JPH0177256U - - Google Patents
Info
- Publication number
- JPH0177256U JPH0177256U JP1987172652U JP17265287U JPH0177256U JP H0177256 U JPH0177256 U JP H0177256U JP 1987172652 U JP1987172652 U JP 1987172652U JP 17265287 U JP17265287 U JP 17265287U JP H0177256 U JPH0177256 U JP H0177256U
- Authority
- JP
- Japan
- Prior art keywords
- moving shaft
- cylindrical body
- electron microscope
- lead wire
- side wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 3
- 238000005375 photometry Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 description 1
Description
第１図は本案の一実施例の要点を示す縦断面図
、第２図は平均測光／部品測光をワンタツチで切
換え可能な実施例を示す縦断面図である。
１……電子顕微鏡側壁、２……承、３……ネジ
、４……摘子、５……筒、６……測定子、７……
Ｏリング、８……Ｏリング、９……ネジ、１０…
…ネジ、１１……リード線、１２……接続端子、
１３……測定器、１４……蛍光板、１５……リー
ド線、１６……気密端子、１７……Ｏリング、１
８……承、１９……測定器、２０……電子線通路
、２１……増幅器、２２……スイツチ。
FIG. 1 is a longitudinal sectional view showing the main points of an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view showing an embodiment in which average photometry/component photometry can be switched with a single touch. 1... Electron microscope side wall, 2... Support, 3... Screw, 4... Knob, 5... Cylinder, 6... Measuring head, 7...
O-ring, 8... O-ring, 9... Screw, 10...
...screw, 11...lead wire, 12...connection terminal,
13... Measuring device, 14... Fluorescent screen, 15... Lead wire, 16... Airtight terminal, 17... O ring, 1
8...Reception, 19...Measuring instrument, 20...Electron beam path, 21...Amplifier, 22...Switch.
Claims (1)
体に挿入された移動軸と、前記移動軸を前記筒体
に対して軸方向に回転させる手段を具備した摘子
よりなるスポツトマスクにおいて、移動軸を電気
的絶縁し、前記移動軸よりリード線を引出し、測
定器への接続を可能とし、スポツト測光を行う為
の端子を設けた事を特徴とする電子顕微鏡等の観
察、撮影補助装置。 A spot mask comprising a cylindrical body inserted into a side wall of an electron microscope, a moving shaft inserted into the cylindrical body, and a knob equipped with means for rotating the moving shaft in the axial direction with respect to the cylindrical body, An observation and photographing auxiliary device for an electron microscope, etc., characterized in that a moving shaft is electrically insulated, a lead wire is drawn out from the moving shaft, connection to a measuring instrument is possible, and a terminal is provided for performing spot photometry. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172652U JPH0177256U (en) | 1987-11-13 | 1987-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172652U JPH0177256U (en) | 1987-11-13 | 1987-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0177256U true JPH0177256U (en) | 1989-05-24 |
Family
ID=31464610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172652U Pending JPH0177256U (en) | 1987-11-13 | 1987-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0177256U (en) |
-
1987
- 1987-11-13 JP JP1987172652U patent/JPH0177256U/ja active Pending