JPH0322351U - - Google Patents
Info
- Publication number
- JPH0322351U JPH0322351U JP8219189U JP8219189U JPH0322351U JP H0322351 U JPH0322351 U JP H0322351U JP 8219189 U JP8219189 U JP 8219189U JP 8219189 U JP8219189 U JP 8219189U JP H0322351 U JPH0322351 U JP H0322351U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- stage
- moving
- electron microscope
- scanning electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Description
第１図は本案の一実施例の縦断面図である。
１……電子光学系、２……試料、３……試料室
、４……試料ステージ、５……パツキン、６……
ガイドレール、７……ガイド受け、８……パイプ
。
FIG. 1 is a longitudinal sectional view of one embodiment of the present invention. 1... Electron optical system, 2... Sample, 3... Sample chamber, 4... Sample stage, 5... Packing, 6...
Guide rail, 7...guide receiver, 8...pipe.
Claims (1)
位置へ移動させる試料ステージと前記試料ステー
ジを移動させて試料を試料室から取り出す試料ス
テージ移動機構より成る走査電子顕微鏡の試料装
置において、試料室の内側に前記試料ステージ移
動機構のガイドを大気圧状態で収納可能な筒を設
けたことを特徴とする走査電子顕微鏡の試料装置
。 In a scanning electron microscope sample device comprising a sample chamber for storing a sample, a sample stage for moving the sample to a position desired for observation, and a sample stage moving mechanism for moving the sample stage and taking out the sample from the sample chamber, the inside of the sample chamber A specimen device for a scanning electron microscope, characterized in that a cylinder is provided in which the guide of the specimen stage moving mechanism can be housed at atmospheric pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8219189U JPH0322351U (en) | 1989-07-14 | 1989-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8219189U JPH0322351U (en) | 1989-07-14 | 1989-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0322351U true JPH0322351U (en) | 1991-03-07 |
Family
ID=31628780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8219189U Pending JPH0322351U (en) | 1989-07-14 | 1989-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322351U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002282976A (en) * | 2001-03-27 | 2002-10-02 | Fuji Giken:Kk | Release lifter for sheet metal press die |
-
1989
- 1989-07-14 JP JP8219189U patent/JPH0322351U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002282976A (en) * | 2001-03-27 | 2002-10-02 | Fuji Giken:Kk | Release lifter for sheet metal press die |