow and passed through a continuous firing furnace 6 in an oxidizing atmosphere containing a heater 5, to remove the unfired ceramic sheet for substrates inside. After firing, the test was carried out by winding it up on a reel.

その際本発明のセラミックス基板焼成用シ一ト4は、未
焼成のセラミックス基板7の支持体となるように利用し
て本発明の実施を試みた。
At that time, the ceramic substrate firing sheet 4 of the present invention was utilized to serve as a support for the unfired ceramic substrate 7 in an attempt to implement the present invention.

具体的には、連続焼成炉6としては長さ1m、幅15c
11の装置を使用し、焼成条件は1200℃の温度で酸
化雰囲気中、1分間に5dlの速度で移動し、20分か
けて焼成を行うようにした。
Specifically, the continuous firing furnace 6 has a length of 1 m and a width of 15 cm.
No. 11 apparatus was used, and the firing conditions were such that the temperature was 1200° C. in an oxidizing atmosphere, the temperature was moved at a rate of 5 dl per minute, and the firing took 20 minutes.

焼成に際しては50X50■のアルミナの未焼成セラミ
ックス基板7を、多数のロール8の上を走行する本発明
のセラミックス基板焼成用シ一ト1の上に等間隔にて載
置して行った。その結果基板への融着を生じることも無
く、剥離性も良好で、しかも基板に亀裂や傷を生じるこ
とも無く、このような連続焼成炉を使用しても何ら実用
上の問題を生じることが無かった. 〔発明の効果〕 本発明によりアルミナ等の基板を多段状に重ねて焼成す
る場合に、1500℃までの焼成が可能となり、更に本
発明のセラミックス基板焼成用シートの平滑な面に接触
した状態で焼成されるので敷粉を使用した場合と異なり
基板に亀裂や傷が発生しない。
During firing, unfired ceramic substrates 7 of alumina measuring 50×50 mm were placed on the ceramic substrate firing sheet 1 of the present invention running on a large number of rolls 8 at equal intervals. As a result, there is no fusion to the substrate, good peelability, and no cracks or scratches on the substrate, and there are no practical problems when using such a continuous firing furnace. There was no. [Effects of the Invention] According to the present invention, when substrates such as alumina are stacked in multiple stages and fired, firing up to 1500°C is possible, and furthermore, when the sheet for firing ceramic substrates of the present invention is in contact with the smooth surface, Because it is fired, there are no cracks or scratches on the substrate, unlike when using bed powder.

【図面の簡単な説明】[Brief explanation of drawings]

第1図及び第2図は本発明のセラミックス基板焼成用シ
ートを使って基板を焼成する状態を示す断面図である。 1:セラミックス基板焼成用シート 2:未焼成セラミックス基板 3:セラミックス台板 4:セラミックス基板焼成用シ一ト 5:ヒーター    6:連続焼成炉 7:未焼成セラミックス基板 8:ロール
1 and 2 are cross-sectional views showing a state in which a substrate is fired using the ceramic substrate firing sheet of the present invention. 1: Ceramics substrate firing sheet 2: Unfired ceramics substrate 3: Ceramics base plate 4: Ceramics substrate firing sheet 5: Heater 6: Continuous firing furnace 7: Unfired ceramics substrate 8: Roll

Claims (1)

【特許請求の範囲】 1) アルミナ系セラミックス繊維と、アルミナ系バイ
ンダーとを組合せて抄造してなることを特徴とするセラ
ミックス基板焼成用シート 2) 有機系のバインダーを併用した請求項1記載のセ
ラミックス基板焼成用シート
[Scope of Claims] 1) A sheet for firing a ceramic substrate, characterized in that it is formed by combining alumina ceramic fibers and an alumina binder. 2) The ceramic according to claim 1, which also contains an organic binder. Board firing sheet
JP2011739A 1990-01-23 1990-01-23 Ceramic substrate firing sheet Expired - Fee Related JPH0627026B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011739A JPH0627026B2 (en) 1990-01-23 1990-01-23 Ceramic substrate firing sheet

Applications Claiming Priority (1)

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JP2011739A JPH0627026B2 (en) 1990-01-23 1990-01-23 Ceramic substrate firing sheet

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JPH03218981A true JPH03218981A (en) 1991-09-26
JPH0627026B2 JPH0627026B2 (en) 1994-04-13

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0921100A (en) * 1993-11-19 1997-01-21 Nippon Muki Co Ltd Inorganic paper molding and its production
CN112573903A (en) * 2019-09-30 2021-03-30 国网河南省电力公司桐柏县供电公司 Aluminum oxide composite substrate material and preparation method thereof
JP2022065125A (en) * 2015-06-29 2022-04-26 コーニング インコーポレイテッド The process of manufacturing ceramic tape

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226488A (en) * 1985-07-25 1987-02-04 日本バイリ−ン株式会社 Dunnage material for baking
JPS6391206A (en) * 1986-10-06 1988-04-21 Mitsubishi Kasei Corp Preparation of inorganic fiber preform
JPS63196800A (en) * 1987-02-06 1988-08-15 オ−ケ−トレ−デイング株式会社 Fire retardant sheet
JPH01148757A (en) * 1987-12-04 1989-06-12 Kawasaki Refract Co Ltd Patching repairing material

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226488A (en) * 1985-07-25 1987-02-04 日本バイリ−ン株式会社 Dunnage material for baking
JPS6391206A (en) * 1986-10-06 1988-04-21 Mitsubishi Kasei Corp Preparation of inorganic fiber preform
JPS63196800A (en) * 1987-02-06 1988-08-15 オ−ケ−トレ−デイング株式会社 Fire retardant sheet
JPH01148757A (en) * 1987-12-04 1989-06-12 Kawasaki Refract Co Ltd Patching repairing material

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0921100A (en) * 1993-11-19 1997-01-21 Nippon Muki Co Ltd Inorganic paper molding and its production
JP2022065125A (en) * 2015-06-29 2022-04-26 コーニング インコーポレイテッド The process of manufacturing ceramic tape
CN112573903A (en) * 2019-09-30 2021-03-30 国网河南省电力公司桐柏县供电公司 Aluminum oxide composite substrate material and preparation method thereof
CN112573903B (en) * 2019-09-30 2022-08-26 国网河南省电力公司桐柏县供电公司 Aluminum oxide composite substrate material and preparation method thereof

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